GB2396700B - Apparatus for non-destructive measurement of the thickness of thin layers - Google Patents

Apparatus for non-destructive measurement of the thickness of thin layers

Info

Publication number
GB2396700B
GB2396700B GB0325704A GB0325704A GB2396700B GB 2396700 B GB2396700 B GB 2396700B GB 0325704 A GB0325704 A GB 0325704A GB 0325704 A GB0325704 A GB 0325704A GB 2396700 B GB2396700 B GB 2396700B
Authority
GB
United Kingdom
Prior art keywords
thickness
thin layers
destructive measurement
destructive
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0325704A
Other languages
English (en)
Other versions
GB2396700A (en
GB0325704D0 (en
Inventor
Helmut Fischer
Bernhard Scherzinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Original Assignee
Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Immobiliengesellschaft Helmut Fischer GmbH and Co KG filed Critical Immobiliengesellschaft Helmut Fischer GmbH and Co KG
Publication of GB0325704D0 publication Critical patent/GB0325704D0/en
Publication of GB2396700A publication Critical patent/GB2396700A/en
Application granted granted Critical
Publication of GB2396700B publication Critical patent/GB2396700B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Indicating Measured Values (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
GB0325704A 2002-11-08 2003-11-04 Apparatus for non-destructive measurement of the thickness of thin layers Expired - Fee Related GB2396700B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10252541.2A DE10252541B4 (de) 2002-11-08 2002-11-08 Vorrichtung zur zerstörungsfreien Messung der Dicke dünner Schichten

Publications (3)

Publication Number Publication Date
GB0325704D0 GB0325704D0 (en) 2003-12-10
GB2396700A GB2396700A (en) 2004-06-30
GB2396700B true GB2396700B (en) 2005-11-16

Family

ID=29723942

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0325704A Expired - Fee Related GB2396700B (en) 2002-11-08 2003-11-04 Apparatus for non-destructive measurement of the thickness of thin layers

Country Status (6)

Country Link
US (1) US7180286B2 (enExample)
JP (1) JP2004163430A (enExample)
CN (1) CN100429473C (enExample)
DE (1) DE10252541B4 (enExample)
FR (1) FR2847036B1 (enExample)
GB (1) GB2396700B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2383810B1 (es) * 2009-12-22 2013-05-08 Asociación De Investigación Metalúrgica Del Noroeste Aimen Equipo móvil de inspección del espesor de recubrimientos de película seca, sistema de inspección del espesor de recubrimientos de película seca y procedimiento de inspección del espesor de recubrimientos de película seca.
DE202010006061U1 (de) * 2010-04-23 2010-07-22 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Messsonde zur zerstörungsfreien Messung der Dicke dünner Schichten
CN103988243B (zh) 2011-12-14 2017-09-12 英特尔公司 微型数字看板硬件集成

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1463363A (en) * 1973-03-09 1977-02-02 Fischer Gmbh Co H Measuring the thickness of layers
US4745809A (en) * 1986-08-12 1988-05-24 Grumman Aerospace Corporation Composite analyzer tester
GB2306006A (en) * 1995-10-06 1997-04-23 Car Light & Sound Sys Ltd Thickness measurement

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49146970U (enExample) * 1973-04-16 1974-12-18
JPS5181684U (enExample) * 1974-12-23 1976-06-30
US4730247A (en) * 1983-09-05 1988-03-08 Mitutoyo Mfg. Co., Ltd. Digital indication type measuring apparatus and measured data storage apparatus therefor
JPS6138503A (ja) * 1984-07-31 1986-02-24 Ketsuto Kagaku Kenkyusho:Kk 膜厚計
US5241280A (en) * 1990-06-05 1993-08-31 Defelsko Corporation Coating thickness measurement gauge
DE59201672D1 (de) * 1992-07-03 1995-04-20 Nix Norbert Magnetinduktive und Wirbelstrommesssonde zur Messung einer Schichtdicke.
US5583830A (en) * 1993-06-30 1996-12-10 Casio Computer Co., Ltd. Electronic appliance equipped with sensor capable of visually displaying sensed data
FI115160B (fi) * 1994-06-22 2005-03-15 Suunto Oy Optisesti luettava suuntimakompassi
DE19511397C1 (de) * 1995-03-28 1996-09-12 Norbert Nix Gerät zur Feststellung eines Lackschadens
US5959451A (en) * 1997-08-18 1999-09-28 Torfino Enterprises, Inc. Metal detector with vibrating tactile indicator mounted within a compact housing
GB2347220B (en) * 1999-02-23 2003-12-31 Rynhart Res Ltd A moisture meter
DE19918064C2 (de) * 1999-04-21 2003-09-18 Norbert Nix Schichtdickenmeßgerät mit automatisierter Nulleinstellung und/oder Kalibrierung
GB2356050B (en) * 1999-11-05 2001-10-24 Elcometer Instr Ltd Apparatus and method for measuring thickness
DE20206657U1 (de) * 2002-04-26 2002-09-19 Gimex Dr. Gao Import u. Export GmbH, 67655 Kaiserslautern Multianzeige für Digital-Meßmittel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1463363A (en) * 1973-03-09 1977-02-02 Fischer Gmbh Co H Measuring the thickness of layers
US4745809A (en) * 1986-08-12 1988-05-24 Grumman Aerospace Corporation Composite analyzer tester
GB2306006A (en) * 1995-10-06 1997-04-23 Car Light & Sound Sys Ltd Thickness measurement

Also Published As

Publication number Publication date
FR2847036B1 (fr) 2005-11-11
CN100429473C (zh) 2008-10-29
GB2396700A (en) 2004-06-30
JP2004163430A (ja) 2004-06-10
US7180286B2 (en) 2007-02-20
FR2847036A1 (fr) 2004-05-14
US20040165198A1 (en) 2004-08-26
GB0325704D0 (en) 2003-12-10
CN1501048A (zh) 2004-06-02
DE10252541A1 (de) 2004-05-27
DE10252541B4 (de) 2016-08-11

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20191104