CN100429473C - 用于无毁损地测量薄层厚度的装置 - Google Patents
用于无毁损地测量薄层厚度的装置 Download PDFInfo
- Publication number
- CN100429473C CN100429473C CNB2003101148991A CN200310114899A CN100429473C CN 100429473 C CN100429473 C CN 100429473C CN B2003101148991 A CNB2003101148991 A CN B2003101148991A CN 200310114899 A CN200310114899 A CN 200310114899A CN 100429473 C CN100429473 C CN 100429473C
- Authority
- CN
- China
- Prior art keywords
- display device
- housing
- experimental probe
- measurement
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005259 measurement Methods 0.000 claims abstract description 31
- 239000000523 sample Substances 0.000 claims abstract description 29
- 238000011156 evaluation Methods 0.000 abstract 2
- 230000001066 destructive effect Effects 0.000 abstract 1
- 238000000034 method Methods 0.000 description 11
- 230000033228 biological regulation Effects 0.000 description 5
- 230000002349 favourable effect Effects 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004441 surface measurement Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Indicating Measured Values (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10252541.2A DE10252541B4 (de) | 2002-11-08 | 2002-11-08 | Vorrichtung zur zerstörungsfreien Messung der Dicke dünner Schichten |
| DE10252541.2 | 2002-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1501048A CN1501048A (zh) | 2004-06-02 |
| CN100429473C true CN100429473C (zh) | 2008-10-29 |
Family
ID=29723942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101148991A Expired - Fee Related CN100429473C (zh) | 2002-11-08 | 2003-11-07 | 用于无毁损地测量薄层厚度的装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7180286B2 (enExample) |
| JP (1) | JP2004163430A (enExample) |
| CN (1) | CN100429473C (enExample) |
| DE (1) | DE10252541B4 (enExample) |
| FR (1) | FR2847036B1 (enExample) |
| GB (1) | GB2396700B (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2383810B1 (es) * | 2009-12-22 | 2013-05-08 | Asociación De Investigación Metalúrgica Del Noroeste Aimen | Equipo móvil de inspección del espesor de recubrimientos de película seca, sistema de inspección del espesor de recubrimientos de película seca y procedimiento de inspección del espesor de recubrimientos de película seca. |
| DE202010006061U1 (de) * | 2010-04-23 | 2010-07-22 | Helmut Fischer GmbH Institut für Elektronik und Messtechnik | Messsonde zur zerstörungsfreien Messung der Dicke dünner Schichten |
| CN103988243B (zh) | 2011-12-14 | 2017-09-12 | 英特尔公司 | 微型数字看板硬件集成 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4745809A (en) * | 1986-08-12 | 1988-05-24 | Grumman Aerospace Corporation | Composite analyzer tester |
| CN1103174A (zh) * | 1993-06-30 | 1995-05-31 | 卡西欧计算机公司 | 具有传感器并能显示感测数据的电子装置 |
| US5467014A (en) * | 1992-07-03 | 1995-11-14 | Nix; Norbert | Device for measuring the thickness of a layer or coating on a ferrous and/or non-ferrous substrate |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2311623A1 (de) * | 1973-03-09 | 1974-09-12 | Fischer Gmbh & Co Helmut | Vorrichtung zum messen der dicke von schichten mit einem die schicht bestrahlenden radionuklid |
| JPS49146970U (enExample) * | 1973-04-16 | 1974-12-18 | ||
| JPS5181684U (enExample) * | 1974-12-23 | 1976-06-30 | ||
| US4730247A (en) * | 1983-09-05 | 1988-03-08 | Mitutoyo Mfg. Co., Ltd. | Digital indication type measuring apparatus and measured data storage apparatus therefor |
| JPS6138503A (ja) * | 1984-07-31 | 1986-02-24 | Ketsuto Kagaku Kenkyusho:Kk | 膜厚計 |
| US5241280A (en) * | 1990-06-05 | 1993-08-31 | Defelsko Corporation | Coating thickness measurement gauge |
| FI115160B (fi) * | 1994-06-22 | 2005-03-15 | Suunto Oy | Optisesti luettava suuntimakompassi |
| DE19511397C1 (de) * | 1995-03-28 | 1996-09-12 | Norbert Nix | Gerät zur Feststellung eines Lackschadens |
| GB9520414D0 (en) * | 1995-10-06 | 1995-12-06 | Car Light & Sound Sys Ltd | Thickness measurement |
| US5959451A (en) * | 1997-08-18 | 1999-09-28 | Torfino Enterprises, Inc. | Metal detector with vibrating tactile indicator mounted within a compact housing |
| GB2347220B (en) * | 1999-02-23 | 2003-12-31 | Rynhart Res Ltd | A moisture meter |
| DE19918064C2 (de) * | 1999-04-21 | 2003-09-18 | Norbert Nix | Schichtdickenmeßgerät mit automatisierter Nulleinstellung und/oder Kalibrierung |
| GB2356050B (en) * | 1999-11-05 | 2001-10-24 | Elcometer Instr Ltd | Apparatus and method for measuring thickness |
| DE20206657U1 (de) * | 2002-04-26 | 2002-09-19 | Gimex Dr. Gao Import u. Export GmbH, 67655 Kaiserslautern | Multianzeige für Digital-Meßmittel |
-
2002
- 2002-11-08 DE DE10252541.2A patent/DE10252541B4/de not_active Expired - Fee Related
-
2003
- 2003-11-04 GB GB0325704A patent/GB2396700B/en not_active Expired - Fee Related
- 2003-11-06 FR FR0313040A patent/FR2847036B1/fr not_active Expired - Fee Related
- 2003-11-07 CN CNB2003101148991A patent/CN100429473C/zh not_active Expired - Fee Related
- 2003-11-10 US US10/705,107 patent/US7180286B2/en not_active Expired - Lifetime
- 2003-11-10 JP JP2003379634A patent/JP2004163430A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4745809A (en) * | 1986-08-12 | 1988-05-24 | Grumman Aerospace Corporation | Composite analyzer tester |
| US5467014A (en) * | 1992-07-03 | 1995-11-14 | Nix; Norbert | Device for measuring the thickness of a layer or coating on a ferrous and/or non-ferrous substrate |
| CN1103174A (zh) * | 1993-06-30 | 1995-05-31 | 卡西欧计算机公司 | 具有传感器并能显示感测数据的电子装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2847036B1 (fr) | 2005-11-11 |
| GB2396700A (en) | 2004-06-30 |
| GB2396700B (en) | 2005-11-16 |
| JP2004163430A (ja) | 2004-06-10 |
| US7180286B2 (en) | 2007-02-20 |
| FR2847036A1 (fr) | 2004-05-14 |
| US20040165198A1 (en) | 2004-08-26 |
| GB0325704D0 (en) | 2003-12-10 |
| CN1501048A (zh) | 2004-06-02 |
| DE10252541A1 (de) | 2004-05-27 |
| DE10252541B4 (de) | 2016-08-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20081029 Termination date: 20201107 |