GB1463363A - Measuring the thickness of layers - Google Patents

Measuring the thickness of layers

Info

Publication number
GB1463363A
GB1463363A GB798574A GB798574A GB1463363A GB 1463363 A GB1463363 A GB 1463363A GB 798574 A GB798574 A GB 798574A GB 798574 A GB798574 A GB 798574A GB 1463363 A GB1463363 A GB 1463363A
Authority
GB
United Kingdom
Prior art keywords
thickness
layer
count
determined
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB798574A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fischer Co H GmbH
Original Assignee
Fischer Co H GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fischer Co H GmbH filed Critical Fischer Co H GmbH
Publication of GB1463363A publication Critical patent/GB1463363A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203Measuring back scattering

Abstract

1463363 Backscatter thickness measurement HELMUT FISCHER GmbH & CO 21 Feb 1974 [9 March 1973] 7985/74 Heading G1A The thickness of a layer on a carrier is determined from a backscattered radiation count by means of a digital computer fed with data corresponding to the count rates from layers of zero and infinite thickness and with constants depending on the radiation source and the materials of the layer and carrier. The thickness count is first normalized to a value between 0 and 1 representing the fractional count rate relative to those for infinite and zero layer thickness. An equation is given relating this normalized count to the other parameters and this is inverted to enable the thickness of the layer to be calculated. The measurements are made by a #-radiation backscattering system, the output of the detector being applied to the computer, which may be a special purpose or a suitably programmed general purpose machine, provided with a digital read out. The radiation source is selected in accordance with the atomic number and expected thickness of the layer and tables are used to give values of constants depending on this source and the particular materials of the layer and its supporting carrier. Alternatively the constants may be determined by calibration measurements on standard samples. These constants are entered into the computer and the apparatus is operated to determine the counting rates for layers of zero and infinite thickness which are also entered. The mode of operation is then changed to give a read out of the thickness of the sample layer being measured. An alternative mode of operation allows the display of the normalized counting rate. In a special purpose computer described the measurement period is determined by a timer which operates a pulse gate to the input of a divider the division ratio of which is varied inversely as the length of the time interval. A further adjustable divider is included in the processing chain to restrict the displayed count to three significant digits. In an example the thickness of a layer of Sn on a Ni carrier is determined using a T1 source. Pm, Ru, Sr and Ra sources are also mentioned.
GB798574A 1973-03-09 1974-02-21 Measuring the thickness of layers Expired GB1463363A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732311623 DE2311623A1 (en) 1973-03-09 1973-03-09 DEVICE FOR MEASURING THE THICKNESS OF COATINGS WITH A RADIONUCLIDE RADIATING THE COATING

Publications (1)

Publication Number Publication Date
GB1463363A true GB1463363A (en) 1977-02-02

Family

ID=5874202

Family Applications (1)

Application Number Title Priority Date Filing Date
GB798574A Expired GB1463363A (en) 1973-03-09 1974-02-21 Measuring the thickness of layers

Country Status (3)

Country Link
JP (1) JPS49122759A (en)
DE (1) DE2311623A1 (en)
GB (1) GB1463363A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5343146A (en) * 1992-10-05 1994-08-30 De Felsko Corporation Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil
GB2396700A (en) * 2002-11-08 2004-06-30 Immobilienges Helmut Fischer Apparatus for non-destructive measurement of the thickness of thin layers
WO2006124536A1 (en) * 2005-05-13 2006-11-23 Honeywell International Inc. Beta-ray backscatter apparatus for determining thickness and uniformity of anti -tamper coatings
US8474157B2 (en) 2009-08-07 2013-07-02 Pierre-Andre Senizergues Footwear lacing system

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3274759D1 (en) * 1981-08-04 1987-01-29 Oesterr Forsch Seibersdorf Method of measuring the coating thickness of clad wires or pipes
AT376038B (en) * 1982-08-04 1984-10-10 Oesterr Forsch Seibersdorf METHOD FOR MEASURING THE COATING THICKNESS OF COATED WIRE OR TUBE

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5343146A (en) * 1992-10-05 1994-08-30 De Felsko Corporation Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil
USRE35703E (en) * 1992-10-05 1997-12-30 Defelsko Corporation Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil
GB2396700A (en) * 2002-11-08 2004-06-30 Immobilienges Helmut Fischer Apparatus for non-destructive measurement of the thickness of thin layers
GB2396700B (en) * 2002-11-08 2005-11-16 Immobilienges Helmut Fischer Apparatus for non-destructive measurement of the thickness of thin layers
WO2006124536A1 (en) * 2005-05-13 2006-11-23 Honeywell International Inc. Beta-ray backscatter apparatus for determining thickness and uniformity of anti -tamper coatings
US7402826B2 (en) 2005-05-13 2008-07-22 Honeywell International Inc. System and method for non-destructively determining thickness and uniformity of anti-tamper coatings
US8474157B2 (en) 2009-08-07 2013-07-02 Pierre-Andre Senizergues Footwear lacing system

Also Published As

Publication number Publication date
JPS49122759A (en) 1974-11-25
DE2311623A1 (en) 1974-09-12

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee