FR2820511B1 - Film fonctionnel aux proprietes optiques et electriques ameliorees - Google Patents
Film fonctionnel aux proprietes optiques et electriques amelioreesInfo
- Publication number
- FR2820511B1 FR2820511B1 FR0114230A FR0114230A FR2820511B1 FR 2820511 B1 FR2820511 B1 FR 2820511B1 FR 0114230 A FR0114230 A FR 0114230A FR 0114230 A FR0114230 A FR 0114230A FR 2820511 B1 FR2820511 B1 FR 2820511B1
- Authority
- FR
- France
- Prior art keywords
- electrical properties
- functional film
- improved optical
- optical
- improved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/027—Graded interfaces
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
- G02B1/116—Multilayers including electrically conducting layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/289—Rugate filters
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2323/00—Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition
- C09K2323/05—Bonding or intermediate layer characterised by chemical composition, e.g. sealant or spacer
- C09K2323/051—Inorganic, e.g. glass or silicon oxide
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K2323/00—Functional layers of liquid crystal optical display excluding electroactive liquid crystal layer characterised by chemical composition
- C09K2323/05—Bonding or intermediate layer characterised by chemical composition, e.g. sealant or spacer
- C09K2323/053—Organic silicon compound, e.g. organosilicon
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Inorganic Chemistry (AREA)
- Laminated Bodies (AREA)
- Surface Treatment Of Glass (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Polarising Elements (AREA)
- Physical Vapour Deposition (AREA)
- Optical Filters (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Eyeglasses (AREA)
- Optical Elements Other Than Lenses (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020010005939A KR100768176B1 (ko) | 2001-02-07 | 2001-02-07 | 광학적 전기적 특성을 지닌 기능성 박막 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2820511A1 FR2820511A1 (fr) | 2002-08-09 |
FR2820511B1 true FR2820511B1 (fr) | 2006-01-27 |
Family
ID=19705449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR0114230A Expired - Fee Related FR2820511B1 (fr) | 2001-02-07 | 2001-11-02 | Film fonctionnel aux proprietes optiques et electriques ameliorees |
Country Status (7)
Country | Link |
---|---|
US (1) | US6627322B2 (fr) |
JP (1) | JP2002341111A (fr) |
KR (1) | KR100768176B1 (fr) |
CN (1) | CN1246731C (fr) |
DE (1) | DE10152412A1 (fr) |
FR (1) | FR2820511B1 (fr) |
GB (1) | GB2372044B (fr) |
Families Citing this family (60)
Publication number | Priority date | Publication date | Assignee | Title |
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AU2001245388A1 (en) | 2000-03-07 | 2001-09-17 | Asm America, Inc. | Graded thin films |
US7419903B2 (en) | 2000-03-07 | 2008-09-02 | Asm International N.V. | Thin films |
KR100768175B1 (ko) * | 2001-02-07 | 2007-10-17 | 삼성에스디아이 주식회사 | 광학적 전기적 특성을 지닌 기능성 박막 |
FR2820510B1 (fr) * | 2001-02-07 | 2005-11-18 | Samsung Sdi Co Ltd | Film fonctionnel aux proprietes optiques et electriques ameliorees |
US9139906B2 (en) | 2001-03-06 | 2015-09-22 | Asm America, Inc. | Doping with ALD technology |
KR100777718B1 (ko) * | 2001-09-14 | 2007-11-19 | 삼성에스디아이 주식회사 | 기능성 박막 형성용 타겟 및 이를 이용한 기능성 박막의형성방법 |
US6955986B2 (en) | 2003-03-27 | 2005-10-18 | Asm International N.V. | Atomic layer deposition methods for forming a multi-layer adhesion-barrier layer for integrated circuits |
US6842288B1 (en) * | 2003-10-30 | 2005-01-11 | 3M Innovative Properties Company | Multilayer optical adhesives and articles |
CN1314830C (zh) * | 2003-12-04 | 2007-05-09 | 湖南三才光电信息材料有限公司 | 柔性低辐射窗膜及其生产实时控制方法 |
CN1325414C (zh) * | 2004-05-24 | 2007-07-11 | 大连轻工业学院 | 一种能杀菌和自洁净的涂掺杂锌的二氧化钛薄膜的玻璃 |
US7229533B2 (en) * | 2004-06-25 | 2007-06-12 | Guardian Industries Corp. | Method of making coated article having low-E coating with ion beam treated and/or formed IR reflecting layer |
US7563347B2 (en) * | 2004-06-25 | 2009-07-21 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Method of forming coated article using sputtering target(s) and ion source(s) and corresponding apparatus |
KR100615232B1 (ko) * | 2004-07-20 | 2006-08-25 | 삼성에스디아이 주식회사 | 발광형 투명 도전층 및 이를 구비한 전자 방출 소자 |
DE102004043871A1 (de) | 2004-09-10 | 2006-03-30 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Herstellung eines strahlungsabsorbierenden optischen Elements und strahlungsabsorbierendes optisches Element |
KR101216199B1 (ko) * | 2006-03-09 | 2012-12-27 | 어플라이드 머티어리얼스, 인코포레이티드 | 낮은 에너지 플라즈마 시스템을 이용하여 하이 유전상수 트랜지스터 게이트를 제조하기 위한 방법 및 장치 |
US7837838B2 (en) | 2006-03-09 | 2010-11-23 | Applied Materials, Inc. | Method of fabricating a high dielectric constant transistor gate using a low energy plasma apparatus |
US20070209930A1 (en) * | 2006-03-09 | 2007-09-13 | Applied Materials, Inc. | Apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system |
US7645710B2 (en) | 2006-03-09 | 2010-01-12 | Applied Materials, Inc. | Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system |
US7678710B2 (en) * | 2006-03-09 | 2010-03-16 | Applied Materials, Inc. | Method and apparatus for fabricating a high dielectric constant transistor gate using a low energy plasma system |
JP2010506408A (ja) | 2006-10-05 | 2010-02-25 | エーエスエム アメリカ インコーポレイテッド | 金属シリケート膜のald |
US8012317B2 (en) * | 2006-11-02 | 2011-09-06 | Guardian Industries Corp. | Front electrode including transparent conductive coating on patterned glass substrate for use in photovoltaic device and method of making same |
US7964788B2 (en) * | 2006-11-02 | 2011-06-21 | Guardian Industries Corp. | Front electrode for use in photovoltaic device and method of making same |
US8203073B2 (en) * | 2006-11-02 | 2012-06-19 | Guardian Industries Corp. | Front electrode for use in photovoltaic device and method of making same |
US20080178932A1 (en) * | 2006-11-02 | 2008-07-31 | Guardian Industries Corp. | Front electrode including transparent conductive coating on patterned glass substrate for use in photovoltaic device and method of making same |
US20080302414A1 (en) * | 2006-11-02 | 2008-12-11 | Den Boer Willem | Front electrode for use in photovoltaic device and method of making same |
US20080105293A1 (en) * | 2006-11-02 | 2008-05-08 | Guardian Industries Corp. | Front electrode for use in photovoltaic device and method of making same |
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US20080105298A1 (en) * | 2006-11-02 | 2008-05-08 | Guardian Industries Corp. | Front electrode for use in photovoltaic device and method of making same |
US8334452B2 (en) * | 2007-01-08 | 2012-12-18 | Guardian Industries Corp. | Zinc oxide based front electrode doped with yttrium for use in photovoltaic device or the like |
US20080169021A1 (en) * | 2007-01-16 | 2008-07-17 | Guardian Industries Corp. | Method of making TCO front electrode for use in photovoltaic device or the like |
US7767253B2 (en) | 2007-03-09 | 2010-08-03 | Guardian Industries Corp. | Method of making a photovoltaic device with antireflective coating |
US20080223430A1 (en) * | 2007-03-14 | 2008-09-18 | Guardian Industries Corp. | Buffer layer for front electrode structure in photovoltaic device or the like |
US8237047B2 (en) * | 2007-05-01 | 2012-08-07 | Guardian Industries Corp. | Method of making a photovoltaic device or front substrate for use in same with scratch-resistant coating and resulting product |
US20080295884A1 (en) * | 2007-05-29 | 2008-12-04 | Sharma Pramod K | Method of making a photovoltaic device or front substrate with barrier layer for use in same and resulting product |
US20080308145A1 (en) * | 2007-06-12 | 2008-12-18 | Guardian Industries Corp | Front electrode including transparent conductive coating on etched glass substrate for use in photovoltaic device and method of making same |
US20080308146A1 (en) * | 2007-06-14 | 2008-12-18 | Guardian Industries Corp. | Front electrode including pyrolytic transparent conductive coating on textured glass substrate for use in photovoltaic device and method of making same |
CN100565716C (zh) * | 2007-11-12 | 2009-12-02 | 中国科学院长春光学精密机械与物理研究所 | 透明导电薄膜及其制备方法 |
WO2009064128A2 (fr) * | 2007-11-13 | 2009-05-22 | Lg Chem, Ltd. | Composition de revetement antireflet, film antireflet et procede de preparation associe |
KR20090049518A (ko) * | 2007-11-13 | 2009-05-18 | 주식회사 엘지화학 | 반사방지 코팅 조성물 및 이것을 이용하여 제조된 반사방지필름 |
US7888594B2 (en) * | 2007-11-20 | 2011-02-15 | Guardian Industries Corp. | Photovoltaic device including front electrode having titanium oxide inclusive layer with high refractive index |
US8114472B2 (en) * | 2008-01-08 | 2012-02-14 | Guardian Industries Corp. | Method of making a temperable antiglare coating, and resulting products containing the same |
US20090194157A1 (en) * | 2008-02-01 | 2009-08-06 | Guardian Industries Corp. | Front electrode having etched surface for use in photovoltaic device and method of making same |
US20090194155A1 (en) * | 2008-02-01 | 2009-08-06 | Guardian Industries Corp. | Front electrode having etched surface for use in photovoltaic device and method of making same |
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US8022291B2 (en) * | 2008-10-15 | 2011-09-20 | Guardian Industries Corp. | Method of making front electrode of photovoltaic device having etched surface and corresponding photovoltaic device |
US8557702B2 (en) | 2009-02-02 | 2013-10-15 | Asm America, Inc. | Plasma-enhanced atomic layers deposition of conductive material over dielectric layers |
CN102744935B (zh) * | 2012-07-25 | 2015-07-15 | 浙江大学 | 节能镀膜玻璃 |
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JP5896889B2 (ja) * | 2012-12-07 | 2016-03-30 | 株式会社豊田自動織機 | 光学選択膜 |
CN103091867B (zh) * | 2013-01-14 | 2014-04-02 | 河南科技大学 | 光子晶体紫外线防护眼镜 |
CN104651785B (zh) * | 2013-11-18 | 2017-10-13 | 北京北方华创微电子装备有限公司 | Ito薄膜的制备方法 |
CN104730603B (zh) | 2015-04-01 | 2017-10-17 | 京东方科技集团股份有限公司 | 一种防反射层叠结构及其制作方法、基板和显示装置 |
CN108603689B (zh) * | 2016-01-29 | 2021-06-22 | 株式会社丰田自动织机 | 太阳能集热管及其制造方法 |
US20180133988A1 (en) * | 2016-11-17 | 2018-05-17 | Polymerplus Llc | Polymeric gradient optical element and methods of fabricating |
CN109283601A (zh) * | 2017-07-17 | 2019-01-29 | 张家港康得新光电材料有限公司 | 折射率渐变复合薄膜及其制备方法 |
US10472274B2 (en) | 2017-07-17 | 2019-11-12 | Guardian Europe S.A.R.L. | Coated article having ceramic paint modified surface(s), and/or associated methods |
CN109696759A (zh) | 2018-12-29 | 2019-04-30 | 武汉华星光电技术有限公司 | 高穿透性液晶显示面板制造方法及其显示面板 |
CN221303608U (zh) | 2020-11-13 | 2024-07-09 | 卡尔蔡司光学国际有限公司 | 具有抗菌和/或抗病毒特性的眼镜片 |
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KR100388911B1 (ko) * | 1999-12-23 | 2003-06-25 | 삼성에스디아이 주식회사 | 블랙 매트릭스 및 그 제조방법 |
FR2820510B1 (fr) * | 2001-02-07 | 2005-11-18 | Samsung Sdi Co Ltd | Film fonctionnel aux proprietes optiques et electriques ameliorees |
KR100768175B1 (ko) * | 2001-02-07 | 2007-10-17 | 삼성에스디아이 주식회사 | 광학적 전기적 특성을 지닌 기능성 박막 |
-
2001
- 2001-02-07 KR KR1020010005939A patent/KR100768176B1/ko not_active IP Right Cessation
- 2001-10-24 DE DE10152412A patent/DE10152412A1/de not_active Withdrawn
- 2001-10-31 GB GB0126126A patent/GB2372044B/en not_active Expired - Lifetime
- 2001-11-02 FR FR0114230A patent/FR2820511B1/fr not_active Expired - Fee Related
- 2001-11-05 CN CNB01137912XA patent/CN1246731C/zh not_active Expired - Fee Related
- 2001-11-28 US US09/994,768 patent/US6627322B2/en not_active Expired - Fee Related
-
2002
- 2002-02-05 JP JP2002027534A patent/JP2002341111A/ja not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2002341111A (ja) | 2002-11-27 |
GB2372044A (en) | 2002-08-14 |
GB2372044B (en) | 2005-01-26 |
KR100768176B1 (ko) | 2007-10-17 |
KR20020065760A (ko) | 2002-08-14 |
CN1368650A (zh) | 2002-09-11 |
US20020146570A1 (en) | 2002-10-10 |
FR2820511A1 (fr) | 2002-08-09 |
DE10152412A1 (de) | 2002-08-08 |
GB0126126D0 (en) | 2002-01-02 |
US6627322B2 (en) | 2003-09-30 |
CN1246731C (zh) | 2006-03-22 |
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