DE60307763D1 - Integrierter optischer Wellenleiter - Google Patents

Integrierter optischer Wellenleiter

Info

Publication number
DE60307763D1
DE60307763D1 DE60307763T DE60307763T DE60307763D1 DE 60307763 D1 DE60307763 D1 DE 60307763D1 DE 60307763 T DE60307763 T DE 60307763T DE 60307763 T DE60307763 T DE 60307763T DE 60307763 D1 DE60307763 D1 DE 60307763D1
Authority
DE
Germany
Prior art keywords
optical waveguide
integrated optical
integrated
waveguide
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60307763T
Other languages
English (en)
Other versions
DE60307763T2 (de
Inventor
Shin Kamei
Yasuyuki Inoue
Takuya Tanaka
Toshikazu Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Application granted granted Critical
Publication of DE60307763D1 publication Critical patent/DE60307763D1/de
Publication of DE60307763T2 publication Critical patent/DE60307763T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12014—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the wavefront splitting or combining section, e.g. grooves or optical elements in a slab waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12023—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the polarisation dependence, e.g. reduced birefringence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12026—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence
    • G02B6/12028—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by means for reducing the temperature dependence based on a combination of materials having a different refractive index temperature dependence, i.e. the materials are used for transmitting light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G02B6/125—Bends, branchings or intersections
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12107—Grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12133—Functions
    • G02B2006/12145—Switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/12007—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer
    • G02B6/12009—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides
    • G02B6/12016—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind forming wavelength selective elements, e.g. multiplexer, demultiplexer comprising arrayed waveguide grating [AWG] devices, i.e. with a phased array of waveguides characterised by the input or output waveguides, e.g. tapered waveguide ends, coupled together pairs of output waveguides

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
DE60307763T 2002-11-19 2003-11-18 Integrierter optischer Wellenleiter Expired - Lifetime DE60307763T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002335257 2002-11-19
JP2002335257 2002-11-19

Publications (2)

Publication Number Publication Date
DE60307763D1 true DE60307763D1 (de) 2006-10-05
DE60307763T2 DE60307763T2 (de) 2007-08-23

Family

ID=32212064

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60307763T Expired - Lifetime DE60307763T2 (de) 2002-11-19 2003-11-18 Integrierter optischer Wellenleiter

Country Status (4)

Country Link
US (1) US7245793B2 (de)
EP (1) EP1422540B1 (de)
CN (1) CN1301416C (de)
DE (1) DE60307763T2 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1338904A4 (de) * 2000-11-30 2005-08-24 Matsushita Electric Ind Co Ltd Lichtwellenleiter und verfahren zu seiner herstellung
EP1367418A1 (de) * 2002-05-30 2003-12-03 Alcatel Athermische Wellenleitergitter
JP3721565B2 (ja) * 2004-02-27 2005-11-30 学校法人慶應義塾 光機能導波路、光変調器、アレイ導波路回折格子及び分散補償回路
KR20050109370A (ko) * 2004-05-15 2005-11-21 엘지전자 주식회사 집적광학형 실시간 지연 장치 및 그 제조 방법
US7277613B2 (en) * 2004-08-05 2007-10-02 Sumitomo Electric Indutries. Ltd. Optical multiplexer/demultiplexer, optical communication system and method of manufacturing the optical multiplexer/demultiplexer
US7397986B2 (en) * 2005-03-04 2008-07-08 Gemfire Corporation Optical device with reduced temperature dependence
US7702188B2 (en) * 2005-09-08 2010-04-20 Infinera Corporation Polarization beam splitter-polarization rotator structure
US7792403B1 (en) * 2005-09-08 2010-09-07 Infinera Corporation Adiabatic polarization converter
JP5182049B2 (ja) * 2008-12-09 2013-04-10 富士通株式会社 偏波変換デバイス及び偏波多重変調器
US20130101252A1 (en) * 2011-10-19 2013-04-25 Alcatel-Lucent Usa Inc. Arrayed-waveguide grating having tailored thermal-shift characteristics and an optical assembly employing the same
US9136666B1 (en) * 2014-02-05 2015-09-15 Aurrion, Inc. Mode-hop tolerant semiconductor laser design
GB2559252B (en) * 2016-12-02 2020-06-03 Rockley Photonics Ltd Waveguide optoelectronic device
JP2018116115A (ja) * 2017-01-17 2018-07-26 古河電気工業株式会社 交差光導波路構造及び光導波路素子
WO2019163924A1 (ja) 2018-02-22 2019-08-29 日本電信電話株式会社 導波路型光干渉計回路
US11022825B2 (en) * 2018-09-03 2021-06-01 Ciena Corporation Silicon photonics modulator using TM mode and with a modified rib geometry
US11067749B2 (en) * 2019-11-21 2021-07-20 Globalfoundries U.S. Inc. Waveguides with cladding layers of gradated refractive index

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2530823B2 (ja) 1986-07-28 1996-09-04 彰二郎 川上 フアイバ型単一モ−ド光波回路素子及びその製造方法
US5577141A (en) 1995-03-10 1996-11-19 Lucent Technologies Inc. Two-dimensional segmentation mode tapering for integrated optic waveguides
US6304687B1 (en) * 1997-02-14 2001-10-16 Nippon Telegraph And Telephone Corporation Optical waveguide circuit, its manufacturing method and optical waveguide module having the optical waveguide circuit
JPH10300957A (ja) 1997-04-25 1998-11-13 Kyocera Corp 光導波路体及びそれを用いた光デバイス
JP3337403B2 (ja) 1997-09-19 2002-10-21 日本電信電話株式会社 周波数安定化レーザ
JP3534385B2 (ja) 1998-07-08 2004-06-07 日本電信電話株式会社 熱光学スイッチ
JP3552159B2 (ja) 1999-06-30 2004-08-11 日本電気株式会社 温度無依存アレイ導波路格子素子
US6549696B1 (en) 1999-08-10 2003-04-15 Hitachi Cable, Ltd. Optical wavelength multiplexer/demultiplexer
US6546161B2 (en) 2000-01-21 2003-04-08 Nippon Telegraph And Telephone Corporation No polarization dependent waveguide type optical circuit
GB2370128A (en) 2000-12-12 2002-06-19 Kymata Ltd Arrayed waveguide grating with optical delay regions
EP1367418A1 (de) * 2002-05-30 2003-12-03 Alcatel Athermische Wellenleitergitter

Also Published As

Publication number Publication date
EP1422540A2 (de) 2004-05-26
EP1422540A3 (de) 2004-12-01
CN1301416C (zh) 2007-02-21
CN1510461A (zh) 2004-07-07
EP1422540B1 (de) 2006-08-23
DE60307763T2 (de) 2007-08-23
US7245793B2 (en) 2007-07-17
US20040126052A1 (en) 2004-07-01

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Legal Events

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