FR2696429B1 - Système de transfert automatique utilisant un récipient fermé portable. - Google Patents

Système de transfert automatique utilisant un récipient fermé portable.

Info

Publication number
FR2696429B1
FR2696429B1 FR9311846A FR9311846A FR2696429B1 FR 2696429 B1 FR2696429 B1 FR 2696429B1 FR 9311846 A FR9311846 A FR 9311846A FR 9311846 A FR9311846 A FR 9311846A FR 2696429 B1 FR2696429 B1 FR 2696429B1
Authority
FR
France
Prior art keywords
transfer system
automatic transfer
portable container
closed portable
closed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9311846A
Other languages
English (en)
Other versions
FR2696429A1 (fr
Inventor
Yamashita Teppei
Murata Masanao
Tanaka Tsuyoshi
Morita Teruya
Kawano Hitoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinko Electric Co Ltd
Original Assignee
Shinko Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17447900&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR2696429(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Shinko Electric Co Ltd filed Critical Shinko Electric Co Ltd
Publication of FR2696429A1 publication Critical patent/FR2696429A1/fr
Application granted granted Critical
Publication of FR2696429B1 publication Critical patent/FR2696429B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/14—Wafer cassette transporting

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Platform Screen Doors And Railroad Systems (AREA)
  • Warehouses Or Storage Devices (AREA)
FR9311846A 1992-10-06 1993-10-05 Système de transfert automatique utilisant un récipient fermé portable. Expired - Fee Related FR2696429B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26767092A JP3275390B2 (ja) 1992-10-06 1992-10-06 可搬式密閉コンテナ流通式の自動搬送システム

Publications (2)

Publication Number Publication Date
FR2696429A1 FR2696429A1 (fr) 1994-04-08
FR2696429B1 true FR2696429B1 (fr) 1995-01-27

Family

ID=17447900

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9311846A Expired - Fee Related FR2696429B1 (fr) 1992-10-06 1993-10-05 Système de transfert automatique utilisant un récipient fermé portable.

Country Status (5)

Country Link
US (1) US5431600A (fr)
JP (1) JP3275390B2 (fr)
KR (1) KR100281971B1 (fr)
FR (1) FR2696429B1 (fr)
TW (1) TW267149B (fr)

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US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5674123A (en) * 1995-07-18 1997-10-07 Semifab Docking and environmental purging system for integrated circuit wafer transport assemblies
JPH09153533A (ja) * 1995-12-01 1997-06-10 Mitsubishi Electric Corp 半導体ウエハ保管システムおよびそのシステムを使用した半導体装置の製造方式
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JP3062101B2 (ja) * 1996-09-20 2000-07-10 タバイエスペック株式会社 物品積載容器移載装置
US5718029A (en) * 1996-11-06 1998-02-17 Vanguard International Semiconductor Corporation Pre-installation of pumping line for efficient fab expansion
JP3901265B2 (ja) * 1996-11-26 2007-04-04 大陽日酸株式会社 薄板状基体の搬送方法及び搬送装置
US5964561A (en) * 1996-12-11 1999-10-12 Applied Materials, Inc. Compact apparatus and method for storing and loading semiconductor wafer carriers
US6540466B2 (en) * 1996-12-11 2003-04-01 Applied Materials, Inc. Compact apparatus and method for storing and loading semiconductor wafer carriers
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DE19821338B4 (de) * 1998-05-13 2004-06-17 Audi Ag Transportsystem und Verfahren zum Transportieren von Gegenständen in einen Arbeitsraum hinein oder aus einem Arbeitsraum heraus
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US6102647A (en) * 1998-06-26 2000-08-15 Intel Corporation Cart for transferring objects
US6604624B2 (en) 1998-09-22 2003-08-12 Hirata Corporation Work conveying system
US6205881B1 (en) * 1998-10-13 2001-03-27 Brooks Automation Gmbh Device for controlling the drive of mechanisms operating separately from one another
US6120229A (en) * 1999-02-01 2000-09-19 Brooks Automation Inc. Substrate carrier as batchloader
WO2000055074A1 (fr) * 1999-03-18 2000-09-21 Pri Automation, Inc. Vehicule a guidage humain
DE19916932C1 (de) * 1999-04-09 2000-10-12 Jenoptik Jena Gmbh Einrichtung zur Handhabung eines Gegenstandes für die Be- und Entladung eines Reinstraumes
US6736582B1 (en) 1999-04-09 2004-05-18 Brooks Automation, Inc. Device for manipulating an object for loading and unloading a clean room
JP3917777B2 (ja) * 1999-04-12 2007-05-23 村田機械株式会社 光データ伝送装置
US6612797B1 (en) * 1999-05-18 2003-09-02 Asyst Technologies, Inc. Cassette buffering within a minienvironment
US6305500B1 (en) * 1999-08-25 2001-10-23 Maxtor Corporation Material delivery system for clean room-like environments
US6364593B1 (en) 2000-06-06 2002-04-02 Brooks Automation Material transport system
US20020090282A1 (en) * 2001-01-05 2002-07-11 Applied Materials, Inc. Actuatable loadport system
EP1231626A1 (fr) * 2001-02-10 2002-08-14 Infineon Technologies SC300 GmbH & Co. KG Agencement de mesure
US6543981B1 (en) * 2001-03-30 2003-04-08 Lam Research Corp. Apparatus and method for creating an ultra-clean mini-environment through localized air flow augmentation
US6592318B2 (en) * 2001-07-13 2003-07-15 Asm America, Inc. Docking cart with integrated load port
US6747229B2 (en) 2002-01-24 2004-06-08 Hewlett-Packard Development Company, Lp. Input/output job tagging readable by mobile input/output bins
US6917852B2 (en) * 2002-01-24 2005-07-12 Hewlett-Packard Development Company, L.P. Automated input/output job distribution through the use of mobile input/output bins
US6744362B2 (en) * 2002-01-24 2004-06-01 Hewlett-Packard Development Company, L.P. Consumable replacement by mobile input/output bins
US6844820B2 (en) * 2002-01-24 2005-01-18 Hewlett-Packard Development Company, Lp. Communication link between mobile input/output bins and a data center to provide backup
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DE60323473D1 (de) 2002-03-04 2008-10-23 Sumitomo Electric Industries Anisotroper leitfähiger film und verfahren zu seiner herstellung
JP2003332402A (ja) * 2002-05-10 2003-11-21 Kondo Kogyo Kk ミニエンバライメント方式の半導体製造装置
US6843541B1 (en) * 2002-06-06 2005-01-18 The United States Of America As Represented By The United States Department Of Energy Glove box for water pit applications
DE10232469B4 (de) * 2002-07-17 2004-08-05 Asys Automatic Systems Gmbh & Co. Kg Transportsystem mit einer kassettenartigen Stapelvorrichtung
US7677859B2 (en) 2002-07-22 2010-03-16 Brooks Automation, Inc. Substrate loading and uploading station with buffer
US6869263B2 (en) 2002-07-22 2005-03-22 Brooks Automation, Inc. Substrate loading and unloading station with buffer
FR2844258B1 (fr) * 2002-09-06 2005-06-03 Recif Sa Systeme de transport et stockage de conteneurs de plaques de semi-conducteur, et mecanisme de transfert
JP3759492B2 (ja) 2002-12-03 2006-03-22 近藤工業株式会社 ミニエンバライメント方式の半導体製造装置
JP4647197B2 (ja) * 2003-09-17 2011-03-09 東京エレクトロン株式会社 被処理体の搬送方法及びコンピュータ読取可能な記憶媒体
KR100555620B1 (ko) * 2003-10-28 2006-03-03 주식회사 디엠에스 기판 운반시스템 및 운반방법
US6769461B1 (en) * 2003-12-02 2004-08-03 Lee Sun-Young Apparatus for discharging waste gas in semiconductor manufacturing process
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JP2005294863A (ja) * 2005-05-30 2005-10-20 Murata Mach Ltd 光データ伝送装置
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KR100702844B1 (ko) * 2005-11-14 2007-04-03 삼성전자주식회사 로드락 챔버 및 그를 이용한 반도체 제조설비
US8097084B2 (en) * 2006-01-24 2012-01-17 Vat Holding Ag Vacuum chamber system for semiconductor processing
DE102012110581B4 (de) * 2012-11-05 2018-02-22 Schiller Automatisierungstechnik Gmbh Verbessertes Reinraumshuttle
CN103811375B (zh) * 2012-11-07 2016-08-31 北京北方微电子基地设备工艺研究中心有限责任公司 分批处理硅片的装卸载装置和设备及方法
US9837293B2 (en) 2013-10-30 2017-12-05 Taiwan Semiconductor Manufacturing Co., Ltd. Mechanisms for charging gas into cassette pod
DE102015211698B4 (de) * 2015-06-24 2017-01-05 HAP Handhabungs-, Automatisierungs- und Präzisionstechnik GmbH System zum Transportieren, Öffnen sowie Schließen einer Transportbox sowie zum Einsetzen und Entnehmen eines in der Transportbox anordenbaren Behälters
US10332769B2 (en) * 2016-01-15 2019-06-25 Taiwan Semiconductor Manufacturing Co., Ltd. Semiconductor processing station, semiconductor process and method of operating semiconductor processing station
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FR2620049B2 (fr) * 1986-11-28 1989-11-24 Commissariat Energie Atomique Procede de traitement, stockage et/ou transfert d'un objet dans une atmosphere de haute proprete, et conteneur pour la mise en oeuvre de ce procede
JPH0756879B2 (ja) * 1988-03-31 1995-06-14 日鉄セミコンダクター株式会社 半導体の無塵化製造装置
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US5145303A (en) * 1991-02-28 1992-09-08 Mcnc Method and apparatus for reducing particulate contamination in processing chambers
JPH05106888A (ja) * 1991-04-17 1993-04-27 Matsushita Electric Ind Co Ltd 連結式クリーン空間装置
JP3309416B2 (ja) * 1992-02-13 2002-07-29 松下電器産業株式会社 連結式クリーン空間装置
DE4209297C2 (de) * 1992-03-21 1995-12-21 Meissner & Wurst Behandlungseinrichtung für den Reinraumbereich

Also Published As

Publication number Publication date
KR940010263A (ko) 1994-05-24
US5431600A (en) 1995-07-11
FR2696429A1 (fr) 1994-04-08
JP3275390B2 (ja) 2002-04-15
TW267149B (fr) 1996-01-01
KR100281971B1 (ko) 2001-03-02
JPH06115617A (ja) 1994-04-26

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse

Effective date: 20060630