FR2681475B1 - Dispositif a semiconducteurs comportant plusieurs electrodes de grille et procede de fabrication. - Google Patents

Dispositif a semiconducteurs comportant plusieurs electrodes de grille et procede de fabrication.

Info

Publication number
FR2681475B1
FR2681475B1 FR9210806A FR9210806A FR2681475B1 FR 2681475 B1 FR2681475 B1 FR 2681475B1 FR 9210806 A FR9210806 A FR 9210806A FR 9210806 A FR9210806 A FR 9210806A FR 2681475 B1 FR2681475 B1 FR 2681475B1
Authority
FR
France
Prior art keywords
manufacturing
semiconductor device
grid electrodes
multiple grid
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9210806A
Other languages
English (en)
Other versions
FR2681475A1 (fr
Inventor
Teruyuki Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of FR2681475A1 publication Critical patent/FR2681475A1/fr
Application granted granted Critical
Publication of FR2681475B1 publication Critical patent/FR2681475B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/775—Field effect transistors with one dimensional charge carrier gas channel, e.g. quantum wire FET
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/548—Amorphous silicon PV cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/11—Metal-organic CVD, ruehrwein type

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Junction Field-Effect Transistors (AREA)
FR9210806A 1991-09-12 1992-09-10 Dispositif a semiconducteurs comportant plusieurs electrodes de grille et procede de fabrication. Expired - Fee Related FR2681475B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3263275A JPH0575139A (ja) 1991-09-12 1991-09-12 半導体装置及びその製造方法

Publications (2)

Publication Number Publication Date
FR2681475A1 FR2681475A1 (fr) 1993-03-19
FR2681475B1 true FR2681475B1 (fr) 1993-12-24

Family

ID=17387202

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9210806A Expired - Fee Related FR2681475B1 (fr) 1991-09-12 1992-09-10 Dispositif a semiconducteurs comportant plusieurs electrodes de grille et procede de fabrication.

Country Status (4)

Country Link
US (2) US5270556A (fr)
JP (1) JPH0575139A (fr)
FR (1) FR2681475B1 (fr)
GB (1) GB2259806B (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06244216A (ja) * 1992-12-21 1994-09-02 Mitsubishi Electric Corp Ｉｐｇトランジスタ及びその製造方法，並びに半導体集積回路装置及びその製造方法
JP3500541B2 (ja) * 1994-02-15 2004-02-23 富士通株式会社 単電子トンネル接合装置の製造方法
KR0135024B1 (en) * 1994-11-15 1998-04-20 Korea Electronics Telecomm Fabrication method of self-aligned t-gare gaas metal semiconductor field effect transistor
JP3682920B2 (ja) * 2001-10-30 2005-08-17 富士通株式会社 半導体装置の製造方法
US7045404B2 (en) * 2004-01-16 2006-05-16 Cree, Inc. Nitride-based transistors with a protective layer and a low-damage recess and methods of fabrication thereof
KR101706732B1 (ko) * 2015-12-30 2017-02-27 주식회사 엔디디 바이오 감지 장치

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1603260A (en) * 1978-05-31 1981-11-25 Secr Defence Devices and their fabrication
US4463366A (en) * 1980-06-20 1984-07-31 Nippon Telegraph & Telephone Public Corp. Field effect transistor with combination Schottky-junction gate
FR2501913A1 (fr) * 1981-03-10 1982-09-17 Thomson Csf Transistor a effet de champ de type planar comportant des electrodes a puits metallises et procede de fabrication de ce transistor
US4583107A (en) * 1983-08-15 1986-04-15 Westinghouse Electric Corp. Castellated gate field effect transistor
EP0225566A3 (fr) * 1985-12-03 1989-07-26 Itt Industries, Inc. Transistor à grille perméable
JP2609587B2 (ja) * 1986-04-21 1997-05-14 株式会社日立製作所 半導体装置
JPS63232374A (ja) * 1987-03-20 1988-09-28 Fujitsu Ltd 半導体装置
JPH0225041A (ja) * 1988-07-13 1990-01-26 Fujitsu Ltd 半導体装置の製造方法
JPH0239440A (ja) * 1988-07-28 1990-02-08 Fujitsu Ltd 高速度トランジスタ
US5023671A (en) * 1989-03-27 1991-06-11 International Business Machines Corporation Microstructures which provide superlattice effects and one-dimensional carrier gas channels
JPH02296372A (ja) * 1989-05-10 1990-12-06 Mitsubishi Electric Corp 透過ベーストランジスタ
JPH0355852A (ja) * 1989-07-25 1991-03-11 Sony Corp 半導体装置の製造方法
US5019877A (en) * 1989-08-31 1991-05-28 Mitsubishi Denki Kabushiki Kaisha Field effect transistor
US5053348A (en) * 1989-12-01 1991-10-01 Hughes Aircraft Company Fabrication of self-aligned, t-gate hemt
JPH04307755A (ja) * 1991-04-04 1992-10-29 Oki Electric Ind Co Ltd 電界効果トランジスタ及びその製造方法
JPH0536725A (ja) * 1991-07-31 1993-02-12 Sony Corp 電界効果トランジスタの製造方法

Also Published As

Publication number Publication date
GB2259806B (en) 1995-05-31
JPH0575139A (ja) 1993-03-26
GB2259806A (en) 1993-03-24
US5369044A (en) 1994-11-29
US5270556A (en) 1993-12-14
FR2681475A1 (fr) 1993-03-19
GB9216062D0 (en) 1992-09-09

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Legal Events

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D6 Patent endorsed licences of rights
ST Notification of lapse