FR2667444B1 - Element a emission de champ et son procede de fabrication. - Google Patents

Element a emission de champ et son procede de fabrication.

Info

Publication number
FR2667444B1
FR2667444B1 FR9111896A FR9111896A FR2667444B1 FR 2667444 B1 FR2667444 B1 FR 2667444B1 FR 9111896 A FR9111896 A FR 9111896A FR 9111896 A FR9111896 A FR 9111896A FR 2667444 B1 FR2667444 B1 FR 2667444B1
Authority
FR
France
Prior art keywords
manufacturing
field emission
emission element
field
emission
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9111896A
Other languages
English (en)
Other versions
FR2667444A1 (fr
Inventor
Shigeo Itoh
Teruo Watanabe
Hisashi Nakata
Norio Nishimura
Junji Itoh
Seigo Kanemaru
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
DIRECTOR GENERAL AGENCY IND
Futaba Corp
Original Assignee
DIRECTOR GENERAL AGENCY IND
Futaba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by DIRECTOR GENERAL AGENCY IND, Futaba Corp filed Critical DIRECTOR GENERAL AGENCY IND
Publication of FR2667444A1 publication Critical patent/FR2667444A1/fr
Application granted granted Critical
Publication of FR2667444B1 publication Critical patent/FR2667444B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H01J3/021—Electron guns using a field emission, photo emission, or secondary emission electron source
    • H01J3/022—Electron guns using a field emission, photo emission, or secondary emission electron source with microengineered cathode, e.g. Spindt-type
FR9111896A 1990-09-27 1991-09-27 Element a emission de champ et son procede de fabrication. Expired - Fee Related FR2667444B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25505390A JP2613669B2 (ja) 1990-09-27 1990-09-27 電界放出素子及びその製造方法

Publications (2)

Publication Number Publication Date
FR2667444A1 FR2667444A1 (fr) 1992-04-03
FR2667444B1 true FR2667444B1 (fr) 1996-04-26

Family

ID=17273498

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9111896A Expired - Fee Related FR2667444B1 (fr) 1990-09-27 1991-09-27 Element a emission de champ et son procede de fabrication.

Country Status (5)

Country Link
US (2) US5381069A (fr)
JP (1) JP2613669B2 (fr)
DE (1) DE4132150C2 (fr)
FR (1) FR2667444B1 (fr)
GB (1) GB2260021B (fr)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5841219A (en) * 1993-09-22 1998-11-24 University Of Utah Research Foundation Microminiature thermionic vacuum tube
JPH07217503A (ja) * 1994-01-31 1995-08-15 Fuji Heavy Ind Ltd 車両用燃料タンクの蒸発燃料通路開閉制御装置
JPH0850850A (ja) * 1994-08-09 1996-02-20 Agency Of Ind Science & Technol 電界放出型電子放出素子およびその製造方法
TW289864B (fr) 1994-09-16 1996-11-01 Micron Display Tech Inc
US6417605B1 (en) * 1994-09-16 2002-07-09 Micron Technology, Inc. Method of preventing junction leakage in field emission devices
US5975975A (en) * 1994-09-16 1999-11-02 Micron Technology, Inc. Apparatus and method for stabilization of threshold voltage in field emission displays
JP3079352B2 (ja) * 1995-02-10 2000-08-21 双葉電子工業株式会社 ＮｂＮ電極を用いた真空気密素子
JP3024539B2 (ja) * 1995-05-17 2000-03-21 双葉電子工業株式会社 電子線励起発光素子
JP3060928B2 (ja) * 1995-12-13 2000-07-10 双葉電子工業株式会社 電界放出カソードとその製造方法
US5955828A (en) * 1996-10-16 1999-09-21 University Of Utah Research Foundation Thermionic optical emission device
JPH10154475A (ja) * 1996-11-22 1998-06-09 Futaba Corp 電子源内蔵真空容器および電子源内蔵真空容器の製造方法
US6097356A (en) * 1997-07-01 2000-08-01 Fan; Nongqiang Methods of improving display uniformity of thin CRT displays by calibrating individual cathode
US6017772A (en) 1999-03-01 2000-01-25 Micron Technology, Inc. Field emission arrays and method of fabricating emitter tips and corresponding resistors thereof with a single mask
US6059625A (en) 1999-03-01 2000-05-09 Micron Technology, Inc. Method of fabricating field emission arrays employing a hard mask to define column lines
US6469436B1 (en) * 2000-01-14 2002-10-22 Micron Technology, Inc. Radiation shielding for field emitters
US6387717B1 (en) * 2000-04-26 2002-05-14 Micron Technology, Inc. Field emission tips and methods for fabricating the same
DE60113245T2 (de) * 2001-07-06 2006-06-29 Ict, Integrated Circuit Testing Gmbh Elektronenemissionsapparat
KR20070010660A (ko) * 2005-07-19 2007-01-24 삼성에스디아이 주식회사 전자 방출 소자 및 이를 구비한 평판 디스플레이 장치
KR20070011804A (ko) * 2005-07-21 2007-01-25 삼성에스디아이 주식회사 전자 방출 소자 및 이를 구비한 평판 디스플레이 장치
US8946739B2 (en) * 2005-09-30 2015-02-03 Lateral Research Limited Liability Company Process to fabricate integrated MWIR emitter
TWI314334B (en) * 2006-01-18 2009-09-01 Ind Tech Res Inst Field emission flat lamp and cathode plate thereof
US20150170864A1 (en) * 2013-12-16 2015-06-18 Altera Corporation Three electrode circuit element

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826138B2 (ja) * 1974-02-16 1983-06-01 三菱電機株式会社 電界放出針状電極群の製造方法
GB2093268B (en) * 1981-02-13 1984-09-26 Mitsubishi Electric Corp Cathode ray tube
GB8621600D0 (en) * 1986-09-08 1987-03-18 Gen Electric Co Plc Vacuum devices
US4904895A (en) * 1987-05-06 1990-02-27 Canon Kabushiki Kaisha Electron emission device
JPH0340332A (ja) * 1989-07-07 1991-02-21 Matsushita Electric Ind Co Ltd 電界放出型スウィチング素子およびその製造方法
US4956574A (en) * 1989-08-08 1990-09-11 Motorola, Inc. Switched anode field emission device
JP2968014B2 (ja) * 1990-01-29 1999-10-25 三菱電機株式会社 微小真空管及びその製造方法
US5267884A (en) * 1990-01-29 1993-12-07 Mitsubishi Denki Kabushiki Kaisha Microminiature vacuum tube and production method
US5030921A (en) * 1990-02-09 1991-07-09 Motorola, Inc. Cascaded cold cathode field emission devices
US5192240A (en) * 1990-02-22 1993-03-09 Seiko Epson Corporation Method of manufacturing a microelectronic vacuum device
JP2634295B2 (ja) * 1990-05-17 1997-07-23 双葉電子工業株式会社 電子放出素子
JP2656851B2 (ja) * 1990-09-27 1997-09-24 工業技術院長 画像表示装置
JP2719239B2 (ja) * 1991-02-08 1998-02-25 工業技術院長 電界放出素子
JP2661457B2 (ja) * 1992-03-31 1997-10-08 双葉電子工業株式会社 電界放出形カソード

Also Published As

Publication number Publication date
DE4132150C2 (de) 2002-01-10
DE4132150A1 (de) 1992-04-02
JPH04137327A (ja) 1992-05-12
GB2260021A (en) 1993-03-31
US5637023A (en) 1997-06-10
US5381069A (en) 1995-01-10
GB2260021B (en) 1995-08-16
JP2613669B2 (ja) 1997-05-28
GB9120766D0 (en) 1991-11-13
FR2667444A1 (fr) 1992-04-03

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Legal Events

Date Code Title Description
ST Notification of lapse