FR2578681B1 - Procede pour former une couche mince monocristalline d'element semi-conducteur - Google Patents
Procede pour former une couche mince monocristalline d'element semi-conducteurInfo
- Publication number
- FR2578681B1 FR2578681B1 FR858511518A FR8511518A FR2578681B1 FR 2578681 B1 FR2578681 B1 FR 2578681B1 FR 858511518 A FR858511518 A FR 858511518A FR 8511518 A FR8511518 A FR 8511518A FR 2578681 B1 FR2578681 B1 FR 2578681B1
- Authority
- FR
- France
- Prior art keywords
- forming
- thin film
- semiconductor element
- monocrystalline thin
- monocrystalline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/24—Deposition of silicon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
- C23C16/45531—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations specially adapted for making ternary or higher compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/60—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape characterised by shape
- C30B29/68—Crystals with laminate structure, e.g. "superlattices"
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59153978A JPH0766909B2 (ja) | 1984-07-26 | 1984-07-26 | 元素半導体単結晶薄膜の成長法 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2578681A1 FR2578681A1 (fr) | 1986-09-12 |
FR2578681B1 true FR2578681B1 (fr) | 1990-10-26 |
Family
ID=15574233
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR858511518A Expired - Lifetime FR2578681B1 (fr) | 1984-07-26 | 1985-07-26 | Procede pour former une couche mince monocristalline d'element semi-conducteur |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPH0766909B2 (fr) |
DE (1) | DE3526825A1 (fr) |
FR (1) | FR2578681B1 (fr) |
GB (1) | GB2162206B (fr) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8508699D0 (en) * | 1985-04-03 | 1985-05-09 | Barr & Stroud Ltd | Chemical vapour deposition of products |
US5322568A (en) * | 1985-12-28 | 1994-06-21 | Canon Kabushiki Kaisha | Apparatus for forming deposited film |
GB2185758B (en) * | 1985-12-28 | 1990-09-05 | Canon Kk | Method for forming deposited film |
GB2193976B (en) * | 1986-03-19 | 1990-05-30 | Gen Electric Plc | Process for depositing a polysilicon film on a substrate |
JPH08973B2 (ja) * | 1986-03-31 | 1996-01-10 | キヤノン株式会社 | 堆積膜形成法 |
US4877650A (en) * | 1986-03-31 | 1989-10-31 | Canon Kabushiki Kaisha | Method for forming deposited film |
JPS62228471A (ja) * | 1986-03-31 | 1987-10-07 | Canon Inc | 堆積膜形成法 |
AU7077087A (en) * | 1986-03-31 | 1987-10-08 | Canon Kabushiki Kaisha | Forming a deposited film |
GB2191510A (en) * | 1986-04-16 | 1987-12-16 | Gen Electric Plc | Depositing doped polysilicon films |
US5246536A (en) * | 1986-09-08 | 1993-09-21 | Research Development Corporation Of Japan | Method for growing single crystal thin films of element semiconductor |
JPH0639357B2 (ja) * | 1986-09-08 | 1994-05-25 | 新技術開発事業団 | 元素半導体単結晶薄膜の成長方法 |
CA1328796C (fr) * | 1986-09-12 | 1994-04-26 | Bernard Steele Meyerson | Methode et appareil de depot epitaxial de couches de silicium en phase vapeur a basse temperature et a basse pression |
JP2587623B2 (ja) * | 1986-11-22 | 1997-03-05 | 新技術事業団 | 化合物半導体のエピタキシヤル結晶成長方法 |
JP2587624B2 (ja) * | 1986-11-28 | 1997-03-05 | 新技術事業団 | 化合物半導体のエピタキシヤル結晶成長方法 |
JP2742789B2 (ja) * | 1987-08-12 | 1998-04-22 | セイコーエプソン株式会社 | シリコン薄膜の製造方法及びシリコン薄膜製造装置 |
KR890003983A (ko) * | 1987-08-27 | 1989-04-19 | 엔.라이스 머레트 | 종래의 cvd 반응로를 사용한 스트레인층 초격자의 연속 화학 증착 성장 방법 |
DE3741672A1 (de) * | 1987-12-09 | 1989-06-22 | Asea Brown Boveri | Verfahren und anordnung zur oberflaechenbehandlung von substraten |
EP0430274A3 (en) * | 1989-12-01 | 1993-03-24 | Seiko Instruments Inc. | Method of producing bipolar transistor |
US5338389A (en) * | 1990-01-19 | 1994-08-16 | Research Development Corporation Of Japan | Method of epitaxially growing compound crystal and doping method therein |
JPH0649633B2 (ja) * | 1990-01-19 | 1994-06-29 | 新技術事業団 | 化合物結晶のエピタキシャル成長におけるドーピング方法 |
US5225366A (en) * | 1990-06-22 | 1993-07-06 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus for and a method of growing thin films of elemental semiconductors |
TW209253B (fr) * | 1990-09-21 | 1993-07-11 | Nidden Aneruba Kk | |
JP3507072B2 (ja) * | 1991-07-16 | 2004-03-15 | セイコーエプソン株式会社 | 化学気相推積装置及び半導体膜形成方法と薄膜半導体装置の製造方法 |
US7435665B2 (en) | 2004-10-06 | 2008-10-14 | Okmetic Oyj | CVD doped structures |
JP5696530B2 (ja) | 2010-05-01 | 2015-04-08 | 東京エレクトロン株式会社 | 薄膜の形成方法及び成膜装置 |
JP5741382B2 (ja) | 2011-09-30 | 2015-07-01 | 東京エレクトロン株式会社 | 薄膜の形成方法及び成膜装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1900116C3 (de) * | 1969-01-02 | 1978-10-19 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen hxxochreiner, aus Silicium bestehender einkristalliner Schichten |
SE393967B (sv) * | 1974-11-29 | 1977-05-31 | Sateko Oy | Forfarande och for utforande av stroleggning mellan lagren i ett virkespaket |
DD153899A5 (de) * | 1980-02-26 | 1982-02-10 | Lohja Ab Oy | Verfahren und vorrichtung zur durchfuehrung des wachstums von zusammengesetzten duennen schichten |
JPS5898917A (ja) * | 1981-12-09 | 1983-06-13 | Seiko Epson Corp | 原子層エビタキシヤル装置 |
JPS58102516A (ja) * | 1981-12-14 | 1983-06-18 | Seiko Epson Corp | 半導体装置 |
-
1984
- 1984-07-26 JP JP59153978A patent/JPH0766909B2/ja not_active Expired - Fee Related
-
1985
- 1985-07-25 GB GB08518833A patent/GB2162206B/en not_active Expired
- 1985-07-26 DE DE19853526825 patent/DE3526825A1/de active Granted
- 1985-07-26 FR FR858511518A patent/FR2578681B1/fr not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB2162206B (en) | 1987-05-28 |
FR2578681A1 (fr) | 1986-09-12 |
DE3526825C2 (fr) | 1993-05-13 |
GB2162206A (en) | 1986-01-29 |
JPS6134928A (ja) | 1986-02-19 |
GB8518833D0 (en) | 1985-08-29 |
JPH0766909B2 (ja) | 1995-07-19 |
DE3526825A1 (de) | 1986-02-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
TP | Transmission of property |