FR2585038B1 - Procede pour deposer un film de dioxyde de silicium - Google Patents

Procede pour deposer un film de dioxyde de silicium

Info

Publication number
FR2585038B1
FR2585038B1 FR868610483A FR8610483A FR2585038B1 FR 2585038 B1 FR2585038 B1 FR 2585038B1 FR 868610483 A FR868610483 A FR 868610483A FR 8610483 A FR8610483 A FR 8610483A FR 2585038 B1 FR2585038 B1 FR 2585038B1
Authority
FR
France
Prior art keywords
depositing
silicon dioxide
dioxide film
film
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR868610483A
Other languages
English (en)
Other versions
FR2585038A1 (fr
Inventor
Hirotsugu Nagayama
Hisao Honda
Hideo Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Sheet Glass Co Ltd
Original Assignee
Nippon Sheet Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Sheet Glass Co Ltd filed Critical Nippon Sheet Glass Co Ltd
Publication of FR2585038A1 publication Critical patent/FR2585038A1/fr
Application granted granted Critical
Publication of FR2585038B1 publication Critical patent/FR2585038B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/04—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor characterised by the coating material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Chemically Coating (AREA)
  • Removal Of Specific Substances (AREA)
  • Surface Treatment Of Glass (AREA)
FR868610483A 1985-07-19 1986-07-18 Procede pour deposer un film de dioxyde de silicium Expired - Lifetime FR2585038B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60159457A JPH0627347B2 (ja) 1985-07-19 1985-07-19 二酸化珪素被膜の製造方法

Publications (2)

Publication Number Publication Date
FR2585038A1 FR2585038A1 (fr) 1987-01-23
FR2585038B1 true FR2585038B1 (fr) 1990-01-05

Family

ID=15694180

Family Applications (1)

Application Number Title Priority Date Filing Date
FR868610483A Expired - Lifetime FR2585038B1 (fr) 1985-07-19 1986-07-18 Procede pour deposer un film de dioxyde de silicium

Country Status (5)

Country Link
US (1) US4693916A (fr)
JP (1) JPH0627347B2 (fr)
DE (1) DE3624057C2 (fr)
FR (1) FR2585038B1 (fr)
GB (1) GB2179371B (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2541269B2 (ja) * 1987-08-27 1996-10-09 日本板硝子株式会社 酸化物薄膜の製造方法
JPH072211B2 (ja) * 1988-08-03 1995-01-18 博 中井 遠赤外線放射体の製造方法
JP2803355B2 (ja) * 1990-09-29 1998-09-24 日本板硝子株式会社 二酸化珪素被膜の製造方法
EP0510191A4 (en) * 1990-10-25 1993-03-03 Nippon Sheet Glass Co., Ltd. Process for preparing silicon dioxide coating
US5340605A (en) * 1993-03-05 1994-08-23 The United States Of America As Represented By The United States Department Of Energy Method for plating with metal oxides
US5372847A (en) * 1993-09-16 1994-12-13 The United States Of America As Represented By The United States Department Of Energy Ammonia release method for depositing metal oxides
JP2600600B2 (ja) * 1993-12-21 1997-04-16 日本電気株式会社 研磨剤とその製法及びそれを用いた半導体装置の製造方法
JPH08148563A (ja) * 1994-11-22 1996-06-07 Nec Corp 半導体装置の多層配線構造体の形成方法
US6217840B1 (en) 1995-12-08 2001-04-17 Goldendale Aluminum Company Production of fumed silica
US6193944B1 (en) 1995-12-08 2001-02-27 Goldendale Aluminum Company Method of recovering fumed silica from spent potliner
JP4126788B2 (ja) * 1998-12-09 2008-07-30 日産化学工業株式会社 シリカ−フッ化マグネシウム水和物複合ゾル及びその製造法
US6593077B2 (en) * 1999-03-22 2003-07-15 Special Materials Research And Technology, Inc. Method of making thin films dielectrics using a process for room temperature wet chemical growth of SiO based oxides on a substrate
US6080683A (en) * 1999-03-22 2000-06-27 Special Materials Research And Technology, Inc. Room temperature wet chemical growth process of SiO based oxides on silicon
US6248302B1 (en) 2000-02-04 2001-06-19 Goldendale Aluminum Company Process for treating red mud to recover metal values therefrom
US6613697B1 (en) * 2001-06-26 2003-09-02 Special Materials Research And Technology, Inc. Low metallic impurity SiO based thin film dielectrics on semiconductor substrates using a room temperature wet chemical growth process, method and applications thereof
WO2004047162A1 (fr) * 2002-11-19 2004-06-03 William Marsh Rice University Procede de formation a basse temperature de matieres inorganiques a partir d'une solution au moyen d'une croissance catalysee et d'une reformation
US6998204B2 (en) * 2003-11-13 2006-02-14 International Business Machines Corporation Alternating phase mask built by additive film deposition
US7592001B2 (en) * 2004-08-02 2009-09-22 University Of Florida Research Foundation, Inc. High aspect ratio metal particles and methods for forming same
US7393779B2 (en) * 2005-10-31 2008-07-01 International Business Machines Corporation Shrinking contact apertures through LPD oxide
WO2008066077A1 (fr) * 2006-11-28 2008-06-05 Nippon Sheet Glass Company, Limited Procédé de production de flocons
CN103695875A (zh) * 2013-12-06 2014-04-02 湖洲三峰能源科技有限公司 一种用于加速氧化硅生长在衬底表面上的化学组合物

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2505629A (en) * 1949-06-30 1950-04-25 Rca Corp Method of depositing silica films and preparation of solutions therefor
DE3332995A1 (de) * 1983-07-14 1985-01-24 Nippon Sheet Glass Co. Ltd., Osaka Verfahren zum herstellen einer siliciumdioxidbeschichtung

Also Published As

Publication number Publication date
JPH0627347B2 (ja) 1994-04-13
DE3624057C2 (de) 1995-05-18
GB2179371B (en) 1989-04-19
JPS6220876A (ja) 1987-01-29
US4693916A (en) 1987-09-15
FR2585038A1 (fr) 1987-01-23
DE3624057A1 (de) 1987-01-22
GB8617274D0 (en) 1986-08-20
GB2179371A (en) 1987-03-04

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