AU6426986A - Method for forming deposited film - Google Patents

Method for forming deposited film

Info

Publication number
AU6426986A
AU6426986A AU64269/86A AU6426986A AU6426986A AU 6426986 A AU6426986 A AU 6426986A AU 64269/86 A AU64269/86 A AU 64269/86A AU 6426986 A AU6426986 A AU 6426986A AU 6426986 A AU6426986 A AU 6426986A
Authority
AU
Australia
Prior art keywords
deposited film
forming deposited
forming
film
deposited
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
AU64269/86A
Other versions
AU595251B2 (en
Inventor
Junichi Hanna
Shunichi Ishihara
Isamu Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP60237006A external-priority patent/JPH0645882B2/en
Priority claimed from JP60238497A external-priority patent/JPH0645884B2/en
Application filed by Canon Inc filed Critical Canon Inc
Publication of AU6426986A publication Critical patent/AU6426986A/en
Application granted granted Critical
Publication of AU595251B2 publication Critical patent/AU595251B2/en
Anticipated expiration legal-status Critical
Expired legal-status Critical Current

Links

AU64269/86A 1985-10-23 1986-10-22 Method for forming deposited film Expired AU595251B2 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP60237006A JPH0645882B2 (en) 1985-10-23 1985-10-23 Deposited film formation method
JP60-237006 1985-10-23
JP60238497A JPH0645884B2 (en) 1985-10-24 1985-10-24 Deposited film formation method
JP60-238497 1985-10-24
JP60-298046 1985-12-28

Publications (2)

Publication Number Publication Date
AU6426986A true AU6426986A (en) 1987-04-30
AU595251B2 AU595251B2 (en) 1990-03-29

Family

ID=26532992

Family Applications (1)

Application Number Title Priority Date Filing Date
AU64269/86A Expired AU595251B2 (en) 1985-10-23 1986-10-22 Method for forming deposited film

Country Status (1)

Country Link
AU (1) AU595251B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU593191B2 (en) * 1985-12-11 1990-02-01 Canon Kabushiki Kaisha Process for preparing photoelectromotive force member, process and apparatus for the preparation thereof
AU595740B2 (en) * 1985-12-11 1990-04-05 Canon Kabushiki Kaisha Process for the preparation of image-reading photosensor
AU597004B2 (en) * 1985-10-24 1990-05-24 Canon Kabushiki Kaisha Method for forming a deposited film

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU541410B2 (en) * 1981-05-26 1985-01-10 Hughes Aircraft Co. Depositing oxide layers by photochemical vapor deposition
US4568614A (en) * 1984-06-27 1986-02-04 Energy Conversion Devices, Inc. Steel article having a disordered silicon oxide coating thereon and method of preparing the coating

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU597004B2 (en) * 1985-10-24 1990-05-24 Canon Kabushiki Kaisha Method for forming a deposited film
AU593191B2 (en) * 1985-12-11 1990-02-01 Canon Kabushiki Kaisha Process for preparing photoelectromotive force member, process and apparatus for the preparation thereof
AU595740B2 (en) * 1985-12-11 1990-04-05 Canon Kabushiki Kaisha Process for the preparation of image-reading photosensor

Also Published As

Publication number Publication date
AU595251B2 (en) 1990-03-29

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