FR2570516B1 - Element optique a couche mince et son procede de fabrication - Google Patents

Element optique a couche mince et son procede de fabrication

Info

Publication number
FR2570516B1
FR2570516B1 FR858513617A FR8513617A FR2570516B1 FR 2570516 B1 FR2570516 B1 FR 2570516B1 FR 858513617 A FR858513617 A FR 858513617A FR 8513617 A FR8513617 A FR 8513617A FR 2570516 B1 FR2570516 B1 FR 2570516B1
Authority
FR
France
Prior art keywords
manufacturing
thin film
optical element
film optical
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR858513617A
Other languages
English (en)
Other versions
FR2570516A1 (fr
Inventor
Mamoru Miyawaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP59192908A external-priority patent/JPS6170508A/ja
Priority claimed from JP19290584A external-priority patent/JPS6170537A/ja
Priority claimed from JP19290684A external-priority patent/JPS6170538A/ja
Priority claimed from JP19291184A external-priority patent/JPS6170541A/ja
Priority claimed from JP19290284A external-priority patent/JPS6170533A/ja
Priority claimed from JP19291084A external-priority patent/JPS6170540A/ja
Priority claimed from JP19290384A external-priority patent/JPS6170536A/ja
Priority claimed from JP59192901A external-priority patent/JPH0827471B2/ja
Priority claimed from JP19290784A external-priority patent/JPS6170534A/ja
Priority claimed from JP19290484A external-priority patent/JPS6170507A/ja
Priority claimed from JP19290984A external-priority patent/JPS6170539A/ja
Priority claimed from JP19044985A external-priority patent/JPS6250704A/ja
Priority claimed from JP19045285A external-priority patent/JPS6250707A/ja
Priority claimed from JP19045385A external-priority patent/JPS6250708A/ja
Priority claimed from JP19045085A external-priority patent/JPS6250705A/ja
Priority claimed from JP19045185A external-priority patent/JPS6250706A/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of FR2570516A1 publication Critical patent/FR2570516A1/fr
Publication of FR2570516B1 publication Critical patent/FR2570516B1/fr
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/134—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms
    • G02B6/1347—Integrated optical circuits characterised by the manufacturing method by substitution by dopant atoms using ion implantation
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/125—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00—Materials and properties
    • G02F2202/20—LiNbO3, LiTaO3

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
FR858513617A 1984-09-14 1985-09-13 Element optique a couche mince et son procede de fabrication Expired - Lifetime FR2570516B1 (fr)

Applications Claiming Priority (16)

Application Number Priority Date Filing Date Title
JP19290284A JPS6170533A (ja) 1984-09-14 1984-09-14 薄膜型光学素子およびその作製方法
JP19291084A JPS6170540A (ja) 1984-09-14 1984-09-14 薄膜型光学素子およびその作製方法
JP19290384A JPS6170536A (ja) 1984-09-14 1984-09-14 薄膜型光学素子およびその作製方法
JP59192901A JPH0827471B2 (ja) 1984-09-14 1984-09-14 薄膜型光学素子の作製方法
JP19290584A JPS6170537A (ja) 1984-09-14 1984-09-14 薄膜型光学素子およびその作製方法
JP19290484A JPS6170507A (ja) 1984-09-14 1984-09-14 薄膜型光学素子の作製方法
JP59192908A JPS6170508A (ja) 1984-09-14 1984-09-14 薄膜型光学素子およびその作製方法
JP19290684A JPS6170538A (ja) 1984-09-14 1984-09-14 薄膜型光学素子およびその作製方法
JP19290784A JPS6170534A (ja) 1984-09-14 1984-09-14 薄膜型光学素子およびその作製方法
JP19290984A JPS6170539A (ja) 1984-09-14 1984-09-14 薄膜型光学素子およびその作製方法
JP19291184A JPS6170541A (ja) 1984-09-14 1984-09-14 薄膜型光学素子およびその作製方法
JP19045285A JPS6250707A (ja) 1985-08-29 1985-08-29 薄膜型光学素子およびその作製方法
JP19044985A JPS6250704A (ja) 1985-08-29 1985-08-29 薄膜型光学素子およびその作製方法
JP19045385A JPS6250708A (ja) 1985-08-29 1985-08-29 薄膜型光学素子およびその作製方法
JP19045085A JPS6250705A (ja) 1985-08-29 1985-08-29 薄膜型光学素子およびその作製方法
JP19045185A JPS6250706A (ja) 1985-08-29 1985-08-29 薄膜型光学素子の作製方法

Publications (2)

Publication Number Publication Date
FR2570516A1 FR2570516A1 (fr) 1986-03-21
FR2570516B1 true FR2570516B1 (fr) 1990-02-23

Family

ID=27585742

Family Applications (1)

Application Number Title Priority Date Filing Date
FR858513617A Expired - Lifetime FR2570516B1 (fr) 1984-09-14 1985-09-13 Element optique a couche mince et son procede de fabrication

Country Status (4)

Country Link
US (1) US4778236A (fr)
DE (1) DE3532811C2 (fr)
FR (1) FR2570516B1 (fr)
GB (1) GB2165956B (fr)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2606554A1 (fr) * 1986-11-10 1988-05-13 Schweizer Pascal Procede de fabrication de composants electro-optiques integres ne necessitant qu'une seule operation de masquage et les composants issus dudit procede
US4865407A (en) * 1987-10-22 1989-09-12 Brother Kogyo Kabushiki Kaisha Optical waveguide element, method of making the same and optical coupler employing optical waveguide element
DE3842408A1 (de) * 1988-12-16 1990-06-21 Philips Patentverwaltung Magnetooptischer wellenleiter
US4940302A (en) * 1989-03-13 1990-07-10 The Boeing Company Integrated optics waveguides with large phase shifts
US4953935A (en) * 1989-03-27 1990-09-04 United Technologies Corporation Integrated optic star coupler
EP0397895A1 (fr) * 1989-05-13 1990-11-22 SELENIA INDUSTRIE ELETTRONICHE ASSOCIATE S.p.A. Méthode de fabrication de lentilles dans des guides optiques plans monomodes en LiNbO3
KR920005445B1 (ko) * 1989-08-10 1992-07-04 한국과학기술원 광도파로 제작방법 및 구조
US5303316A (en) * 1989-12-22 1994-04-12 David Sarnoff Research Center, Inc. Optical beam scanner
US5153930A (en) * 1990-01-04 1992-10-06 Smiths Industries Aerospace & Defense Systems, Inc. Device employing a substrate of a material that exhibits the pyroelectric effect
US5095518A (en) * 1990-08-10 1992-03-10 The Board Of Trustees Of The Leland Stanford Junior University Integrated optical waveguide utilizing zinc oxide diffused into congruent and magnesium oxide doped lithium niobate crystals
US5205904A (en) * 1991-03-13 1993-04-27 Matsushita Electric Industrial Co., Ltd. Method to fabricate frequency doubler devices
US5133029A (en) * 1991-06-28 1992-07-21 Bell Communications Research, Inc. Adiabatic polarization splitter
US6411760B1 (en) 1997-05-02 2002-06-25 General Science & Technology Corp Multifilament twisted and drawn tubular element and co-axial cable including the same
GB0101343D0 (en) 2001-01-19 2001-03-07 Secr Defence Electro-optic waveguide device
US6885781B2 (en) * 2002-05-03 2005-04-26 Fujitsu Limited Thin film electro-optical deflector device and a method of fabrication of such a device
US6856393B2 (en) 2002-08-21 2005-02-15 The Board Of Trustees Of The Leland Stanford University Method of measuring a physical function using a composite function which includes the physical function and an arbitrary reference function
US7133134B2 (en) * 2002-08-21 2006-11-07 The Board Of Trustees Of The Leland Stanford Junior University Method of measuring a physical function using a symmetric composite function
GB2424069B (en) * 2003-11-25 2007-11-14 Univ Leland Stanford Junior Method for determining the optical nonlinearity profile of a material
CN105068183B (zh) * 2015-04-24 2017-12-29 燕山大学 一种表面镀覆纳米薄膜的特种光锥
CN106842760B (zh) * 2017-03-08 2019-10-15 暨南大学 一种用阵列电极进行光束偏转的铌酸锂波导及制作方法
CN107976824A (zh) * 2017-12-27 2018-05-01 暨南大学 光波导及幅度调制器

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5038342B2 (fr) * 1971-12-01 1975-12-09
US3810688A (en) * 1973-05-21 1974-05-14 A Ballman Optical waveguiding devices using monocrystalline materials of the sillenite family of bismuth oxides
US3996576A (en) * 1975-03-17 1976-12-07 Texas Instruments Incorporated Optical waveguide magnetic bubble detection
DE2614871C3 (de) * 1976-04-06 1981-05-27 Siemens AG, 1000 Berlin und 8000 München Verfahren zur Herstellung von Dünnschicht-Lichtleiterstrukturen
DE2626516A1 (de) * 1976-06-14 1977-12-22 Siemens Ag Verfahren zum herstellen von lichtleiterstrukturen mit dazwischenliegenden elektroden
US4387343A (en) * 1978-06-22 1983-06-07 Nippon Electric Co., Ltd. Electrooptic light modulator including weighted interdigital electrodes
GB2069713B (en) * 1980-01-31 1984-10-10 Canon Kk Beam spot scanning device
JPS5933880A (ja) * 1982-08-19 1984-02-23 Nec Corp 半導体装置の製造方法
FR2533714A1 (fr) * 1982-09-28 1984-03-30 Thomson Csf Dispositif coupleur optique integre non lineaire et oscillateur parametrique comprenant un tel dispositif
US4585299A (en) * 1983-07-19 1986-04-29 Fairchild Semiconductor Corporation Process for fabricating optical wave-guiding components and components made by the process
US4799750A (en) * 1983-11-04 1989-01-24 Canon Kabushiki Kaisha Optical function element and a method for manufacturing the same
US4605944A (en) * 1984-09-11 1986-08-12 Sanyo Electric Co., Ltd. LED array device for printer

Also Published As

Publication number Publication date
FR2570516A1 (fr) 1986-03-21
US4778236A (en) 1988-10-18
GB2165956B (en) 1988-11-30
DE3532811A1 (de) 1986-03-27
DE3532811C2 (de) 1995-01-05
GB2165956A (en) 1986-04-23
GB8522689D0 (en) 1985-10-16

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Legal Events

Date Code Title Description
ST Notification of lapse