FR2515427A1 - Procede de fabrication de resistances de forte valeur pour circuits integres - Google Patents

Procede de fabrication de resistances de forte valeur pour circuits integres Download PDF

Info

Publication number
FR2515427A1
FR2515427A1 FR8120165A FR8120165A FR2515427A1 FR 2515427 A1 FR2515427 A1 FR 2515427A1 FR 8120165 A FR8120165 A FR 8120165A FR 8120165 A FR8120165 A FR 8120165A FR 2515427 A1 FR2515427 A1 FR 2515427A1
Authority
FR
France
Prior art keywords
polycrystalline silicon
silicide
layer
resistors
pawns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR8120165A
Other languages
English (en)
French (fr)
Other versions
FR2515427B1 (show.php
Inventor
Guy Dubois
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EFCIS
Original Assignee
EFCIS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EFCIS filed Critical EFCIS
Priority to FR8120165A priority Critical patent/FR2515427A1/fr
Priority to US06/423,722 priority patent/US4451328A/en
Priority to EP82401873A priority patent/EP0078190B1/fr
Priority to DE8282401873T priority patent/DE3264575D1/de
Publication of FR2515427A1 publication Critical patent/FR2515427A1/fr
Application granted granted Critical
Publication of FR2515427B1 publication Critical patent/FR2515427B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/40—Resistors
    • H10D1/47—Resistors having no potential barriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0272—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers for lift-off processes
    • H10P76/202—

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Semiconductor Integrated Circuits (AREA)
FR8120165A 1981-10-27 1981-10-27 Procede de fabrication de resistances de forte valeur pour circuits integres Granted FR2515427A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR8120165A FR2515427A1 (fr) 1981-10-27 1981-10-27 Procede de fabrication de resistances de forte valeur pour circuits integres
US06/423,722 US4451328A (en) 1981-10-27 1982-09-27 Manufacturing TaSi-polysilicon conductors having high-resistance elements by a liftoff technique
EP82401873A EP0078190B1 (fr) 1981-10-27 1982-10-12 Procédé de fabrication de résistances de forte valeur pour circuits intégrés
DE8282401873T DE3264575D1 (en) 1981-10-27 1982-10-12 Process for manufacturing high value resistors for integrated circuits

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8120165A FR2515427A1 (fr) 1981-10-27 1981-10-27 Procede de fabrication de resistances de forte valeur pour circuits integres

Publications (2)

Publication Number Publication Date
FR2515427A1 true FR2515427A1 (fr) 1983-04-29
FR2515427B1 FR2515427B1 (show.php) 1983-12-02

Family

ID=9263434

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8120165A Granted FR2515427A1 (fr) 1981-10-27 1981-10-27 Procede de fabrication de resistances de forte valeur pour circuits integres

Country Status (4)

Country Link
US (1) US4451328A (show.php)
EP (1) EP0078190B1 (show.php)
DE (1) DE3264575D1 (show.php)
FR (1) FR2515427A1 (show.php)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4570328A (en) * 1983-03-07 1986-02-18 Motorola, Inc. Method of producing titanium nitride MOS device gate electrode
JPS59232456A (ja) * 1983-06-16 1984-12-27 Hitachi Ltd 薄膜回路素子
JPS60130844A (ja) * 1983-12-20 1985-07-12 Toshiba Corp 半導体装置の製造方法
US4581815A (en) * 1984-03-01 1986-04-15 Advanced Micro Devices, Inc. Integrated circuit structure having intermediate metal silicide layer and method of making same
US4693925A (en) * 1984-03-01 1987-09-15 Advanced Micro Devices, Inc. Integrated circuit structure having intermediate metal silicide layer
US4829363A (en) * 1984-04-13 1989-05-09 Fairchild Camera And Instrument Corp. Structure for inhibiting dopant out-diffusion
US4604789A (en) * 1985-01-31 1986-08-12 Inmos Corporation Process for fabricating polysilicon resistor in polycide line
DE3683679D1 (de) * 1985-04-26 1992-03-12 Fujitsu Ltd Verfahren zur herstellung einer kontaktanordnung fuer eine halbleiteranordnung.
JPS6289341A (ja) * 1985-10-15 1987-04-23 Mitsubishi Electric Corp マスタスライス方式大規模半導体集積回路装置の製造方法
US4701241A (en) * 1986-10-06 1987-10-20 Rca Corporation Method of making a resistor
ATE87766T1 (de) * 1986-11-18 1993-04-15 Siemens Ag Integrierte halbleiterschaltung mit als duennschichtstege auf den die aktiven transistorbereiche trennenden feldoxidbereichen angeordneten lastwiderstaende und verfahren zu ihrer herstellung.
JPS63136668A (ja) * 1986-11-28 1988-06-08 Fuji Electric Co Ltd 半導体装置の製造方法
US4920388A (en) * 1987-02-17 1990-04-24 Siliconix Incorporated Power transistor with integrated gate resistor
GB8710359D0 (en) * 1987-05-01 1987-06-03 Inmos Ltd Semiconductor element
JPH01143252A (ja) * 1987-11-27 1989-06-05 Nec Corp 半導体装置
US5336911A (en) * 1988-05-10 1994-08-09 Seiko Epson Corporation Semiconductor device
US4859278A (en) * 1988-08-11 1989-08-22 Xerox Corporation Fabrication of high resistive loads utilizing a single level polycide process
US5126279A (en) * 1988-12-19 1992-06-30 Micron Technology, Inc. Single polysilicon cross-coupled resistor, six-transistor SRAM cell design technique
US5017459A (en) * 1989-04-26 1991-05-21 Eastman Kodak Company Lift-off process
US5135882A (en) * 1989-07-31 1992-08-04 Micron Technology, Inc. Technique for forming high-value inter-nodal coupling resistance for rad-hard applications in a double-poly, salicide process using local interconnect
US4948747A (en) * 1989-12-18 1990-08-14 Motorola, Inc. Method of making an integrated circuit resistor
US5068201A (en) * 1990-05-31 1991-11-26 Sgs-Thomson Microelectronics, Inc. Method for forming a high valued resistive load element and low resistance interconnect for integrated circuits
USD332204S (en) 1991-01-31 1993-01-05 The Decor Corporation Pty. Ltd. Combined container lid and convertible grid
JPH088225B2 (ja) * 1991-12-17 1996-01-29 インターナショナル・ビジネス・マシーンズ・コーポレイション 改良された半導体用局部的相互接続
US6143613A (en) * 1997-06-30 2000-11-07 Vlsi Technology, Inc. Selective exclusion of silicide formation to make polysilicon resistors
US6023086A (en) * 1997-09-02 2000-02-08 Motorola, Inc. Semiconductor transistor with stabilizing gate electrode
US6187617B1 (en) 1999-07-29 2001-02-13 International Business Machines Corporation Semiconductor structure having heterogeneous silicide regions and method for forming same
US20050130383A1 (en) * 2003-12-10 2005-06-16 International Business Machines Corporation Silicide resistor in beol layer of semiconductor device and method
US7393701B2 (en) * 2006-12-05 2008-07-01 International Business Machines Corporation Method of adjusting buried resistor resistance

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2269199A1 (show.php) * 1974-04-25 1975-11-21 Rca Corp

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4214917A (en) * 1978-02-10 1980-07-29 Emm Semi Process of forming a semiconductor memory cell with continuous polysilicon run circuit elements
US4297721A (en) * 1978-11-03 1981-10-27 Mostek Corporation Extremely low current load device for integrated circuit
US4332839A (en) * 1978-12-29 1982-06-01 Bell Telephone Laboratories, Incorporated Method for making integrated semiconductor circuit structure with formation of Ti or Ta silicide
US4267558A (en) * 1979-01-05 1981-05-12 Texas Instruments Incorporated Electrically erasable memory with self-limiting erase
JPS5599722A (en) * 1979-01-26 1980-07-30 Hitachi Ltd Preparation of semiconductor device
US4291328A (en) * 1979-06-15 1981-09-22 Texas Instruments Incorporated Interlevel insulator for integrated circuit with implanted resistor element in second-level polycrystalline silicon
US4362597A (en) * 1981-01-19 1982-12-07 Bell Telephone Laboratories, Incorporated Method of fabricating high-conductivity silicide-on-polysilicon structures for MOS devices

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2269199A1 (show.php) * 1974-04-25 1975-11-21 Rca Corp

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/80 *

Also Published As

Publication number Publication date
EP0078190B1 (fr) 1985-07-03
DE3264575D1 (en) 1985-08-08
EP0078190A1 (fr) 1983-05-04
US4451328A (en) 1984-05-29
FR2515427B1 (show.php) 1983-12-02

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