FR2436829A1 - Procede pour la formation par croissance de couches en gaas de type n par epitaxie a faisceau moleculaire - Google Patents
Procede pour la formation par croissance de couches en gaas de type n par epitaxie a faisceau moleculaireInfo
- Publication number
- FR2436829A1 FR2436829A1 FR7923577A FR7923577A FR2436829A1 FR 2436829 A1 FR2436829 A1 FR 2436829A1 FR 7923577 A FR7923577 A FR 7923577A FR 7923577 A FR7923577 A FR 7923577A FR 2436829 A1 FR2436829 A1 FR 2436829A1
- Authority
- FR
- France
- Prior art keywords
- type gaas
- molecular beam
- beam epitaxy
- gaas layers
- growth formation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02612—Formation types
- H01L21/02617—Deposition types
- H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
- C30B29/42—Gallium arsenide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02538—Group 13/15 materials
- H01L21/02546—Arsenides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/0257—Doping during depositing
- H01L21/02573—Conductivity type
- H01L21/02576—N-type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/025—Deposition multi-step
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/169—Vacuum deposition, e.g. including molecular beam epitaxy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S252/00—Compositions
- Y10S252/95—Doping agent source material
- Y10S252/951—Doping agent source material for vapor transport
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Metallurgy (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PROCEDE POUR LA FORMATION PAR CROISSANCE D'UNE COUCHE EN GAAS DE TYPE N SUR UN SUBSTRAT PAR EPITAXIE A FAISCEAU MOLECULAIRE, L'AGENT DE DOPAGE ETANT CONSTITUE PAR S, SE OU TE. LA COUCHE S'OBTIENT A L'AIDE DE FAISCEAUX MOLECULAIRES DE GALLIUM, D'ARSENIC ET DE PBX QUI SONT DIRIGES SUR UN SUBSTRAT CHAUFFE, X REPRESENTANT S, SE OU TE. APPLICATION: DISPOSITIF SEMI-CONDUCTEUR.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB7837800A GB2030551B (en) | 1978-09-22 | 1978-09-22 | Growing a gaas layer doped with s se or te |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2436829A1 true FR2436829A1 (fr) | 1980-04-18 |
FR2436829B1 FR2436829B1 (fr) | 1984-05-04 |
Family
ID=10499848
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7923577A Granted FR2436829A1 (fr) | 1978-09-22 | 1979-09-21 | Procede pour la formation par croissance de couches en gaas de type n par epitaxie a faisceau moleculaire |
Country Status (6)
Country | Link |
---|---|
US (1) | US4233092A (fr) |
JP (1) | JPS5542300A (fr) |
CA (1) | CA1150602A (fr) |
DE (1) | DE2937425A1 (fr) |
FR (1) | FR2436829A1 (fr) |
GB (1) | GB2030551B (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0031180A3 (fr) * | 1979-12-19 | 1983-07-20 | Philips Electronics Uk Limited | Procédé de croissance d'une couche d'un composé III-V dopé par épitaxie par faisceau moléculaire et dispositif semiconducteur comportant un substrat semiconducteur muni d'une couche épitaxiale d'un composé III-V dopé déposé par ce procédé |
US4398963A (en) * | 1980-11-19 | 1983-08-16 | The United States Of America As Represented By The Secretary Of The Navy | Method for making non-alloyed heterojunction ohmic contacts |
US4469144A (en) * | 1982-05-21 | 1984-09-04 | Becton Dickinson And Company | Automatic powder dispensing methods and apparatus |
GB2130716A (en) * | 1982-11-26 | 1984-06-06 | Philips Electronic Associated | Method of determining the composition of an alloy film grown by a layer-by layer process |
US4588451A (en) * | 1984-04-27 | 1986-05-13 | Advanced Energy Fund Limited Partnership | Metal organic chemical vapor deposition of 111-v compounds on silicon |
US4622083A (en) * | 1985-03-11 | 1986-11-11 | Texas Instruments Incorporated | Molecular beam epitaxial process |
JPS61275191A (ja) * | 1985-05-29 | 1986-12-05 | Furukawa Electric Co Ltd:The | GaAs薄膜の気相成長法 |
JPS63117821A (ja) * | 1986-11-07 | 1988-05-21 | Tsumura & Co | 粉粒体の計量充填装置 |
JPH0647515B2 (ja) * | 1988-12-08 | 1994-06-22 | シャープ株式会社 | 化合物半導体エピタキシャル成長法 |
JPH0831409B2 (ja) * | 1990-02-14 | 1996-03-27 | 株式会社東芝 | 化合物半導体装置およびその製造方法 |
US6508960B1 (en) | 1999-07-26 | 2003-01-21 | The United States Of America As Represented By The Secretary Of The Air Force | Telluride quaternary nonlinear optic materials |
US6304583B1 (en) | 1999-07-26 | 2001-10-16 | The United States Of America As Represented By The Secretary Of The Air Force | Utilization of telluride quaternary nonlinear optic materials |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1315269A (fr) * | 1961-01-03 | 1963-01-18 | Siemens Ag | Procédé pour l'application épitactique de minces couches monocristallines à partir de composés semi-conducteurs |
FR2027188A1 (fr) * | 1968-12-27 | 1970-09-25 | Western Electric Co |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2994621A (en) * | 1956-03-29 | 1961-08-01 | Baldwin Piano Co | Semi-conductive films and methods of producing them |
US3716424A (en) * | 1970-04-02 | 1973-02-13 | Us Navy | Method of preparation of lead sulfide pn junction diodes |
US3751310A (en) * | 1971-03-25 | 1973-08-07 | Bell Telephone Labor Inc | Germanium doped epitaxial films by the molecular beam method |
US3839084A (en) * | 1972-11-29 | 1974-10-01 | Bell Telephone Labor Inc | Molecular beam epitaxy method for fabricating magnesium doped thin films of group iii(a)-v(a) compounds |
US3915765A (en) * | 1973-06-25 | 1975-10-28 | Bell Telephone Labor Inc | MBE technique for fabricating semiconductor devices having low series resistance |
US3941624A (en) * | 1975-03-28 | 1976-03-02 | Bell Telephone Laboratories, Incorporated | Sn-Doped group III(a)-v(a) Ga-containing layers grown by molecular beam epitaxy |
-
1978
- 1978-09-22 GB GB7837800A patent/GB2030551B/en not_active Expired
-
1979
- 1979-09-12 US US06/074,617 patent/US4233092A/en not_active Expired - Lifetime
- 1979-09-13 CA CA000335602A patent/CA1150602A/fr not_active Expired
- 1979-09-15 DE DE19792937425 patent/DE2937425A1/de not_active Ceased
- 1979-09-20 JP JP12021779A patent/JPS5542300A/ja active Granted
- 1979-09-21 FR FR7923577A patent/FR2436829A1/fr active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1315269A (fr) * | 1961-01-03 | 1963-01-18 | Siemens Ag | Procédé pour l'application épitactique de minces couches monocristallines à partir de composés semi-conducteurs |
FR2027188A1 (fr) * | 1968-12-27 | 1970-09-25 | Western Electric Co |
Non-Patent Citations (2)
Title |
---|
EXBK/62 * |
EXBK/78 * |
Also Published As
Publication number | Publication date |
---|---|
CA1150602A (fr) | 1983-07-26 |
US4233092A (en) | 1980-11-11 |
JPS5542300A (en) | 1980-03-25 |
FR2436829B1 (fr) | 1984-05-04 |
GB2030551B (en) | 1982-08-04 |
DE2937425A1 (de) | 1980-04-10 |
GB2030551A (en) | 1980-04-10 |
JPS5747160B2 (fr) | 1982-10-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |