FR2401696A1 - Methode de depot de silicium cristallin en films minces sur substrats graphites - Google Patents
Methode de depot de silicium cristallin en films minces sur substrats graphitesInfo
- Publication number
- FR2401696A1 FR2401696A1 FR7726402A FR7726402A FR2401696A1 FR 2401696 A1 FR2401696 A1 FR 2401696A1 FR 7726402 A FR7726402 A FR 7726402A FR 7726402 A FR7726402 A FR 7726402A FR 2401696 A1 FR2401696 A1 FR 2401696A1
- Authority
- FR
- France
- Prior art keywords
- crystalline silicon
- substrate
- thin films
- bringing
- graphitized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/007—Pulling on a substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/06—Non-vertical pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/914—Crystallization on a continuous moving substrate or cooling surface, e.g. wheel, cylinder, belt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/925—Fluid growth doping control, e.g. delta doping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Photovoltaic Devices (AREA)
- Ceramic Products (AREA)
Abstract
Procédé de dépôt en continu de silicium cristallin, dopé N ou P ou non, en film mince sur un substrat graphité consistant à : a. placer la matière de silicium cristallin dans un creuset comportant à sa partie inférieure un orifice capillaire d'axe vertical; b. porter la matière à une température supérieur à son point de fusion; c. amener le substrat préchauffé au contact de la goutte pendante formée à la partie inférieure de l'orifice capillaire, d. déplacer le substrat à vitesse convenable dans une direction constante déterminée ; e. enlever à intervalles de temps choisis le substrat revêtu du corps cristallin. Les dépôts de silicium cristallin sur des substrats graphités obtenus selon l'invention constituent le principal constituant des cellules photovoltaïques.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7726402A FR2401696A1 (fr) | 1977-08-31 | 1977-08-31 | Methode de depot de silicium cristallin en films minces sur substrats graphites |
US05/926,879 US4233338A (en) | 1977-08-31 | 1978-07-24 | Processes for deposition of thin films of crystalline silicon on graphite |
IT68866/78A IT1160579B (it) | 1977-08-31 | 1978-08-07 | Procedimento per il deposito del silicio cristallino in pellicola sottile su un substrato grafitato |
DE2837775A DE2837775C2 (de) | 1977-08-31 | 1978-08-30 | Verfahren zur Herstellung von kristallinem Silicium |
JP10568278A JPS5460291A (en) | 1977-08-31 | 1978-08-31 | Process for depositing thin film of crystalline silicon on graphite basee material |
GB7835225A GB2003400B (en) | 1977-08-31 | 1978-08-31 | Process for deposition of thin films of crystalline silicon on graphite |
CH917678A CH626746A5 (fr) | 1977-08-31 | 1978-08-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7726402A FR2401696A1 (fr) | 1977-08-31 | 1977-08-31 | Methode de depot de silicium cristallin en films minces sur substrats graphites |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2401696A1 true FR2401696A1 (fr) | 1979-03-30 |
FR2401696B1 FR2401696B1 (fr) | 1980-02-01 |
Family
ID=9194902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7726402A Granted FR2401696A1 (fr) | 1977-08-31 | 1977-08-31 | Methode de depot de silicium cristallin en films minces sur substrats graphites |
Country Status (7)
Country | Link |
---|---|
US (1) | US4233338A (fr) |
JP (1) | JPS5460291A (fr) |
CH (1) | CH626746A5 (fr) |
DE (1) | DE2837775C2 (fr) |
FR (1) | FR2401696A1 (fr) |
GB (1) | GB2003400B (fr) |
IT (1) | IT1160579B (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3231326A1 (de) * | 1982-08-23 | 1984-02-23 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum herstellen von grossflaechigen, bandfoermigen siliziumkoerpern fuer solarzellen |
DE3306135A1 (de) * | 1983-02-22 | 1984-08-23 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und vorrichtung zum herstellen von polykirstallinen, grossflaechigen siliziumkristallkoerpern fuer solarzellen |
US4495155A (en) * | 1982-06-11 | 1985-01-22 | Circeram | Modified crucible for the pendant drop method of crystallization |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4525223A (en) * | 1978-09-19 | 1985-06-25 | Noboru Tsuya | Method of manufacturing a thin ribbon wafer of semiconductor material |
GB2059292A (en) * | 1979-09-28 | 1981-04-23 | Honeywell Inc | Growing silicon films on substrates |
US4323419A (en) * | 1980-05-08 | 1982-04-06 | Atlantic Richfield Company | Method for ribbon solar cell fabrication |
DE3019653A1 (de) * | 1980-05-22 | 1981-11-26 | SIEMENS AG AAAAA, 1000 Berlin und 8000 München | Verbesserung eines verfahres zur herstellung von platten-, band- oder folienfoermigen siliziumkristallkoerpern fuer solarzellen |
DE3132776A1 (de) * | 1981-08-19 | 1983-03-03 | Heliotronic Gmbh | Verfahren zur herstellung grob- bis einkristalliner folien aus halbleitermaterial |
FR2529189B1 (fr) * | 1982-06-25 | 1985-08-09 | Comp Generale Electricite | Procede de fabrication d'une bande de silicium polycristallin pour photophiles |
US4584181A (en) * | 1982-12-27 | 1986-04-22 | Sri International | Process and apparatus for obtaining silicon from fluosilicic acid |
US4781565A (en) * | 1982-12-27 | 1988-11-01 | Sri International | Apparatus for obtaining silicon from fluosilicic acid |
US4748014A (en) * | 1982-12-27 | 1988-05-31 | Sri International | Process and apparatus for obtaining silicon from fluosilicic acid |
DE3404818A1 (de) * | 1984-02-10 | 1985-08-14 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum erzeugen eines pn- ueberganges in einem nach dem durchlaufverfahren hergestellten siliziumband |
DE3419137A1 (de) * | 1984-05-23 | 1985-11-28 | Bayer Ag, 5090 Leverkusen | Verfahren und vorrichtung zur herstellung von halbleiterfolien |
EP0278131B1 (fr) * | 1987-02-06 | 1991-07-17 | The BOC Group plc | Procédé pour fabriquer une couche mince semi-conductrice |
WO1988005835A1 (fr) * | 1987-02-06 | 1988-08-11 | The Boc Group Plc | Procede de preparation d'une pellicule semi-conductrice mince |
US5075257A (en) * | 1990-11-09 | 1991-12-24 | The Board Of Trustees Of The University Of Arkansas | Aerosol deposition and film formation of silicon |
US5688324A (en) * | 1994-07-15 | 1997-11-18 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for coating substrate |
JP3875314B2 (ja) * | 1996-07-29 | 2007-01-31 | 日本碍子株式会社 | シリコン結晶プレートの育成方法、シリコン結晶プレートの育成装置、シリコン結晶プレートおよび太陽電池素子の製造方法 |
US7344594B2 (en) * | 2004-06-18 | 2008-03-18 | Memc Electronic Materials, Inc. | Melter assembly and method for charging a crystal forming apparatus with molten source material |
US7691199B2 (en) * | 2004-06-18 | 2010-04-06 | Memc Electronic Materials, Inc. | Melter assembly and method for charging a crystal forming apparatus with molten source material |
US7465351B2 (en) * | 2004-06-18 | 2008-12-16 | Memc Electronic Materials, Inc. | Melter assembly and method for charging a crystal forming apparatus with molten source material |
US20110303290A1 (en) * | 2010-06-14 | 2011-12-15 | Korea Institute Of Energy Research | Method and apparatus for manufacturing silicon substrate with excellent surface quality using inert gas blowing |
WO2014117840A1 (fr) * | 2013-01-31 | 2014-08-07 | European Space Agency | Procédé et système de production d'un composant d'alliage allongé présentant une variation de composition longitudinale contrôlée, et composant d'alliage allongé correspondant |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL270516A (fr) * | 1960-11-30 | |||
NL7004876A (fr) * | 1970-04-04 | 1971-10-06 | ||
IT1055104B (it) * | 1975-02-07 | 1981-12-21 | Philips Nv | Metodo di fabbricazione di dispositivi semiconduttori comportante la formazione di uno strato di materiale semiconduuttore su di un substrato apparato per l'attuazione di tale metodo e dispositivo semiconduttore fabbricato con l'ausilio di detto metodo |
US4119744A (en) * | 1975-02-07 | 1978-10-10 | U.S. Philips Corporation | Method of manufacturing semiconductor devices in which a layer of semiconductor material is provided on a substrate |
US3961997A (en) * | 1975-05-12 | 1976-06-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Fabrication of polycrystalline solar cells on low-cost substrates |
FR2321326A1 (fr) * | 1975-08-08 | 1977-03-18 | Ugine Kuhlmann | Procede de fabrication en continu de monocristaux preformes |
US4124411A (en) * | 1976-09-02 | 1978-11-07 | U.S. Philips Corporation | Method of providing a layer of solid material on a substrate in which liquid from which the solid material can be formed, is spread over the substrate surface |
US4090851A (en) * | 1976-10-15 | 1978-05-23 | Rca Corporation | Si3 N4 Coated crucible and die means for growing single crystalline silicon sheets |
US4099924A (en) * | 1977-03-16 | 1978-07-11 | Rca Corporation | Apparatus improvements for growing single crystalline silicon sheets |
-
1977
- 1977-08-31 FR FR7726402A patent/FR2401696A1/fr active Granted
-
1978
- 1978-07-24 US US05/926,879 patent/US4233338A/en not_active Expired - Lifetime
- 1978-08-07 IT IT68866/78A patent/IT1160579B/it active
- 1978-08-30 DE DE2837775A patent/DE2837775C2/de not_active Expired
- 1978-08-31 GB GB7835225A patent/GB2003400B/en not_active Expired
- 1978-08-31 JP JP10568278A patent/JPS5460291A/ja active Pending
- 1978-08-31 CH CH917678A patent/CH626746A5/fr not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4495155A (en) * | 1982-06-11 | 1985-01-22 | Circeram | Modified crucible for the pendant drop method of crystallization |
DE3231326A1 (de) * | 1982-08-23 | 1984-02-23 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum herstellen von grossflaechigen, bandfoermigen siliziumkoerpern fuer solarzellen |
DE3306135A1 (de) * | 1983-02-22 | 1984-08-23 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und vorrichtung zum herstellen von polykirstallinen, grossflaechigen siliziumkristallkoerpern fuer solarzellen |
Also Published As
Publication number | Publication date |
---|---|
GB2003400B (en) | 1982-03-03 |
DE2837775C2 (de) | 1984-03-15 |
IT1160579B (it) | 1987-03-11 |
DE2837775A1 (de) | 1979-03-08 |
US4233338A (en) | 1980-11-11 |
FR2401696B1 (fr) | 1980-02-01 |
IT7868866A0 (it) | 1978-08-07 |
GB2003400A (en) | 1979-03-14 |
CH626746A5 (fr) | 1981-11-30 |
JPS5460291A (en) | 1979-05-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |