JPS5796520A - Method for forming silicon single crystal film - Google Patents
Method for forming silicon single crystal filmInfo
- Publication number
- JPS5796520A JPS5796520A JP17352980A JP17352980A JPS5796520A JP S5796520 A JPS5796520 A JP S5796520A JP 17352980 A JP17352980 A JP 17352980A JP 17352980 A JP17352980 A JP 17352980A JP S5796520 A JPS5796520 A JP S5796520A
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- silicon
- crystal film
- groove
- drop
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02422—Non-crystalline insulating materials, e.g. glass, polymers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
Abstract
PURPOSE:To form the single crystal film of silicon in the inside of a groove at a low temperature, by lowering a melting point by using eutectic reaction of metal and silicon, and moving a drop of metalsilicon alloy along the groove formed on the surface of an amorphous insulator substrate. CONSTITUTION:The linear groove is formed on the amorphous insulator substrate 1 such as glass, and an amorphous or polycrystal silicon film 2 is deposited in the groove. Furthermore, a gold evaporated film 3 is provided on one end of each linear groove. Then, the drop of the alloy liquid is formed by using laser light, an electron beam, and the like, the liquid drop 5 is moved by scanning the laser light and the like, and the single crystal film 4 of silicon is formed. Since the melting point is lowered by using eutectic reaction, the silicon single crystal film having small thermal strain can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17352980A JPS5796520A (en) | 1980-12-09 | 1980-12-09 | Method for forming silicon single crystal film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17352980A JPS5796520A (en) | 1980-12-09 | 1980-12-09 | Method for forming silicon single crystal film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5796520A true JPS5796520A (en) | 1982-06-15 |
Family
ID=15962212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17352980A Pending JPS5796520A (en) | 1980-12-09 | 1980-12-09 | Method for forming silicon single crystal film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5796520A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4717688A (en) * | 1986-04-16 | 1988-01-05 | Siemens Aktiengesellschaft | Liquid phase epitaxy method |
JPS6379787A (en) * | 1986-09-22 | 1988-04-09 | Matsushita Electric Ind Co Ltd | Process for preparing thin film |
-
1980
- 1980-12-09 JP JP17352980A patent/JPS5796520A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4717688A (en) * | 1986-04-16 | 1988-01-05 | Siemens Aktiengesellschaft | Liquid phase epitaxy method |
JPS6379787A (en) * | 1986-09-22 | 1988-04-09 | Matsushita Electric Ind Co Ltd | Process for preparing thin film |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3279497D1 (en) | A thin film photovoltaic solar cell and method of making the same | |
JPS56142630A (en) | Manufacture of semiconductor device | |
JPS6466929A (en) | Method of forming defect-free single crystal thin layer of semiconductor material | |
JPS57194518A (en) | Manufacture of polycrystalline silicon | |
JPS5796520A (en) | Method for forming silicon single crystal film | |
JPS57155726A (en) | Manufacture of semiconductor device | |
JPS57132381A (en) | Manufacture of high melting point compound thin film | |
JPS5333050A (en) | Production of semiconductor element | |
JPS6459807A (en) | Material for thin-film transistor | |
JPS575327A (en) | Manufacture of semiconductor device | |
JPS6448410A (en) | Manufacture of semiconductor device | |
JPS5710224A (en) | Forming method for silicone single crystalline film | |
JPS5774854A (en) | Magnetic optical storing element | |
KR890008943A (en) | Method of manufacturing single crystal layer on substrate | |
JPS55100295A (en) | Production of single crystal thin film | |
JPS57145316A (en) | Manufacture of semicondcutor device | |
JPS5796521A (en) | Method for forming silicon single crystal film | |
KR910013486A (en) | Defect-free single crystal thin film manufacturing method | |
JPS5321570A (en) | Bonding method of semiconductor substrates | |
JPS544567A (en) | Growing apparatus of ion beam crystal | |
JPS5578546A (en) | Manufacture of semiconductor | |
JPS56165250A (en) | Electron beam scanning type electro-optical valve | |
JPS6489511A (en) | Manufacture of single crystal silicon film | |
JPS56146231A (en) | Manufacture of semiconductor device | |
JPS5776830A (en) | Semiconductor substrate |