JPS5460291A - Process for depositing thin film of crystalline silicon on graphite basee material - Google Patents
Process for depositing thin film of crystalline silicon on graphite basee materialInfo
- Publication number
- JPS5460291A JPS5460291A JP10568278A JP10568278A JPS5460291A JP S5460291 A JPS5460291 A JP S5460291A JP 10568278 A JP10568278 A JP 10568278A JP 10568278 A JP10568278 A JP 10568278A JP S5460291 A JPS5460291 A JP S5460291A
- Authority
- JP
- Japan
- Prior art keywords
- basee
- graphite
- thin film
- crystalline silicon
- depositing thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/007—Pulling on a substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/06—Non-vertical pulling
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/914—Crystallization on a continuous moving substrate or cooling surface, e.g. wheel, cylinder, belt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/925—Fluid growth doping control, e.g. delta doping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Photovoltaic Devices (AREA)
- Ceramic Products (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7726402A FR2401696A1 (fr) | 1977-08-31 | 1977-08-31 | Methode de depot de silicium cristallin en films minces sur substrats graphites |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5460291A true JPS5460291A (en) | 1979-05-15 |
Family
ID=9194902
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10568278A Pending JPS5460291A (en) | 1977-08-31 | 1978-08-31 | Process for depositing thin film of crystalline silicon on graphite basee material |
Country Status (7)
Country | Link |
---|---|
US (1) | US4233338A (ja) |
JP (1) | JPS5460291A (ja) |
CH (1) | CH626746A5 (ja) |
DE (1) | DE2837775C2 (ja) |
FR (1) | FR2401696A1 (ja) |
GB (1) | GB2003400B (ja) |
IT (1) | IT1160579B (ja) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4525223A (en) * | 1978-09-19 | 1985-06-25 | Noboru Tsuya | Method of manufacturing a thin ribbon wafer of semiconductor material |
GB2059292A (en) * | 1979-09-28 | 1981-04-23 | Honeywell Inc | Growing silicon films on substrates |
US4323419A (en) * | 1980-05-08 | 1982-04-06 | Atlantic Richfield Company | Method for ribbon solar cell fabrication |
DE3019653A1 (de) * | 1980-05-22 | 1981-11-26 | SIEMENS AG AAAAA, 1000 Berlin und 8000 München | Verbesserung eines verfahres zur herstellung von platten-, band- oder folienfoermigen siliziumkristallkoerpern fuer solarzellen |
DE3132776A1 (de) * | 1981-08-19 | 1983-03-03 | Heliotronic Gmbh | Verfahren zur herstellung grob- bis einkristalliner folien aus halbleitermaterial |
FR2528454A1 (fr) * | 1982-06-11 | 1983-12-16 | Criceram | Creuset modifie pour la methode de cristallisation par goutte pendante |
FR2529189B1 (fr) * | 1982-06-25 | 1985-08-09 | Comp Generale Electricite | Procede de fabrication d'une bande de silicium polycristallin pour photophiles |
DE3231326A1 (de) * | 1982-08-23 | 1984-02-23 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum herstellen von grossflaechigen, bandfoermigen siliziumkoerpern fuer solarzellen |
US4584181A (en) * | 1982-12-27 | 1986-04-22 | Sri International | Process and apparatus for obtaining silicon from fluosilicic acid |
US4781565A (en) * | 1982-12-27 | 1988-11-01 | Sri International | Apparatus for obtaining silicon from fluosilicic acid |
US4748014A (en) * | 1982-12-27 | 1988-05-31 | Sri International | Process and apparatus for obtaining silicon from fluosilicic acid |
DE3306135A1 (de) * | 1983-02-22 | 1984-08-23 | Siemens AG, 1000 Berlin und 8000 München | Verfahren und vorrichtung zum herstellen von polykirstallinen, grossflaechigen siliziumkristallkoerpern fuer solarzellen |
DE3404818A1 (de) * | 1984-02-10 | 1985-08-14 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum erzeugen eines pn- ueberganges in einem nach dem durchlaufverfahren hergestellten siliziumband |
DE3419137A1 (de) * | 1984-05-23 | 1985-11-28 | Bayer Ag, 5090 Leverkusen | Verfahren und vorrichtung zur herstellung von halbleiterfolien |
EP0278131B1 (en) * | 1987-02-06 | 1991-07-17 | The BOC Group plc | A method for the preparation of a thin semiconductor film |
WO1988005835A1 (en) * | 1987-02-06 | 1988-08-11 | The Boc Group Plc | A method for the preparation of a thin semiconductor film |
US5075257A (en) * | 1990-11-09 | 1991-12-24 | The Board Of Trustees Of The University Of Arkansas | Aerosol deposition and film formation of silicon |
US5688324A (en) * | 1994-07-15 | 1997-11-18 | Dainippon Screen Mfg. Co., Ltd. | Apparatus for coating substrate |
JP3875314B2 (ja) * | 1996-07-29 | 2007-01-31 | 日本碍子株式会社 | シリコン結晶プレートの育成方法、シリコン結晶プレートの育成装置、シリコン結晶プレートおよび太陽電池素子の製造方法 |
US7344594B2 (en) * | 2004-06-18 | 2008-03-18 | Memc Electronic Materials, Inc. | Melter assembly and method for charging a crystal forming apparatus with molten source material |
US7691199B2 (en) * | 2004-06-18 | 2010-04-06 | Memc Electronic Materials, Inc. | Melter assembly and method for charging a crystal forming apparatus with molten source material |
US7465351B2 (en) * | 2004-06-18 | 2008-12-16 | Memc Electronic Materials, Inc. | Melter assembly and method for charging a crystal forming apparatus with molten source material |
US20110303290A1 (en) * | 2010-06-14 | 2011-12-15 | Korea Institute Of Energy Research | Method and apparatus for manufacturing silicon substrate with excellent surface quality using inert gas blowing |
WO2014117840A1 (en) * | 2013-01-31 | 2014-08-07 | European Space Agency | Method of and system for producing an elongated alloy component having controlled longitudinal composition variation; corresponding elongated alloy component |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL270516A (ja) * | 1960-11-30 | |||
NL7004876A (ja) * | 1970-04-04 | 1971-10-06 | ||
IT1055104B (it) * | 1975-02-07 | 1981-12-21 | Philips Nv | Metodo di fabbricazione di dispositivi semiconduttori comportante la formazione di uno strato di materiale semiconduuttore su di un substrato apparato per l'attuazione di tale metodo e dispositivo semiconduttore fabbricato con l'ausilio di detto metodo |
US4119744A (en) * | 1975-02-07 | 1978-10-10 | U.S. Philips Corporation | Method of manufacturing semiconductor devices in which a layer of semiconductor material is provided on a substrate |
US3961997A (en) * | 1975-05-12 | 1976-06-08 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Fabrication of polycrystalline solar cells on low-cost substrates |
FR2321326A1 (fr) * | 1975-08-08 | 1977-03-18 | Ugine Kuhlmann | Procede de fabrication en continu de monocristaux preformes |
US4124411A (en) * | 1976-09-02 | 1978-11-07 | U.S. Philips Corporation | Method of providing a layer of solid material on a substrate in which liquid from which the solid material can be formed, is spread over the substrate surface |
US4090851A (en) * | 1976-10-15 | 1978-05-23 | Rca Corporation | Si3 N4 Coated crucible and die means for growing single crystalline silicon sheets |
US4099924A (en) * | 1977-03-16 | 1978-07-11 | Rca Corporation | Apparatus improvements for growing single crystalline silicon sheets |
-
1977
- 1977-08-31 FR FR7726402A patent/FR2401696A1/fr active Granted
-
1978
- 1978-07-24 US US05/926,879 patent/US4233338A/en not_active Expired - Lifetime
- 1978-08-07 IT IT68866/78A patent/IT1160579B/it active
- 1978-08-30 DE DE2837775A patent/DE2837775C2/de not_active Expired
- 1978-08-31 GB GB7835225A patent/GB2003400B/en not_active Expired
- 1978-08-31 JP JP10568278A patent/JPS5460291A/ja active Pending
- 1978-08-31 CH CH917678A patent/CH626746A5/fr not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
GB2003400B (en) | 1982-03-03 |
DE2837775C2 (de) | 1984-03-15 |
FR2401696A1 (fr) | 1979-03-30 |
IT1160579B (it) | 1987-03-11 |
DE2837775A1 (de) | 1979-03-08 |
US4233338A (en) | 1980-11-11 |
FR2401696B1 (ja) | 1980-02-01 |
IT7868866A0 (it) | 1978-08-07 |
GB2003400A (en) | 1979-03-14 |
CH626746A5 (ja) | 1981-11-30 |
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