GB2029017B - Control of deposition of thin films - Google Patents

Control of deposition of thin films

Info

Publication number
GB2029017B
GB2029017B GB7927951A GB7927951A GB2029017B GB 2029017 B GB2029017 B GB 2029017B GB 7927951 A GB7927951 A GB 7927951A GB 7927951 A GB7927951 A GB 7927951A GB 2029017 B GB2029017 B GB 2029017B
Authority
GB
United Kingdom
Prior art keywords
deposition
control
thin films
films
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB7927951A
Other versions
GB2029017A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB7927951A priority Critical patent/GB2029017B/en
Publication of GB2029017A publication Critical patent/GB2029017A/en
Application granted granted Critical
Publication of GB2029017B publication Critical patent/GB2029017B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0683—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating measurement during deposition or removal of the layer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/08—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D5/00—Control of dimensions of material
    • G05D5/02—Control of dimensions of material of thickness, e.g. of rolled material
    • G05D5/03—Control of dimensions of material of thickness, e.g. of rolled material characterised by the use of electric means
GB7927951A 1978-08-18 1979-08-10 Control of deposition of thin films Expired GB2029017B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB7927951A GB2029017B (en) 1978-08-18 1979-08-10 Control of deposition of thin films

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB7833927 1978-08-18
GB7927951A GB2029017B (en) 1978-08-18 1979-08-10 Control of deposition of thin films

Publications (2)

Publication Number Publication Date
GB2029017A GB2029017A (en) 1980-03-12
GB2029017B true GB2029017B (en) 1982-10-13

Family

ID=26268606

Family Applications (1)

Application Number Title Priority Date Filing Date
GB7927951A Expired GB2029017B (en) 1978-08-18 1979-08-10 Control of deposition of thin films

Country Status (1)

Country Link
GB (1) GB2029017B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4367044A (en) * 1980-12-31 1983-01-04 International Business Machines Corp. Situ rate and depth monitor for silicon etching
FR2531774A1 (en) * 1982-08-12 1984-02-17 Cit Alcatel DEVICE FOR CONTROLLING THE THICKNESS OF LOWLY ABSORBENT THIN LAYERS
US4676883A (en) * 1986-03-03 1987-06-30 Sierracin Corporation Optical disk transmission monitor for deposited films
EP0290657A1 (en) * 1987-05-15 1988-11-17 KSB Aktiengesellschaft Method and device for measuring the optical properties of thin layers
FR2649419B1 (en) * 1989-07-06 1991-09-20 France Etat METHOD FOR CONTROLLING THE THICKNESS OF AN ANTI-REFLECTIVE LAYER AND INSTALLATION FOR IMPLEMENTING IT
DE3925536A1 (en) * 1989-08-02 1991-02-07 Leybold Ag ARRANGEMENT FOR THICKNESSING OF THICK FILMS
US5117192A (en) * 1990-01-12 1992-05-26 Leybold Inficon Inc. Control circuitry for quartz crystal deposition monitor
US5112642A (en) * 1990-03-30 1992-05-12 Leybold Inficon, Inc. Measuring and controlling deposition on a piezoelectric monitor crystal
JP4345158B2 (en) * 1999-10-15 2009-10-14 ソニー株式会社 Optical component manufacturing apparatus and manufacturing method
PL1602919T3 (en) 2004-06-01 2008-06-30 Applied Mat Gmbh & Co Kg Measuring device for the survey of the transmittance of a coating

Also Published As

Publication number Publication date
GB2029017A (en) 1980-03-12

Similar Documents

Publication Publication Date Title
GB2039678B (en) Deposition of films on substrates
AU523866B2 (en) Manufacture of film
GB2020701B (en) Reactive sputtering of oxide films
AU523937B2 (en) Silicone coating composition
GB2039500B (en) Deposition of thin film organic coatings
AU528679B2 (en) Films
JPS57121064A (en) Formation of surface-even thin film
AU526605B2 (en) Deposition method
AU534897B2 (en) Silicone coating composition
AU533584B2 (en) Methods of forming coatings
AU527538B2 (en) Determination of immunoglobulins
GB2029017B (en) Control of deposition of thin films
AU532935B2 (en) Vapour deposition of metals
GB2026040B (en) Dielectric thin film
JPS5347416A (en) Manufacture of betaaalumina thin films
AU4954979A (en) In-the-mould coating
JPS55138892A (en) Method of forming thin film
GB2092022B (en) Production of protective thin film coating
JPS54111330A (en) Coating of photographic coating solution
AU527108B2 (en) Control of boundary layers
JPS553696A (en) Method of postttreating thin layer
DE2953050A1 (en) CONTROL OF DEPOSITION OF THIN FILMS
JPS5582429A (en) Method of trimming thin film capacitor
JPS54102349A (en) Production of metal*containing thin polyvinylchohloride film
JPS5740902A (en) Methdo of forming thin film

Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee