JPS53110070A - Method of finely working thin film - Google Patents

Method of finely working thin film

Info

Publication number
JPS53110070A
JPS53110070A JP2448777A JP2448777A JPS53110070A JP S53110070 A JPS53110070 A JP S53110070A JP 2448777 A JP2448777 A JP 2448777A JP 2448777 A JP2448777 A JP 2448777A JP S53110070 A JPS53110070 A JP S53110070A
Authority
JP
Japan
Prior art keywords
thin film
working thin
finely
finely working
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2448777A
Other languages
Japanese (ja)
Inventor
Masao Mashita
Kazue Sekikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2448777A priority Critical patent/JPS53110070A/en
Publication of JPS53110070A publication Critical patent/JPS53110070A/en
Pending legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2448777A 1977-03-08 1977-03-08 Method of finely working thin film Pending JPS53110070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2448777A JPS53110070A (en) 1977-03-08 1977-03-08 Method of finely working thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2448777A JPS53110070A (en) 1977-03-08 1977-03-08 Method of finely working thin film

Publications (1)

Publication Number Publication Date
JPS53110070A true JPS53110070A (en) 1978-09-26

Family

ID=12139535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2448777A Pending JPS53110070A (en) 1977-03-08 1977-03-08 Method of finely working thin film

Country Status (1)

Country Link
JP (1) JPS53110070A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005045911A1 (en) * 2003-11-11 2005-05-19 Asahi Glass Company, Limited Pattern formation method, electronic circuit manufactured by the same, and electronic device using the same
JP2009246401A (en) * 2003-09-26 2009-10-22 Medtronic Minimed Inc Method of forming highly reliable multi-layer circuit board
US8003513B2 (en) 2002-09-27 2011-08-23 Medtronic Minimed, Inc. Multilayer circuit devices and manufacturing methods using electroplated sacrificial structures

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8003513B2 (en) 2002-09-27 2011-08-23 Medtronic Minimed, Inc. Multilayer circuit devices and manufacturing methods using electroplated sacrificial structures
JP2009246401A (en) * 2003-09-26 2009-10-22 Medtronic Minimed Inc Method of forming highly reliable multi-layer circuit board
WO2005045911A1 (en) * 2003-11-11 2005-05-19 Asahi Glass Company, Limited Pattern formation method, electronic circuit manufactured by the same, and electronic device using the same
JPWO2005045911A1 (en) * 2003-11-11 2007-11-29 旭硝子株式会社 Pattern forming method, electronic circuit manufactured thereby, and electronic apparatus using the same
US7790358B2 (en) 2003-11-11 2010-09-07 Asahi Glass Company, Limited Pattern formation method, electronic circuit manufactured by the same, and electronic device using the same

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