JPS53134366A - Method of forming resist film - Google Patents
Method of forming resist filmInfo
- Publication number
- JPS53134366A JPS53134366A JP4937277A JP4937277A JPS53134366A JP S53134366 A JPS53134366 A JP S53134366A JP 4937277 A JP4937277 A JP 4937277A JP 4937277 A JP4937277 A JP 4937277A JP S53134366 A JPS53134366 A JP S53134366A
- Authority
- JP
- Japan
- Prior art keywords
- resist film
- forming resist
- forming
- film
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4937277A JPS6056285B2 (en) | 1977-04-28 | 1977-04-28 | How to create a resist film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4937277A JPS6056285B2 (en) | 1977-04-28 | 1977-04-28 | How to create a resist film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53134366A true JPS53134366A (en) | 1978-11-22 |
JPS6056285B2 JPS6056285B2 (en) | 1985-12-09 |
Family
ID=12829190
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4937277A Expired JPS6056285B2 (en) | 1977-04-28 | 1977-04-28 | How to create a resist film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6056285B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6194042A (en) * | 1984-10-16 | 1986-05-12 | Matsushita Electric Ind Co Ltd | Molecular construction and its manufacture |
JPS61138254A (en) * | 1984-12-10 | 1986-06-25 | Matsushita Electric Ind Co Ltd | Formation of pattern resin composition |
JPS63184332A (en) * | 1987-01-26 | 1988-07-29 | Nippon Telegr & Teleph Corp <Ntt> | Silanizing treater |
JP2014119658A (en) * | 2012-12-18 | 2014-06-30 | Shin Etsu Chem Co Ltd | Negative resist material and pattern forming method using the same |
-
1977
- 1977-04-28 JP JP4937277A patent/JPS6056285B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6194042A (en) * | 1984-10-16 | 1986-05-12 | Matsushita Electric Ind Co Ltd | Molecular construction and its manufacture |
JPS61138254A (en) * | 1984-12-10 | 1986-06-25 | Matsushita Electric Ind Co Ltd | Formation of pattern resin composition |
JPS63184332A (en) * | 1987-01-26 | 1988-07-29 | Nippon Telegr & Teleph Corp <Ntt> | Silanizing treater |
JP2014119658A (en) * | 2012-12-18 | 2014-06-30 | Shin Etsu Chem Co Ltd | Negative resist material and pattern forming method using the same |
Also Published As
Publication number | Publication date |
---|---|
JPS6056285B2 (en) | 1985-12-09 |
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