JPS5378076A - Method of finely working thin film - Google Patents

Method of finely working thin film

Info

Publication number
JPS5378076A
JPS5378076A JP15295376A JP15295376A JPS5378076A JP S5378076 A JPS5378076 A JP S5378076A JP 15295376 A JP15295376 A JP 15295376A JP 15295376 A JP15295376 A JP 15295376A JP S5378076 A JPS5378076 A JP S5378076A
Authority
JP
Japan
Prior art keywords
thin film
working thin
finely
finely working
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15295376A
Other languages
Japanese (ja)
Inventor
Akira Okada
Susumu Baba
Hironori Yuuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KDDI Corp
Original Assignee
Kokusai Denshin Denwa KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Denshin Denwa KK filed Critical Kokusai Denshin Denwa KK
Priority to JP15295376A priority Critical patent/JPS5378076A/en
Publication of JPS5378076A publication Critical patent/JPS5378076A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Weting (AREA)
JP15295376A 1976-12-21 1976-12-21 Method of finely working thin film Pending JPS5378076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15295376A JPS5378076A (en) 1976-12-21 1976-12-21 Method of finely working thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15295376A JPS5378076A (en) 1976-12-21 1976-12-21 Method of finely working thin film

Publications (1)

Publication Number Publication Date
JPS5378076A true JPS5378076A (en) 1978-07-11

Family

ID=15551760

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15295376A Pending JPS5378076A (en) 1976-12-21 1976-12-21 Method of finely working thin film

Country Status (1)

Country Link
JP (1) JPS5378076A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5413668A (en) * 1993-10-25 1995-05-09 Ford Motor Company Method for making mechanical and micro-electromechanical devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5413668A (en) * 1993-10-25 1995-05-09 Ford Motor Company Method for making mechanical and micro-electromechanical devices

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