JPS53103985A - Growing film forming method - Google Patents
Growing film forming methodInfo
- Publication number
- JPS53103985A JPS53103985A JP1843277A JP1843277A JPS53103985A JP S53103985 A JPS53103985 A JP S53103985A JP 1843277 A JP1843277 A JP 1843277A JP 1843277 A JP1843277 A JP 1843277A JP S53103985 A JPS53103985 A JP S53103985A
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- forming method
- growing film
- growing
- forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1843277A JPS53103985A (en) | 1977-02-22 | 1977-02-22 | Growing film forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1843277A JPS53103985A (en) | 1977-02-22 | 1977-02-22 | Growing film forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53103985A true JPS53103985A (en) | 1978-09-09 |
Family
ID=11971474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1843277A Pending JPS53103985A (en) | 1977-02-22 | 1977-02-22 | Growing film forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53103985A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55151328A (en) * | 1979-05-16 | 1980-11-25 | Hitachi Ltd | Method and apparatus for fabricating hydrogen-containing amorphous semiconductor film |
JPS56124229A (en) * | 1980-03-05 | 1981-09-29 | Matsushita Electric Ind Co Ltd | Manufacture of thin film |
JPS5710920A (en) * | 1980-06-23 | 1982-01-20 | Canon Inc | Film forming process |
JPS58132925A (en) * | 1982-02-02 | 1983-08-08 | Agency Of Ind Science & Technol | Manufacture of device employing pattern projection |
-
1977
- 1977-02-22 JP JP1843277A patent/JPS53103985A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55151328A (en) * | 1979-05-16 | 1980-11-25 | Hitachi Ltd | Method and apparatus for fabricating hydrogen-containing amorphous semiconductor film |
JPS6223450B2 (en) * | 1979-05-16 | 1987-05-22 | Hitachi Ltd | |
JPS56124229A (en) * | 1980-03-05 | 1981-09-29 | Matsushita Electric Ind Co Ltd | Manufacture of thin film |
JPS637020B2 (en) * | 1980-03-05 | 1988-02-15 | Matsushita Electric Ind Co Ltd | |
JPS5710920A (en) * | 1980-06-23 | 1982-01-20 | Canon Inc | Film forming process |
JPH0137861B2 (en) * | 1980-06-23 | 1989-08-09 | Canon Kk | |
JPS58132925A (en) * | 1982-02-02 | 1983-08-08 | Agency Of Ind Science & Technol | Manufacture of device employing pattern projection |
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