JPS53103985A - Growing film forming method - Google Patents

Growing film forming method

Info

Publication number
JPS53103985A
JPS53103985A JP1843277A JP1843277A JPS53103985A JP S53103985 A JPS53103985 A JP S53103985A JP 1843277 A JP1843277 A JP 1843277A JP 1843277 A JP1843277 A JP 1843277A JP S53103985 A JPS53103985 A JP S53103985A
Authority
JP
Japan
Prior art keywords
film forming
forming method
growing film
growing
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1843277A
Other languages
Japanese (ja)
Inventor
Yoshihide Endou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Priority to JP1843277A priority Critical patent/JPS53103985A/en
Publication of JPS53103985A publication Critical patent/JPS53103985A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1843277A 1977-02-22 1977-02-22 Growing film forming method Pending JPS53103985A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1843277A JPS53103985A (en) 1977-02-22 1977-02-22 Growing film forming method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1843277A JPS53103985A (en) 1977-02-22 1977-02-22 Growing film forming method

Publications (1)

Publication Number Publication Date
JPS53103985A true JPS53103985A (en) 1978-09-09

Family

ID=11971474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1843277A Pending JPS53103985A (en) 1977-02-22 1977-02-22 Growing film forming method

Country Status (1)

Country Link
JP (1) JPS53103985A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55151328A (en) * 1979-05-16 1980-11-25 Hitachi Ltd Method and apparatus for fabricating hydrogen-containing amorphous semiconductor film
JPS56124229A (en) * 1980-03-05 1981-09-29 Matsushita Electric Ind Co Ltd Manufacture of thin film
JPS5710920A (en) * 1980-06-23 1982-01-20 Canon Inc Film forming process
JPS58132925A (en) * 1982-02-02 1983-08-08 Agency Of Ind Science & Technol Manufacture of device employing pattern projection

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55151328A (en) * 1979-05-16 1980-11-25 Hitachi Ltd Method and apparatus for fabricating hydrogen-containing amorphous semiconductor film
JPS6223450B2 (en) * 1979-05-16 1987-05-22 Hitachi Ltd
JPS56124229A (en) * 1980-03-05 1981-09-29 Matsushita Electric Ind Co Ltd Manufacture of thin film
JPS637020B2 (en) * 1980-03-05 1988-02-15 Matsushita Electric Ind Co Ltd
JPS5710920A (en) * 1980-06-23 1982-01-20 Canon Inc Film forming process
JPH0137861B2 (en) * 1980-06-23 1989-08-09 Canon Kk
JPS58132925A (en) * 1982-02-02 1983-08-08 Agency Of Ind Science & Technol Manufacture of device employing pattern projection

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