FR2384033A1 - Installation de vaporisation sous vide - Google Patents

Installation de vaporisation sous vide

Info

Publication number
FR2384033A1
FR2384033A1 FR7807753A FR7807753A FR2384033A1 FR 2384033 A1 FR2384033 A1 FR 2384033A1 FR 7807753 A FR7807753 A FR 7807753A FR 7807753 A FR7807753 A FR 7807753A FR 2384033 A1 FR2384033 A1 FR 2384033A1
Authority
FR
France
Prior art keywords
vaporization
drum
vacuum
vacuum vaporization
substrates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7807753A
Other languages
English (en)
French (fr)
Other versions
FR2384033B1 (nl
Inventor
Erich Zollinger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of FR2384033A1 publication Critical patent/FR2384033A1/fr
Application granted granted Critical
Publication of FR2384033B1 publication Critical patent/FR2384033B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7807753A 1977-03-17 1978-03-17 Installation de vaporisation sous vide Granted FR2384033A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH333177A CH626654A5 (en) 1977-03-17 1977-03-17 Vacuum vapour deposition system

Publications (2)

Publication Number Publication Date
FR2384033A1 true FR2384033A1 (fr) 1978-10-13
FR2384033B1 FR2384033B1 (nl) 1982-08-06

Family

ID=4253651

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7807753A Granted FR2384033A1 (fr) 1977-03-17 1978-03-17 Installation de vaporisation sous vide

Country Status (5)

Country Link
CH (1) CH626654A5 (nl)
DE (1) DE2810811C2 (nl)
FR (1) FR2384033A1 (nl)
GB (1) GB1570052A (nl)
NL (1) NL167733C (nl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
US4664935A (en) * 1985-09-24 1987-05-12 Machine Technology, Inc. Thin film deposition apparatus and method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1068587A (fr) * 1952-12-26 1954-06-28 Appareil perfectionné pour les vaporisations de métaux ou autres produits
GB813252A (en) * 1956-06-11 1959-05-13 Standard Telephones Cables Ltd Improvements in or relating to vacuum deposition equipment
GB813251A (en) * 1956-06-11 1959-05-13 Standard Telephones Cables Ltd Improvements in or relating to vacuum deposition equipment
FR1470757A (fr) * 1965-03-05 1967-02-24 Edwards High Vacuum Int Ltd Procédé de revêtement superficiel, par dépôt vaporisé ainsi qu'objets obtenus par ledit procédé de revêtement
GB1214767A (en) * 1968-09-13 1970-12-02 Tokyo Shibaura Electric Co A vacuum deposition apparatus
US3777703A (en) * 1972-06-02 1973-12-11 Western Electric Co Apparatus for supporting and rotating a workpiece

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1082562A (en) * 1965-03-05 1967-09-06 Edwards High Vacuum Int Ltd Improvements in or relating to a method of coating both sides of a plurality of workpieces by vapour deposition

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1068587A (fr) * 1952-12-26 1954-06-28 Appareil perfectionné pour les vaporisations de métaux ou autres produits
GB813252A (en) * 1956-06-11 1959-05-13 Standard Telephones Cables Ltd Improvements in or relating to vacuum deposition equipment
GB813251A (en) * 1956-06-11 1959-05-13 Standard Telephones Cables Ltd Improvements in or relating to vacuum deposition equipment
FR1470757A (fr) * 1965-03-05 1967-02-24 Edwards High Vacuum Int Ltd Procédé de revêtement superficiel, par dépôt vaporisé ainsi qu'objets obtenus par ledit procédé de revêtement
GB1214767A (en) * 1968-09-13 1970-12-02 Tokyo Shibaura Electric Co A vacuum deposition apparatus
US3777703A (en) * 1972-06-02 1973-12-11 Western Electric Co Apparatus for supporting and rotating a workpiece

Also Published As

Publication number Publication date
DE2810811A1 (de) 1978-09-21
CH626654A5 (en) 1981-11-30
DE2810811C2 (de) 1983-02-17
FR2384033B1 (nl) 1982-08-06
NL167733C (nl) 1982-01-18
NL7706259A (nl) 1978-09-19
GB1570052A (en) 1980-06-25

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Legal Events

Date Code Title Description
ST Notification of lapse