NL7706259A - Vacuumopdampinstallatie. - Google Patents

Vacuumopdampinstallatie.

Info

Publication number
NL7706259A
NL7706259A NL7706259A NL7706259A NL7706259A NL 7706259 A NL7706259 A NL 7706259A NL 7706259 A NL7706259 A NL 7706259A NL 7706259 A NL7706259 A NL 7706259A NL 7706259 A NL7706259 A NL 7706259A
Authority
NL
Netherlands
Prior art keywords
vacuum vapor
installation
vapor installation
vacuum
vapor
Prior art date
Application number
NL7706259A
Other languages
English (en)
Other versions
NL167733C (nl
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Publication of NL7706259A publication Critical patent/NL7706259A/nl
Application granted granted Critical
Publication of NL167733C publication Critical patent/NL167733C/nl

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL7706259A 1977-03-17 1977-06-07 Vacuuemopdampinstallatie. NL167733C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH333177A CH626654A5 (en) 1977-03-17 1977-03-17 Vacuum vapour deposition system

Publications (2)

Publication Number Publication Date
NL7706259A true NL7706259A (nl) 1978-09-19
NL167733C NL167733C (nl) 1982-01-18

Family

ID=4253651

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7706259A NL167733C (nl) 1977-03-17 1977-06-07 Vacuuemopdampinstallatie.

Country Status (5)

Country Link
CH (1) CH626654A5 (nl)
DE (1) DE2810811C2 (nl)
FR (1) FR2384033A1 (nl)
GB (1) GB1570052A (nl)
NL (1) NL167733C (nl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
US4664935A (en) * 1985-09-24 1987-05-12 Machine Technology, Inc. Thin film deposition apparatus and method

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB813251A (en) * 1956-06-11 1959-05-13 Standard Telephones Cables Ltd Improvements in or relating to vacuum deposition equipment
GB813252A (en) * 1956-06-11 1959-05-13 Standard Telephones Cables Ltd Improvements in or relating to vacuum deposition equipment
FR1068587A (fr) * 1952-12-26 1954-06-28 Appareil perfectionné pour les vaporisations de métaux ou autres produits
GB1082562A (en) * 1965-03-05 1967-09-06 Edwards High Vacuum Int Ltd Improvements in or relating to a method of coating both sides of a plurality of workpieces by vapour deposition
FR1470757A (fr) * 1965-03-05 1967-02-24 Edwards High Vacuum Int Ltd Procédé de revêtement superficiel, par dépôt vaporisé ainsi qu'objets obtenus par ledit procédé de revêtement
US3598957A (en) * 1968-09-13 1971-08-10 Tokyo Shibaura Electric Co Vacuum deposition apparatus
US3777703A (en) * 1972-06-02 1973-12-11 Western Electric Co Apparatus for supporting and rotating a workpiece

Also Published As

Publication number Publication date
DE2810811A1 (de) 1978-09-21
CH626654A5 (en) 1981-11-30
DE2810811C2 (de) 1983-02-17
FR2384033B1 (nl) 1982-08-06
NL167733C (nl) 1982-01-18
FR2384033A1 (fr) 1978-10-13
GB1570052A (en) 1980-06-25

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Legal Events

Date Code Title Description
V1 Lapsed because of non-payment of the annual fee