GB813252A - Improvements in or relating to vacuum deposition equipment - Google Patents
Improvements in or relating to vacuum deposition equipmentInfo
- Publication number
- GB813252A GB813252A GB3033357A GB3033357A GB813252A GB 813252 A GB813252 A GB 813252A GB 3033357 A GB3033357 A GB 3033357A GB 3033357 A GB3033357 A GB 3033357A GB 813252 A GB813252 A GB 813252A
- Authority
- GB
- United Kingdom
- Prior art keywords
- pyrometer
- tube
- vapour
- vacuum deposition
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract 3
- 239000000969 carrier Substances 0.000 abstract 2
- 239000004020 conductor Substances 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- 239000010425 asbestos Substances 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000005485 electric heating Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 230000001105 regulatory Effects 0.000 abstract 1
- 229910052895 riebeckite Inorganic materials 0.000 abstract 1
- 238000007789 sealing Methods 0.000 abstract 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 abstract 1
- 229910052711 selenium Inorganic materials 0.000 abstract 1
- 239000011669 selenium Substances 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
- 229920003002 synthetic resin Polymers 0.000 abstract 1
- 239000000057 synthetic resin Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C1/00—Making non-ferrous alloys
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Vapour Deposition (AREA)
Abstract
813,252. Coating by vapour deposition. STANDARD TELEPHONES & CABLES, Ltd. June 11, 1956, No. 30333/57. Divided out of 813,251. Class 82(2) Vacuum deposition apparatus, in which a layer of an evaporable substance (e.g. selenium) is deposited on a surface (e.g. of steel) as a succession of coatings formed during repeated passages of the surface through the vapour of the substance, includes a rotatable carrier for passing the surface repeatedly through the vapour (e.g. as described in Specification 813,251), and a radiation pyrometer responsive to heat radiated from the surface when it is carried past the pyrometer. The temperature of the surface is automatically controlled by regulating the heat delivered by supply apparatus (e.g. electric heating elements mounted on the carrier) by means responsive to the pyrometer. The latter may measure the temperature of each surface, or the average temperature of a number of surfaces, and may be used in conjunction with a proportional electronic controller. As shown, the pyrometer 35 is suspended by a stud 36 from a disc 34 closing the end of a relatively long tube 32 which is bolted to a mounting 33 on the vacuum deposition chamber 1 and is provided with sealing rings 40. The disc 34 carries two glass-to-metal seals 39 for electrical connections. To prevent heat from the chamber 1 being conducted to the pyrometer, the stud 36 is made of asbestos, synthetic resin, or other non-conducting material, the ends of the tube 32 may be cooled by water circulating in pipes 41, and the pyrometer may be surrounded by a tube 43 also made of non-conducting material, whilst the inside of the tube 32 may be roughened to prevent reflection.
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB813252A true GB813252A (en) | 1959-05-13 |
Family
ID=1742037
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3033357A Expired GB813252A (en) | 1956-06-11 | Improvements in or relating to vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB813252A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3603285A (en) * | 1968-11-05 | 1971-09-07 | Massachusetts Inst Technology | Vapor deposition apparatus |
| FR2384033A1 (en) * | 1977-03-17 | 1978-10-13 | Balzers Hochvakuum | VACUUM VAPORIZATION PLANT |
| DE4092221C2 (en) * | 1989-12-11 | 1994-04-21 | Hitachi Ltd | Vacuum processing equipment and processes |
-
1956
- 1956-06-11 GB GB3033357A patent/GB813252A/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3603285A (en) * | 1968-11-05 | 1971-09-07 | Massachusetts Inst Technology | Vapor deposition apparatus |
| FR2384033A1 (en) * | 1977-03-17 | 1978-10-13 | Balzers Hochvakuum | VACUUM VAPORIZATION PLANT |
| DE4092221C2 (en) * | 1989-12-11 | 1994-04-21 | Hitachi Ltd | Vacuum processing equipment and processes |
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