GB813251A - Improvements in or relating to vacuum deposition equipment - Google Patents
Improvements in or relating to vacuum deposition equipmentInfo
- Publication number
- GB813251A GB813251A GB1791856A GB1791856A GB813251A GB 813251 A GB813251 A GB 813251A GB 1791856 A GB1791856 A GB 1791856A GB 1791856 A GB1791856 A GB 1791856A GB 813251 A GB813251 A GB 813251A
- Authority
- GB
- United Kingdom
- Prior art keywords
- trough
- framework
- troughs
- substance
- sheets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001771 vacuum deposition Methods 0.000 title abstract 2
- 239000000126 substance Substances 0.000 abstract 4
- 230000037250 Clearance Effects 0.000 abstract 2
- 239000000969 carrier Substances 0.000 abstract 2
- 230000035512 clearance Effects 0.000 abstract 2
- 229910000831 Steel Inorganic materials 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 abstract 1
- 229910052711 selenium Inorganic materials 0.000 abstract 1
- 239000011669 selenium Substances 0.000 abstract 1
- 239000010959 steel Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/541—Heating or cooling of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
813,251. Coating by vapour deposition. STANDARD TELEPHONES & CABLES, Ltd. June 11, 1956, No. 17918/56. Class 82(2) Vacuum deposition apparatus in which a layer of a substance is deposited on a surface as a succession of coatings formed during repeater passages of the surface through the vapour of the substance comprises a trough for vaporizing the substance, a carrier for passing a surface repeatedly over the trough and thus through the vapour of the substance, and means for moving the trough so as to control the clearance between the trough and a surface on the carrier during a passage over the trough. As shown, sheets 17, e.g. of steel, to be coated on one surface, e.g. with selenium, are carried on frames 16 which are mounted in pairs at each side of polygonal framework 13, one frame inside, and one outside, the said framework. Framework 13 is carried on rotatable shaft 5 which extends through the length of vacuum chamber 1 and is mounted in bearing 4 in door 2. Evaporation troughs 23, 24 are fixed in chamber 1 so that trough 23 is inside, and trough 24 is outside, framework 13. The troughs are associated with cams 9, 10 so that as the shaft 5 rotates an up-and-down movement is imparted to the troughs, the clearance between said troughs and sheets 17 being thus adjusted and hence the rate of deposition controlled. Elements 15 are provided between the members of framework 13 to heat the sheets 17; the heat thus supplied may be controlled by the methods described in Specification 813.252.
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB813251A true GB813251A (en) | 1959-05-13 |
Family
ID=1733516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1791856A Expired GB813251A (en) | 1956-06-11 | Improvements in or relating to vacuum deposition equipment |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB813251A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2810811A1 (en) * | 1977-03-17 | 1978-09-21 | Balzers Hochvakuum | VACUUM EVAPORATION SYSTEM |
| EP0166256A2 (en) * | 1984-06-22 | 1986-01-02 | Westinghouse Electric Corporation | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| WO2000071774A1 (en) * | 1999-05-25 | 2000-11-30 | Unaxis Balzers Aktiengesellschaft | Vacuum treatment installation and method for producing workpieces |
| EP3358322A1 (en) * | 2017-02-07 | 2018-08-08 | United Technologies Corporation | Part temperature measurement device |
-
1956
- 1956-06-11 GB GB1791856A patent/GB813251A/en not_active Expired
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2810811A1 (en) * | 1977-03-17 | 1978-09-21 | Balzers Hochvakuum | VACUUM EVAPORATION SYSTEM |
| FR2384033A1 (en) * | 1977-03-17 | 1978-10-13 | Balzers Hochvakuum | VACUUM VAPORIZATION PLANT |
| EP0166256A2 (en) * | 1984-06-22 | 1986-01-02 | Westinghouse Electric Corporation | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| EP0166256A3 (en) * | 1984-06-22 | 1986-10-01 | Westinghouse Electric Corporation | Apparatus for coating nuclear fuel pellets with a burnable absorber |
| WO2000071774A1 (en) * | 1999-05-25 | 2000-11-30 | Unaxis Balzers Aktiengesellschaft | Vacuum treatment installation and method for producing workpieces |
| US6572738B1 (en) | 1999-05-25 | 2003-06-03 | Unaxis Balzers Aktiengesellschaft | Vacuum treatment system and process for manufacturing workpieces |
| US6783641B2 (en) | 1999-05-25 | 2004-08-31 | Unaxis Balzers Aktinegesellschaft | Vacuum treatment system and process for manufacturing workpieces |
| US7179352B2 (en) | 1999-05-25 | 2007-02-20 | Oc Oerlikon Balzers Ag | Vacuum treatment system and process for manufacturing workpieces |
| EP3358322A1 (en) * | 2017-02-07 | 2018-08-08 | United Technologies Corporation | Part temperature measurement device |
| US10643821B2 (en) | 2017-02-07 | 2020-05-05 | United Technologies Corporation | Part temperature measurement device |
| US11276556B2 (en) | 2017-02-07 | 2022-03-15 | Raytheon Technologies Corporation | Fixture for vapor deposition system |
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