JPS5938382A - Vacuum deposition device - Google Patents

Abstract

PURPOSE:To provide a titled device which prevents the deposition and solidification of the metal in a vacuum deposition chamber and improves the working efficiency of the device, by the constitution wherein a slight space is formed between a rotary cell and a cover connecting to a hood to prevent the leakage of the vapor of vapor deposition metal. CONSTITUTION:A slight clearance 13 in which a steel strip is passed is formed between a cover 12 connecting to a hood 20 and a rotary cell 9 under rotation in an arrow 28 direction in a vacuum chamber 7 to prevent the leakage of metallic vapor 23 to the inside 8 of the chamber 7 in a vacuum deposition device which depposits the vapor 23 evaporating from the molten metal 16 in a crucible 15 by evaporation on the strip 1 wrapped on the cell 9 and passed in said chamber by guiding the vapor with a hood 20 through a vapor deposition port 22. Heaters 10, 11, 19 are provided respectively to the cell 9, the cover 12 and the hood 20 to heat the vapor 23 to the reevaporation temp. or above, whereby the vapor deposition of the vapor 23 is prevented, the need for cleaning and maintaining the entire part of the chamber 7 is eliminated and the working efficiency of the device is improved.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a vacuum evaporation apparatus for depositing fully condensed steam onto a steel strip, and more particularly to the above-mentioned apparatus in which surplus metal vapor that is not deposited onto the steel strip is not generated.

Conventionally, a vacuum evaporation apparatus as shown in Fig. 1 has been known as a vacuum evaporation apparatus for vapor depositing metal vapor onto a steel strip. A heater for heating the crucible 5, 7 is a hood for guiding the evaporated metal vapor to the vapor deposition port 6, and 8 is a heater for heating the hood 7.

However, in the case of such a device, excessive metal vapor may be ejected from the vapor deposition port 6, and the metal vapor may adhere to the side of the steel strip 1 on which vapor deposition is performed, or may adhere to the inner wall of the vacuum vessel 2. There were drawbacks.

On the other hand, as a technique for depositing metal vapor onto paper or plastic substrates, a method has been proposed in which the substrate is wound around a roll that rotates at a circumferential speed that matches the moving speed of the substrate, and metal vapor is deposited on one side of the substrate. There is.

In this method, as shown in FIG. 2, on the surface of the roll 10,
An arcuate cover 11 is placed on the entry and exit sides of the substrate 1 across the vapor deposition port 6 so as to create a slight gap so as not to contact the roll 10 and the substrate 1. ．． 11. The cover 111.11° is centered around all the rolls 10 and vacuum chambers e21 and 2! Fix it to the side wall of the vacuum chamber so that it is divided into two chambers,
Substrate 1: is supplied from one vacuum chamber (low vacuum chamber) 21 and guided to the other vacuum chamber, that is, the vapor deposition chamber (high vacuum chamber) 22 while being moved around the roll 10, and after vapor deposition, the above low vacuum is again applied. This is a method of returning it to room 21. According to this method, the roll 10 and the cover 111.11.
Since the resistance increases when gas moves through the gap between the two, vapor in the high vacuum vapor deposition chamber 22 is prevented from moving into the low vacuum chamber 21, and the surface of the substrate 1 that is not subjected to vapor deposition is prevented from moving into the low vacuum chamber 21. Although it has the effect of preventing metal from adhering to the sides, the above-mentioned covers 111.11. Since the temperature is lower than that of metal vapor, cover 11. , 112 had the disadvantage that metal vapor was deposited on the side facing the roll 10, that is, on the gap side, making it unsuitable for long-term operation.

The present inventors have applied this vapor deposition technique to the strip steel vapor deposition apparatus shown in FIG. 1, eliminating such drawbacks, and have conducted repeated research to eliminate the drawbacks of the apparatus shown in FIG. Since the steel strip wound around a roll and transported moves to the driving side or the opposite side in the longitudinal direction of the roll during this traveling, the arcuate cover makes the deposition port slightly wider than the width of the steel strip. It became clear that it had to be set up as such. However, when doing this, a new problem was encountered in that excess steam adhered to the surface of the roll where the steel strip was not wound.

The present invention solves all of the above drawbacks and problems and provides a vacuum evaporation apparatus that can efficiently perform vacuum evaporation onto a steel strip.

That is, the present invention includes a rotating cell in which a steel strip is wound and passed through a high-vacuum vapor deposition chamber, a crucible for melting gold F4T, and a vapor deposition port connected to the crucible for guiding metal vapor into the rotating cell. A hood facing the cell, and bows connected to the hood but having a slight gap on the steel strip entrance and exit sides of the vapor deposition port so as not to contact the steel strip wound around the rotating cell. In order to prevent metal vapor from being deposited on both ends of the rotating cell where the steel strip is not wrapped around the rotating cell, the surface of the rotating cell is placed under the vapor pressure of the metal vapor near the rotating cell. In addition, the surface of the hood and cover is heated to a temperature higher than the re-evaporation temperature of metal vapor in the vicinity of the hood and cover to prevent metal vapor from being deposited on the hood and cover. The present invention relates to a vacuum evaporation apparatus characterized by being provided with means for heating above a temperature.

Hereinafter, the apparatus of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 5 is a diagram showing an embodiment of the apparatus of the present invention.

In FIG. 5, 1 is a steel strip, 2 is a vacuum sealing chamber connected to a vacuum evaporation chamber 7 and has a higher pressure than the evaporation chamber 7, 5 is a vacuum sealing device, 4 and 5 are a strip steel strip 1 A guide roll for entering and exiting the roll chamber 2.
A telescopic G-V rose that connects 1 and 7 vacuum deposition chambers,
9 is a rotating cell in which the entire steel strip 1 is wound and metal vapor is deposited;
10 is a heater that heats the rotation cell; 12 is installed close to the rotation cell 9 with a slight gap 15; covers on the entrance and exit sides of the steel strip 1; 11 is a heater that heats the cover 12; 2o is a hood for guiding the evaporated metal vapor 25 to the evaporation port 22; A telescopic bellows is provided between the cover 12 and the hood 200 to freely adjust the thickness of the plate 1, a heater 19 heats the hood 20, and a vacuum 17 makes the vacuum deposition chamber 7 evacuated. A pump, 25 is an opening/closing device for opening and closing the cover 12 and adjusting the gap 15, arrows 26 and 27 indicate the direction in which the steel strip 1 comes out, and arrow 28 indicates the rotation direction of the rotation cell 9. The invention device has the following effects.

In the crucible 15, the molten metal 16 is heated to a predetermined temperature range by the heater 14, for example, when the metal 16 is Zn, the temperature is about 450℃.
Heat and dissolve at ~550°C.

The gas in the vacuum deposition chamber 7 is evacuated by the vacuum pump 17, and the interior 8 of the chamber 7 is brought to a degree of vacuum of 1 to 10-' Torr. At this time, a slight gap 15 between the rotation cell 9 and the cover 12
The inside 24 of the hood 20 is also connected to the inside 8 of the vacuum deposition chamber 7 through
The degree of vacuum is the same as that of 1 to 10-' Torr.

The gap is 15, larger than the plate thickness of steel strip 1, and steel strip 1 is a rotating cell? The cover is adjusted to the minimum size so that it does not come into contact with the cover 12 when it is wrapped around the cover 12 and moved. Furthermore, since one steel strip is passed through continuously, the gap 15 is adjusted so that the connecting portions of the steel strips 1 do not come into contact with the cover 12 even when the connecting portions pass through the cover 12 position.

Furthermore, the gap 15 also acts as a barrier to prevent the metal vapor 25 in the hood 20 from moving into the vacuum deposition chamber 7.
When the gap 15 is small, the vacuum level is 1 to 10", and the gas flow changes from a general gas flow in the atmosphere, that is, a viscous flow, to a molecular flow. In order to reduce the gap, reduce the gap 15 and
It is effective to increase the length of the gap 15 (that is, the length of the cover 12), and in particular, it becomes difficult to flow in proportion to the length. Then, the gap 15 is adjusted while also considering the contact with the steel strip 1 mentioned above.

Adjustment of this gap 15 is performed as follows. Gap 1 at opening/closing device furrow 5 of cover 12 operated hydraulically or electrically
5 is made large in advance, and when the inside 24 of the hood 20 reaches a predetermined degree of vacuum, the opening/closing device 25 is operated to create a predetermined small gap. At this time, when the interior 24 reaches a predetermined degree of vacuum, the molten metal 16 starts to evaporate,
The inside 24 is filled, but a predetermined gap 15 is created just before this.

Since the gap 15 is made to have a large gas flow resistance as described above, the metal vapor 25 does not leak from the inside 24 of the hood 20 into the internal space 8 of the vacuum deposition chamber 7, and the metal vapor 25 does not leak into the interior space 8 of the vacuum deposition chamber 7. 7 is not contaminated with excess metal vapor, and there is no need to open the vacuum evaporation chamber to the atmosphere and periodically remove metal vapor that has turned into a solid solid, as in conventional equipment, and it is possible to perform evaporation plating. Work efficiency is significantly improved.

Ma fc % In this case, food 20 vil-hi-l 1
9, cover 12 is heated with metal vapor 2 by heater 11, respectively.
5 does not bite, that is, the temperature is higher than the re-evaporation temperature of the metal vapor 25 under the vapor pressure of the metal vapor 25 near the hood 20 and the cover 12, for example, the vapor 25 is Zn.
In the case of vacuum degree 1 to 10-4 Torr as mentioned above, 2
Heat to 50-580°C. As a result, the metal vapor 25 is not deposited on the hood 20 and the cover 12, and the 7-door 2
0 and the cover 12Fi are not contaminated, and the interior 24 of the hood 20 and the gap 15 can be maintained in a clean state for a long period of time.

Furthermore, the rotation cell 9 is also kept at a temperature at which the metal vapor 25 is not deposited by the heater 10, that is, the rotation cell? A temperature equal to or higher than the re-evaporation temperature of the metal vapor 25 under the vapor pressure of the nearby metal vapor 25,
For example, in the case of Zn vapor, it is heated to 250 to 580°C to prevent the vapor 25 from being deposited on the surface of the rotating cell 9, and to maintain the surface in a clean state for a long period of time. .

In this case, the degree of vacuum in the vacuum deposition chamber 7 is set to 1 to 10 =
In other words, within this vacuum range, the steel strip 1Fi will not receive any heat from the rotating cell 9 heated to the above temperature, and therefore the steel strip 1 will not be heated once. Deposited metal vapors do not evaporate again.

For example, in the case of ZN vapor, re-evaporation is noticeable when the temperature of the steel strip 1 rises to about 540°C or higher in an atmosphere with a vacuum level of 10-'' Torr, but when the vacuum level is below 1 Torr, The heat transfer coefficient between the steel strip 1 and the rotating cell 9 is extremely low in the high vacuum atmosphere of It doesn't get heated.

The above is an explanation of the structure and operation when the metal vapor 25 is deposited only on one side of the steel strip 1. However, the parts indicated by reference numerals 10 to 20 and 22 to 25 in FIG.
By combining them, metal vapor can be deposited on both sides of the steel strip 10. In this case, both sides of the steel strip 1 -
By adjusting the heater power t of the heater 14 of the crucible 15, so-called differential thickness plating can be easily performed by changing the amount of vapor deposition on one side and the other side of the steel strip 1. .

As described in detail above, according to the apparatus of the present invention, surplus metal vapor can be prevented from leaking into the vacuum deposition chamber 7, and the hood 20 can be
, the vapor deposition plating on the steel strip 1 can be perfectly performed without adhesion to the cover 12, and unlike conventional methods, metal vapor solidified and deposited over the entire area of the vacuum evaporation tank can be removed by opening the tank. There is no need for complicated maintenance management, and the operating rate of the device can be significantly improved.

[Brief explanation of drawings]

Figure 1 is a diagram showing a conventional vacuum evaporation apparatus for depositing metal vapor onto a steel strip, Figure 2 is a diagram showing a conventional vacuum evaporation method for depositing metal vapor onto paper or plastic strips, and Figure 5 is an apparatus according to the present invention. 0 Sub-Agent 1) Meifu Agent Ryo Hagiwara - Mitsubishi Heavy Industries, Ltd. Hiroshima Shipyard, 4-6-22 Kannon Shinmachi, Nishi-ku, Hiroshima ■Applicant: Nisshin Steel Co., Ltd. 3-4-1 Marunouchi, Chiyoda-ku, Tokyo

Claims (1)

[Claims] A vacuum evaporation chamber K with a high degree of vacuum, a rotating cell through which the steel strip is passed while being wound, a crucible for melting metal, and a hood connected to the crucible for guiding metal vapor and having a evaporation port facing the rotating cell. , arcuate covers connected to the hood but having a slight gap so as not to contact the steel strip wound around the rotation cell are provided on the steel strip entrance and exit sides of the vapor deposition port. reevaporation of the metal vapor under the vapor pressure of the metal vapor in the vicinity of the rotation cell so that the metal vapor is not deposited on both ends of the rotation cell where the steel strip is not wrapped around the rotation cell. and means for heating the surfaces of the hood and cover to a temperature higher than the re-evaporation temperature under the vapor pressure of the metal vapor in the vicinity of the hood and cover so as not to deposit metal vapor on the hood and cover. A vacuum evaporation apparatus having a t% characteristic of providing