GB1428702A - System for vapour deposition of thin films - Google Patents

System for vapour deposition of thin films

Info

Publication number
GB1428702A
GB1428702A GB1767973A GB1767973A GB1428702A GB 1428702 A GB1428702 A GB 1428702A GB 1767973 A GB1767973 A GB 1767973A GB 1767973 A GB1767973 A GB 1767973A GB 1428702 A GB1428702 A GB 1428702A
Authority
GB
United Kingdom
Prior art keywords
mandrels
coating
gear
bodies
crucibles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1767973A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Xerox Corp
Original Assignee
Xerox Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Xerox Corp filed Critical Xerox Corp
Priority to GB3358775A priority Critical patent/GB1428703A/en
Publication of GB1428702A publication Critical patent/GB1428702A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1428702 Vapour deposition method and apparatus XEROX CORP 12 April 1973 [17 April 1972] 17679/73 Heading C7F A thin film is produced by vacuum-vapour deposition by positioning substrate bodies on a plurality of elongate horizontally extending support mandrels, rotating each of said mandrels about a longitudinal axis thereof and simultaneously transporting said mandrels about a horizontal axis in an annular path and vaporizing a material from an array of crucibles on to said bodies, said crucibles being within the annular path of travel of said mandrels, and extending substantially coextensively along the length thereof. As shown, foil substrates 40, 42, 44, 46 &c. are supported about mandrels 48, 54, the mandrels being rotatably driven by a gear 158 and associated gearing as shown, gear 158 being driven via pulley 176. Electric motor 138 coupled as shown rotates plate 174 independently of gear 158, so that mandrels 48, 54 rotate within bodies 90, 96, as these themselves rotate with plate 74. Coating material is vaporized from a planar array 200 of a plurality of individual crucibles 222 arranged in parallel strips and substantially coextensive with the mandrels, said array being provided near opposite ends with shorter, outrigger crucible members. The thickness of the coating is monitored and controlled; before coating substrates may be cleaned and heated by an electric discharge between an electrode (not shown) and the substrate; where the substrate is Al and the residual atmosphere O 2 or air, an interface layer is simultaneously formed. Substrates mentioned are foils of Ni, brass, Al and stainless steel, and the coating is a photo-conductor such as Se or an alloy of Se with As, Te, Tl, Sb and/or Bi.
GB1767973A 1972-04-17 1973-04-12 System for vapour deposition of thin films Expired GB1428702A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB3358775A GB1428703A (en) 1972-04-17 1973-04-12 Vapour deposition of thin films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US24437472A 1972-04-17 1972-04-17

Publications (1)

Publication Number Publication Date
GB1428702A true GB1428702A (en) 1976-03-17

Family

ID=22922463

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1767973A Expired GB1428702A (en) 1972-04-17 1973-04-12 System for vapour deposition of thin films

Country Status (4)

Country Link
JP (1) JPS5328871B2 (en)
BE (1) BE798324A (en)
GB (1) GB1428702A (en)
NL (1) NL7305323A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0043248A1 (en) * 1980-07-01 1982-01-06 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Process for the bulk production of alloys and apparatus therefor
CN107513688A (en) * 2017-09-25 2017-12-26 江门市新合盛涂料实业有限公司 A kind of vacuum coating equipment
CN108359934A (en) * 2018-03-26 2018-08-03 吉林大学 Upper flange plate for the coating machine of uniform evaporation material on column type substrate
CN111424252A (en) * 2020-04-27 2020-07-17 台州市思考特机器人科技有限公司 Vacuum coating box for pipe processing

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107287A (en) * 1975-03-18 1976-09-22 Fujikoshi Kk KOSHITSUHIMAKUKEISEISOCHI

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0043248A1 (en) * 1980-07-01 1982-01-06 The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and Process for the bulk production of alloys and apparatus therefor
CN107513688A (en) * 2017-09-25 2017-12-26 江门市新合盛涂料实业有限公司 A kind of vacuum coating equipment
CN108359934A (en) * 2018-03-26 2018-08-03 吉林大学 Upper flange plate for the coating machine of uniform evaporation material on column type substrate
CN111424252A (en) * 2020-04-27 2020-07-17 台州市思考特机器人科技有限公司 Vacuum coating box for pipe processing

Also Published As

Publication number Publication date
JPS5328871B2 (en) 1978-08-17
JPS4917380A (en) 1974-02-15
BE798324A (en) 1973-10-17
NL7305323A (en) 1973-06-25

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Legal Events

Date Code Title Description
PS Patent sealed
746 Register noted 'licences of right' (sect. 46/1977)
PE20 Patent expired after termination of 20 years

Effective date: 19930411