GB1428702A - System for vapour deposition of thin films - Google Patents
System for vapour deposition of thin filmsInfo
- Publication number
- GB1428702A GB1428702A GB1767973A GB1767973A GB1428702A GB 1428702 A GB1428702 A GB 1428702A GB 1767973 A GB1767973 A GB 1767973A GB 1767973 A GB1767973 A GB 1767973A GB 1428702 A GB1428702 A GB 1428702A
- Authority
- GB
- United Kingdom
- Prior art keywords
- mandrels
- coating
- gear
- bodies
- crucibles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
1428702 Vapour deposition method and apparatus XEROX CORP 12 April 1973 [17 April 1972] 17679/73 Heading C7F A thin film is produced by vacuum-vapour deposition by positioning substrate bodies on a plurality of elongate horizontally extending support mandrels, rotating each of said mandrels about a longitudinal axis thereof and simultaneously transporting said mandrels about a horizontal axis in an annular path and vaporizing a material from an array of crucibles on to said bodies, said crucibles being within the annular path of travel of said mandrels, and extending substantially coextensively along the length thereof. As shown, foil substrates 40, 42, 44, 46 &c. are supported about mandrels 48, 54, the mandrels being rotatably driven by a gear 158 and associated gearing as shown, gear 158 being driven via pulley 176. Electric motor 138 coupled as shown rotates plate 174 independently of gear 158, so that mandrels 48, 54 rotate within bodies 90, 96, as these themselves rotate with plate 74. Coating material is vaporized from a planar array 200 of a plurality of individual crucibles 222 arranged in parallel strips and substantially coextensive with the mandrels, said array being provided near opposite ends with shorter, outrigger crucible members. The thickness of the coating is monitored and controlled; before coating substrates may be cleaned and heated by an electric discharge between an electrode (not shown) and the substrate; where the substrate is Al and the residual atmosphere O 2 or air, an interface layer is simultaneously formed. Substrates mentioned are foils of Ni, brass, Al and stainless steel, and the coating is a photo-conductor such as Se or an alloy of Se with As, Te, Tl, Sb and/or Bi.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB3358775A GB1428703A (en) | 1972-04-17 | 1973-04-12 | Vapour deposition of thin films |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US24437472A | 1972-04-17 | 1972-04-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1428702A true GB1428702A (en) | 1976-03-17 |
Family
ID=22922463
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1767973A Expired GB1428702A (en) | 1972-04-17 | 1973-04-12 | System for vapour deposition of thin films |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5328871B2 (en) |
BE (1) | BE798324A (en) |
GB (1) | GB1428702A (en) |
NL (1) | NL7305323A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0043248A1 (en) * | 1980-07-01 | 1982-01-06 | The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and | Process for the bulk production of alloys and apparatus therefor |
CN107513688A (en) * | 2017-09-25 | 2017-12-26 | 江门市新合盛涂料实业有限公司 | A kind of vacuum coating equipment |
CN108359934A (en) * | 2018-03-26 | 2018-08-03 | 吉林大学 | Upper flange plate for the coating machine of uniform evaporation material on column type substrate |
CN111424252A (en) * | 2020-04-27 | 2020-07-17 | 台州市思考特机器人科技有限公司 | Vacuum coating box for pipe processing |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51107287A (en) * | 1975-03-18 | 1976-09-22 | Fujikoshi Kk | KOSHITSUHIMAKUKEISEISOCHI |
-
1973
- 1973-04-12 GB GB1767973A patent/GB1428702A/en not_active Expired
- 1973-04-16 NL NL7305323A patent/NL7305323A/xx not_active Application Discontinuation
- 1973-04-16 JP JP4301873A patent/JPS5328871B2/ja not_active Expired
- 1973-04-17 BE BE130102A patent/BE798324A/en not_active IP Right Cessation
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0043248A1 (en) * | 1980-07-01 | 1982-01-06 | The Secretary of State for Defence in Her Britannic Majesty's Government of the United Kingdom of Great Britain and | Process for the bulk production of alloys and apparatus therefor |
CN107513688A (en) * | 2017-09-25 | 2017-12-26 | 江门市新合盛涂料实业有限公司 | A kind of vacuum coating equipment |
CN108359934A (en) * | 2018-03-26 | 2018-08-03 | 吉林大学 | Upper flange plate for the coating machine of uniform evaporation material on column type substrate |
CN111424252A (en) * | 2020-04-27 | 2020-07-17 | 台州市思考特机器人科技有限公司 | Vacuum coating box for pipe processing |
Also Published As
Publication number | Publication date |
---|---|
JPS5328871B2 (en) | 1978-08-17 |
NL7305323A (en) | 1973-06-25 |
BE798324A (en) | 1973-10-17 |
JPS4917380A (en) | 1974-02-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
746 | Register noted 'licences of right' (sect. 46/1977) | ||
PE20 | Patent expired after termination of 20 years |
Effective date: 19930411 |