JPS5395884A - Evaporating method and apparatus - Google Patents
Evaporating method and apparatusInfo
- Publication number
- JPS5395884A JPS5395884A JP1042277A JP1042277A JPS5395884A JP S5395884 A JPS5395884 A JP S5395884A JP 1042277 A JP1042277 A JP 1042277A JP 1042277 A JP1042277 A JP 1042277A JP S5395884 A JPS5395884 A JP S5395884A
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- coated
- evaporating
- coating
- deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/548—Controlling the composition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To produce evaporated coating of constant thickness and constant-composition in the formation of coating through evaporation of plural component elements from a evaporating vessel by use of two monitors which observed deposition on material to be coated by evaporation and the evaporation of evaporating source respectively to control deposition on the material to be coated.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1042277A JPS5395884A (en) | 1977-02-01 | 1977-02-01 | Evaporating method and apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1042277A JPS5395884A (en) | 1977-02-01 | 1977-02-01 | Evaporating method and apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5395884A true JPS5395884A (en) | 1978-08-22 |
Family
ID=11749703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1042277A Pending JPS5395884A (en) | 1977-02-01 | 1977-02-01 | Evaporating method and apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5395884A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0152577A2 (en) * | 1984-02-16 | 1985-08-28 | Siemens Aktiengesellschaft | Process for the control and the regulation of the composition of layers of metallic conducting alloys during their production |
US7222516B2 (en) | 2003-05-29 | 2007-05-29 | Ngk Spark Plug Co., Ltd. | Gas sensor, gas sensor cap, and gas sensor unit |
US7234341B2 (en) | 2003-07-17 | 2007-06-26 | Ngk Spark Plug Co., Ltd. | Gas sensor and method of manufacturing the gas sensor |
US7287413B2 (en) | 2004-11-15 | 2007-10-30 | Ngk Spark Plug Co., Ltd. | Gas sensor unit and sensor cap |
-
1977
- 1977-02-01 JP JP1042277A patent/JPS5395884A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0152577A2 (en) * | 1984-02-16 | 1985-08-28 | Siemens Aktiengesellschaft | Process for the control and the regulation of the composition of layers of metallic conducting alloys during their production |
US7222516B2 (en) | 2003-05-29 | 2007-05-29 | Ngk Spark Plug Co., Ltd. | Gas sensor, gas sensor cap, and gas sensor unit |
US7234341B2 (en) | 2003-07-17 | 2007-06-26 | Ngk Spark Plug Co., Ltd. | Gas sensor and method of manufacturing the gas sensor |
US7398673B2 (en) | 2003-07-17 | 2008-07-15 | Ngk Spark Plug Co., Ltd. | Gas sensor and method of manufacturing the gas sensor |
US7506534B2 (en) | 2003-07-17 | 2009-03-24 | Ngk Spark Plug Co., Ltd. | Gas sensor and method of manufacturing the gas sensor |
US7287413B2 (en) | 2004-11-15 | 2007-10-30 | Ngk Spark Plug Co., Ltd. | Gas sensor unit and sensor cap |
US7318339B2 (en) | 2004-11-15 | 2008-01-15 | Ngk Spark Plug Co., Ltd. | Gas sensor unit and sensor cap |
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