JPS52152881A - Controller of film thickness in equipment for forming coated film - Google Patents

Controller of film thickness in equipment for forming coated film

Info

Publication number
JPS52152881A
JPS52152881A JP6931076A JP6931076A JPS52152881A JP S52152881 A JPS52152881 A JP S52152881A JP 6931076 A JP6931076 A JP 6931076A JP 6931076 A JP6931076 A JP 6931076A JP S52152881 A JPS52152881 A JP S52152881A
Authority
JP
Japan
Prior art keywords
film
controller
equipment
forming coated
film thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6931076A
Other languages
Japanese (ja)
Inventor
Akihiko Toku
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP6931076A priority Critical patent/JPS52152881A/en
Publication of JPS52152881A publication Critical patent/JPS52152881A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C23C14/044—Coating on selected surface areas, e.g. using masks using masks using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To carry out remarkably simple and surely the control of film thicness, particularly the control to the direction of width which has been regarded as difficult formerly and to make possible to obtain the thickness being uniform to the direction of width, by establishing the slit in the mask to be interposed between the substrate and the vapor generating source at the underside of the substrate to an appropriate shape in advance.
JP6931076A 1976-06-15 1976-06-15 Controller of film thickness in equipment for forming coated film Pending JPS52152881A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6931076A JPS52152881A (en) 1976-06-15 1976-06-15 Controller of film thickness in equipment for forming coated film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6931076A JPS52152881A (en) 1976-06-15 1976-06-15 Controller of film thickness in equipment for forming coated film

Publications (1)

Publication Number Publication Date
JPS52152881A true JPS52152881A (en) 1977-12-19

Family

ID=13398848

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6931076A Pending JPS52152881A (en) 1976-06-15 1976-06-15 Controller of film thickness in equipment for forming coated film

Country Status (1)

Country Link
JP (1) JPS52152881A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103267U (en) * 1978-12-27 1980-07-18
FR2581793A1 (en) * 1985-05-07 1986-11-14 Duruy Nicolas Method and device for manufacturing electronic or optoelectronic components with vacuum evaporation deposition.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55103267U (en) * 1978-12-27 1980-07-18
FR2581793A1 (en) * 1985-05-07 1986-11-14 Duruy Nicolas Method and device for manufacturing electronic or optoelectronic components with vacuum evaporation deposition.

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