JPS5384469A - Electrode formation method - Google Patents

Electrode formation method

Info

Publication number
JPS5384469A
JPS5384469A JP16026576A JP16026576A JPS5384469A JP S5384469 A JPS5384469 A JP S5384469A JP 16026576 A JP16026576 A JP 16026576A JP 16026576 A JP16026576 A JP 16026576A JP S5384469 A JPS5384469 A JP S5384469A
Authority
JP
Japan
Prior art keywords
electrode formation
formation method
gaas
insulator
turns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16026576A
Other languages
Japanese (ja)
Inventor
Yasuo Baba
Kazuo Nanbu
Teruo Sakurai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16026576A priority Critical patent/JPS5384469A/en
Publication of JPS5384469A publication Critical patent/JPS5384469A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To ensure an electrode formation by maintaining the initial electrode position determined by a sheet of the mask even at the succeeding processes, by utilizing the nature of GaAs, etc. in that it turns into an insulator through the proton irradiation.
COPYRIGHT: (C)1978,JPO&Japio
JP16026576A 1976-12-29 1976-12-29 Electrode formation method Pending JPS5384469A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16026576A JPS5384469A (en) 1976-12-29 1976-12-29 Electrode formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16026576A JPS5384469A (en) 1976-12-29 1976-12-29 Electrode formation method

Publications (1)

Publication Number Publication Date
JPS5384469A true JPS5384469A (en) 1978-07-25

Family

ID=15711254

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16026576A Pending JPS5384469A (en) 1976-12-29 1976-12-29 Electrode formation method

Country Status (1)

Country Link
JP (1) JPS5384469A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63271974A (en) * 1987-04-28 1988-11-09 Matsushita Electric Ind Co Ltd Manufacture of field-effect transistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63271974A (en) * 1987-04-28 1988-11-09 Matsushita Electric Ind Co Ltd Manufacture of field-effect transistor

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