JPS5384469A - Electrode formation method - Google Patents
Electrode formation methodInfo
- Publication number
- JPS5384469A JPS5384469A JP16026576A JP16026576A JPS5384469A JP S5384469 A JPS5384469 A JP S5384469A JP 16026576 A JP16026576 A JP 16026576A JP 16026576 A JP16026576 A JP 16026576A JP S5384469 A JPS5384469 A JP S5384469A
- Authority
- JP
- Japan
- Prior art keywords
- electrode formation
- formation method
- gaas
- insulator
- turns
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To ensure an electrode formation by maintaining the initial electrode position determined by a sheet of the mask even at the succeeding processes, by utilizing the nature of GaAs, etc. in that it turns into an insulator through the proton irradiation.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16026576A JPS5384469A (en) | 1976-12-29 | 1976-12-29 | Electrode formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16026576A JPS5384469A (en) | 1976-12-29 | 1976-12-29 | Electrode formation method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5384469A true JPS5384469A (en) | 1978-07-25 |
Family
ID=15711254
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16026576A Pending JPS5384469A (en) | 1976-12-29 | 1976-12-29 | Electrode formation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5384469A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63271974A (en) * | 1987-04-28 | 1988-11-09 | Matsushita Electric Ind Co Ltd | Manufacture of field-effect transistor |
-
1976
- 1976-12-29 JP JP16026576A patent/JPS5384469A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63271974A (en) * | 1987-04-28 | 1988-11-09 | Matsushita Electric Ind Co Ltd | Manufacture of field-effect transistor |
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