FR2365824A1 - Procede pour realiser l'ajustement de masque d'exposition par rapport a une pastille de substrat - Google Patents

Procede pour realiser l'ajustement de masque d'exposition par rapport a une pastille de substrat

Info

Publication number
FR2365824A1
FR2365824A1 FR7726943A FR7726943A FR2365824A1 FR 2365824 A1 FR2365824 A1 FR 2365824A1 FR 7726943 A FR7726943 A FR 7726943A FR 7726943 A FR7726943 A FR 7726943A FR 2365824 A1 FR2365824 A1 FR 2365824A1
Authority
FR
France
Prior art keywords
adjustment
marks
substrate
achieving
relation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7726943A
Other languages
English (en)
Other versions
FR2365824B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of FR2365824A1 publication Critical patent/FR2365824A1/fr
Application granted granted Critical
Publication of FR2365824B1 publication Critical patent/FR2365824B1/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Projection-Type Copiers In General (AREA)

Abstract

L'invention concerne un procédé pour réaliser l'ajustement de masques d'exposition par rapport à une pastille de substrat Selon ce procédé on réalise sur un substrat des structures d'ajustement 110 comportant deux rangées 111, 112 de marques d'ajustement 101 à 108, et sur lesquelles on forme en recouvrement coïncidant l'image de structures d'ajustement correspondantes de masques successifs de photolithographie, la disposition spatiale des marques d'ajustement du substrat et des masques successifs étant telle qu'a chaque couple de marques d'ajustement du substrat correspond de façon précise un couple de marques correspondantes d'ajustement des masques. Application notamment à la fabrication de composants à semi-conducteurs et de circuits intégrés.
FR7726943A 1976-09-22 1977-09-06 Procede pour realiser l'ajustement de masque d'exposition par rapport a une pastille de substrat Granted FR2365824A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19762642634 DE2642634A1 (de) 1976-09-22 1976-09-22 Verfahren zum justieren von belichtungsmasken relativ zu einer substratscheibe

Publications (2)

Publication Number Publication Date
FR2365824A1 true FR2365824A1 (fr) 1978-04-21
FR2365824B1 FR2365824B1 (fr) 1981-05-08

Family

ID=5988556

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7726943A Granted FR2365824A1 (fr) 1976-09-22 1977-09-06 Procede pour realiser l'ajustement de masque d'exposition par rapport a une pastille de substrat

Country Status (8)

Country Link
US (1) US4118230A (fr)
JP (1) JPS5341984A (fr)
BE (1) BE858958A (fr)
DE (1) DE2642634A1 (fr)
FR (1) FR2365824A1 (fr)
GB (1) GB1551631A (fr)
IT (1) IT1086953B (fr)
NL (1) NL7710358A (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2066487B (en) * 1979-12-18 1983-11-23 Philips Electronic Associated Alignment of exposure masks
JPS5764921A (en) * 1980-10-08 1982-04-20 Toshiba Corp Manufacture of gaas integrated circuit
US4343878A (en) * 1981-01-02 1982-08-10 Amdahl Corporation System for providing photomask alignment keys in semiconductor integrated circuit processing
US4883359A (en) * 1984-02-28 1989-11-28 Canon Kabushiki Kaisha Alignment method and pattern forming method using the same
DE3910048A1 (de) * 1989-03-28 1990-08-30 Heidelberg Instr Gmbh Laser Un Verfahren zur herstellung oder inspektion von mikrostrukturen auf grossflaechigen substraten
JP3163666B2 (ja) * 1991-07-29 2001-05-08 ソニー株式会社 位相シフトマスクを用いたパターン形成方法
US5316984A (en) * 1993-03-25 1994-05-31 Vlsi Technology, Inc. Bright field wafer target
US6576529B1 (en) * 1999-12-07 2003-06-10 Agere Systems Inc. Method of forming an alignment feature in or on a multilayered semiconductor structure

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3690881A (en) * 1970-09-28 1972-09-12 Bell Telephone Labor Inc Moire pattern aligning of photolithographic mask

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477848A (en) * 1964-12-14 1969-11-11 Texas Instruments Inc Method for producing sets of photomask having accurate registration
US3607267A (en) * 1967-10-09 1971-09-21 Motorola Inc Precision alignment of photographic masks
US3506442A (en) * 1968-09-27 1970-04-14 Bell Telephone Labor Inc Photomask modification and registration test methods
US3963489A (en) * 1975-04-30 1976-06-15 Western Electric Company, Inc. Method of precisely aligning pattern-defining masks
US4060643A (en) * 1976-02-02 1977-11-29 Blanks William L Method and apparatus for identifying color separation film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3690881A (en) * 1970-09-28 1972-09-12 Bell Telephone Labor Inc Moire pattern aligning of photolithographic mask

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
EXBK/70 *

Also Published As

Publication number Publication date
NL7710358A (nl) 1978-03-28
US4118230A (en) 1978-10-03
GB1551631A (en) 1979-08-30
IT1086953B (it) 1985-05-31
JPS5341984A (en) 1978-04-15
BE858958A (fr) 1978-01-16
FR2365824B1 (fr) 1981-05-08
DE2642634A1 (de) 1978-03-23

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