FI20002173A0 - Mikromekaaninen rakenne - Google Patents

Mikromekaaninen rakenne

Info

Publication number
FI20002173A0
FI20002173A0 FI20002173A FI20002173A FI20002173A0 FI 20002173 A0 FI20002173 A0 FI 20002173A0 FI 20002173 A FI20002173 A FI 20002173A FI 20002173 A FI20002173 A FI 20002173A FI 20002173 A0 FI20002173 A0 FI 20002173A0
Authority
FI
Finland
Prior art keywords
movable element
coupling
movable
relates
structures
Prior art date
Application number
FI20002173A
Other languages
English (en)
Swedish (sv)
Other versions
FI20002173A (fi
FI111457B (fi
Inventor
Vladimir Ermolov
Samuli Silanto
Heikki Nieminen
Tapani Ryhaenen
Original Assignee
Nokia Mobile Phones Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Mobile Phones Ltd filed Critical Nokia Mobile Phones Ltd
Priority to FI20002173A priority Critical patent/FI111457B/fi
Publication of FI20002173A0 publication Critical patent/FI20002173A0/fi
Priority to US09/967,429 priority patent/US6557413B2/en
Priority to CNB011410396A priority patent/CN1208235C/zh
Priority to EP06126021A priority patent/EP1760035A3/en
Priority to EP01660182A priority patent/EP1193215A3/en
Priority to EP07117371A priority patent/EP1864945A3/en
Publication of FI20002173A publication Critical patent/FI20002173A/fi
Application granted granted Critical
Publication of FI111457B publication Critical patent/FI111457B/fi

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0307—Anchors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
FI20002173A 2000-10-02 2000-10-02 Mikromekaaninen rakenne FI111457B (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20002173A FI111457B (fi) 2000-10-02 2000-10-02 Mikromekaaninen rakenne
US09/967,429 US6557413B2 (en) 2000-10-02 2001-09-28 Micromechanical structure
CNB011410396A CN1208235C (zh) 2000-10-02 2001-09-29 微型机械结构
EP06126021A EP1760035A3 (en) 2000-10-02 2001-10-02 Micromechanical structure
EP01660182A EP1193215A3 (en) 2000-10-02 2001-10-02 Micromechanical structure
EP07117371A EP1864945A3 (en) 2000-10-02 2001-10-02 Michromechanical structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20002173A FI111457B (fi) 2000-10-02 2000-10-02 Mikromekaaninen rakenne
FI20002173 2000-10-02

Publications (3)

Publication Number Publication Date
FI20002173A0 true FI20002173A0 (fi) 2000-10-02
FI20002173A FI20002173A (fi) 2002-04-03
FI111457B FI111457B (fi) 2003-07-31

Family

ID=8559214

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20002173A FI111457B (fi) 2000-10-02 2000-10-02 Mikromekaaninen rakenne

Country Status (4)

Country Link
US (1) US6557413B2 (fi)
EP (3) EP1193215A3 (fi)
CN (1) CN1208235C (fi)
FI (1) FI111457B (fi)

Families Citing this family (82)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19959707A1 (de) * 1999-12-10 2001-06-13 Bosch Gmbh Robert Mikromechanische Struktur, insbesondere für einen Beschleunigungssensor
US6598475B2 (en) 2001-09-20 2003-07-29 Honeywell International Inc. Micromechanical inertial sensor having increased pickoff resonance damping
US7709285B2 (en) * 2003-10-31 2010-05-04 Epcos Ag Method of manufacturing a MEMS device and MEMS device
US6995622B2 (en) * 2004-01-09 2006-02-07 Robert Bosh Gmbh Frequency and/or phase compensated microelectromechanical oscillator
CN100434962C (zh) * 2004-03-24 2008-11-19 德克萨斯仪器股份有限公司 具有中心脊部和周界棘状突起以减少挠曲的扭转铰接镜组件
US7365405B2 (en) * 2004-04-27 2008-04-29 Potochnik Stephen J Metrology structure and methods
EP1807855B1 (en) * 2004-10-27 2015-09-09 Epcos Ag Electronic device
JP2006220453A (ja) * 2005-02-08 2006-08-24 Denso Corp 加速度センサ装置
KR20080023313A (ko) * 2005-06-30 2008-03-13 코닌클리케 필립스 일렉트로닉스 엔.브이. Ｍｅｍｓ 구성요소 제조 방법
WO2007014022A1 (en) * 2005-07-22 2007-02-01 Qualcomm Incorporated Mems devices having support structures and methods of fabricating the same
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
GB0605576D0 (en) * 2006-03-20 2006-04-26 Oligon Ltd MEMS device
GB0718706D0 (en) 2007-09-25 2007-11-07 Creative Physics Ltd Method and apparatus for reducing laser speckle
JP5084841B2 (ja) * 2006-12-12 2012-11-28 エヌエックスピー ビー ヴィ 被制御の電極オフ状態位置を有するｍｅｍｓデバイス
US7571650B2 (en) * 2007-07-30 2009-08-11 Hewlett-Packard Development Company, L.P. Piezo resistive pressure sensor
DE102007041125B3 (de) * 2007-08-30 2009-02-26 Qimonda Ag Sensor, Verfahren zum Erfassen, Messvorrichtung, Verfahren zum Messen, Filterkomponente, Verfahren zum Anpassen eines Transferverhaltens einer Filterkomponente, Betätigungssystem und Verfahren zum Steuern eines Betätigungsglieds unter Verwendung eines Sensors
US7782066B2 (en) 2007-08-30 2010-08-24 Qimonda Ag Sensor, method for sensing, measuring device, method for measuring, filter component, method for adapting a transfer behavior of a filter component, actuator system and method for controlling an actuator using a sensor
WO2009092605A1 (en) * 2008-01-25 2009-07-30 University College Cork, National University Of Ireland, Cork Microelectromechanical system tunable capacitor
EP2083431A1 (en) * 2008-01-25 2009-07-29 University College Cork-National University of Ireland, Cork Microelectromechanical system tunable capacitor
US8024279B2 (en) * 2008-06-30 2011-09-20 Nokia Corporation Resonator
US11726332B2 (en) 2009-04-27 2023-08-15 Digilens Inc. Diffractive projection apparatus
US9335604B2 (en) 2013-12-11 2016-05-10 Milan Momcilo Popovich Holographic waveguide display
US11320571B2 (en) 2012-11-16 2022-05-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view with uniform light extraction
US11300795B1 (en) 2009-09-30 2022-04-12 Digilens Inc. Systems for and methods of using fold gratings coordinated with output couplers for dual axis expansion
US10795160B1 (en) 2014-09-25 2020-10-06 Rockwell Collins, Inc. Systems for and methods of using fold gratings for dual axis expansion
US8233204B1 (en) 2009-09-30 2012-07-31 Rockwell Collins, Inc. Optical displays
IT1397115B1 (it) * 2009-11-27 2012-12-28 St Microelectronics Rousset Struttura risonante microelettromeccanica con migliorate caratteristiche elettriche.
US8659826B1 (en) 2010-02-04 2014-02-25 Rockwell Collins, Inc. Worn display system and method without requiring real time tracking for boresight precision
CN101920926B (zh) * 2010-09-30 2012-11-28 无锡中微高科电子有限公司 一种不匹配封接应力释放结构
WO2012136970A1 (en) 2011-04-07 2012-10-11 Milan Momcilo Popovich Laser despeckler based on angular diversity
EP2995986B1 (en) 2011-08-24 2017-04-12 Rockwell Collins, Inc. Data display
WO2016020630A2 (en) 2014-08-08 2016-02-11 Milan Momcilo Popovich Waveguide laser illuminator incorporating a despeckler
US10670876B2 (en) 2011-08-24 2020-06-02 Digilens Inc. Waveguide laser illuminator incorporating a despeckler
US9366864B1 (en) 2011-09-30 2016-06-14 Rockwell Collins, Inc. System for and method of displaying information without need for a combiner alignment detector
US9507150B1 (en) 2011-09-30 2016-11-29 Rockwell Collins, Inc. Head up display (HUD) using a bent waveguide assembly
US9715067B1 (en) 2011-09-30 2017-07-25 Rockwell Collins, Inc. Ultra-compact HUD utilizing waveguide pupil expander with surface relief gratings in high refractive index materials
US8634139B1 (en) 2011-09-30 2014-01-21 Rockwell Collins, Inc. System for and method of catadioptric collimation in a compact head up display (HUD)
WO2013102759A2 (en) 2012-01-06 2013-07-11 Milan Momcilo Popovich Contact image sensor using switchable bragg gratings
CN102608149B (zh) * 2012-01-10 2014-06-11 东南大学 多晶硅热膨胀系数在线测试结构
US9523852B1 (en) 2012-03-28 2016-12-20 Rockwell Collins, Inc. Micro collimator system and method for a head up display (HUD)
CN106125308B (zh) 2012-04-25 2019-10-25 罗克韦尔柯林斯公司 用于显示图像的装置和方法
US9933684B2 (en) 2012-11-16 2018-04-03 Rockwell Collins, Inc. Transparent waveguide display providing upper and lower fields of view having a specific light output aperture configuration
TWI472002B (zh) * 2013-01-09 2015-02-01 微機電裝置
US9674413B1 (en) 2013-04-17 2017-06-06 Rockwell Collins, Inc. Vision system and method having improved performance and solar mitigation
WO2015015138A1 (en) 2013-07-31 2015-02-05 Milan Momcilo Popovich Method and apparatus for contact image sensing
US9244281B1 (en) 2013-09-26 2016-01-26 Rockwell Collins, Inc. Display system and method using a detached combiner
US10732407B1 (en) 2014-01-10 2020-08-04 Rockwell Collins, Inc. Near eye head up display system and method with fixed combiner
US9519089B1 (en) 2014-01-30 2016-12-13 Rockwell Collins, Inc. High performance volume phase gratings
US9244280B1 (en) 2014-03-25 2016-01-26 Rockwell Collins, Inc. Near eye display system and method for display enhancement or redundancy
WO2016020632A1 (en) 2014-08-08 2016-02-11 Milan Momcilo Popovich Method for holographic mastering and replication
US10241330B2 (en) 2014-09-19 2019-03-26 Digilens, Inc. Method and apparatus for generating input images for holographic waveguide displays
US9715110B1 (en) 2014-09-25 2017-07-25 Rockwell Collins, Inc. Automotive head up display (HUD)
US10088675B1 (en) 2015-05-18 2018-10-02 Rockwell Collins, Inc. Turning light pipe for a pupil expansion system and method
EP3245444B1 (en) 2015-01-12 2021-09-08 DigiLens Inc. Environmentally isolated waveguide display
US9632226B2 (en) 2015-02-12 2017-04-25 Digilens Inc. Waveguide grating device
US10247943B1 (en) 2015-05-18 2019-04-02 Rockwell Collins, Inc. Head up display (HUD) using a light pipe
US11366316B2 (en) 2015-05-18 2022-06-21 Rockwell Collins, Inc. Head up display (HUD) using a light pipe
JP6544037B2 (ja) * 2015-05-18 2019-07-17 株式会社リコー 発電素子ユニット、及び発電装置
US10126552B2 (en) 2015-05-18 2018-11-13 Rockwell Collins, Inc. Micro collimator system and method for a head up display (HUD)
US10108010B2 (en) 2015-06-29 2018-10-23 Rockwell Collins, Inc. System for and method of integrating head up displays and head down displays
EP3359999A1 (en) 2015-10-05 2018-08-15 Popovich, Milan Momcilo Waveguide display
TWI610879B (zh) * 2015-10-16 2018-01-11 碩英股份有限公司 具有防止訊號衰減功能之微機電裝置及其製造方法與防止訊號衰減的方法
US10598932B1 (en) 2016-01-06 2020-03-24 Rockwell Collins, Inc. Head up display for integrating views of conformally mapped symbols and a fixed image source
WO2017162999A1 (en) 2016-03-24 2017-09-28 Popovich Milan Momcilo Method and apparatus for providing a polarization selective holographic waveguide device
WO2017178781A1 (en) 2016-04-11 2017-10-19 GRANT, Alastair, John Holographic waveguide apparatus for structured light projection
WO2018102834A2 (en) 2016-12-02 2018-06-07 Digilens, Inc. Waveguide device with uniform output illumination
US10545346B2 (en) 2017-01-05 2020-01-28 Digilens Inc. Wearable heads up displays
US10295824B2 (en) 2017-01-26 2019-05-21 Rockwell Collins, Inc. Head up display with an angled light pipe
US10942430B2 (en) 2017-10-16 2021-03-09 Digilens Inc. Systems and methods for multiplying the image resolution of a pixelated display
CN115356905A (zh) 2018-01-08 2022-11-18 迪吉伦斯公司 波导单元格中全息光栅高吞吐量记录的系统和方法
US10914950B2 (en) 2018-01-08 2021-02-09 Digilens Inc. Waveguide architectures and related methods of manufacturing
WO2020023779A1 (en) 2018-07-25 2020-01-30 Digilens Inc. Systems and methods for fabricating a multilayer optical structure
CN109540973B (zh) * 2018-12-03 2021-01-19 中国电子科技集团公司第五十五研究所 一种电镀金属膜在线检测结构和检测方法
CN113226975B (zh) * 2018-12-17 2024-04-12 索克普拉科学与工程公司 神经形态微机电系统设备
EP3924759A4 (en) 2019-02-15 2022-12-28 Digilens Inc. METHODS AND APPARATUS FOR MAKING A HOLOGRAPHIC WAVEGUIDE DISPLAY WITH INTEGRATED GRIDINGS
JP2022525165A (ja) 2019-03-12 2022-05-11 ディジレンズ インコーポレイテッド ホログラフィック導波管バックライトおよび関連する製造方法
US20200386947A1 (en) 2019-06-07 2020-12-10 Digilens Inc. Waveguides Incorporating Transmissive and Reflective Gratings and Related Methods of Manufacturing
US11681143B2 (en) 2019-07-29 2023-06-20 Digilens Inc. Methods and apparatus for multiplying the image resolution and field-of-view of a pixelated display
EP4022370A4 (en) 2019-08-29 2023-08-30 Digilens Inc. VACUUM BRAGG GRATINGS AND METHODS OF MANUFACTURING
DE102020213772A1 (de) 2020-11-03 2022-05-05 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauelement
CN112645280A (zh) * 2020-12-30 2021-04-13 深圳清华大学研究院 一种射频开关的加工工艺
CN113917186B (zh) * 2021-10-25 2023-09-05 南京林业大学 一种加速度传感器

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4234237C2 (de) 1992-10-10 2000-11-30 Bosch Gmbh Robert Temperaturkompensierter Mikroaktor
FR2697536B1 (fr) * 1992-11-04 1995-01-06 Suisse Electronique Microtech Procédé de fabrication d'un élément de microstructure mécanique.
FR2700065B1 (fr) * 1992-12-28 1995-02-10 Commissariat Energie Atomique Procédé de fabrication d'accéléromètres utilisant la technologie silicium sur isolant.
US5650568A (en) * 1993-02-10 1997-07-22 The Charles Stark Draper Laboratory, Inc. Gimballed vibrating wheel gyroscope having strain relief features
US5594170A (en) * 1994-06-15 1997-01-14 Alliedsignal Inc. Kip cancellation in a pendulous silicon accelerometer
FR2736654B1 (fr) * 1995-07-13 1997-08-22 Commissariat Energie Atomique Procede de fabrication d'elements de microstructures flottants rigides et dispositif equipe de tels elements
US6073484A (en) * 1995-07-20 2000-06-13 Cornell Research Foundation, Inc. Microfabricated torsional cantilevers for sensitive force detection
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers
DE19537814B4 (de) 1995-10-11 2009-11-19 Robert Bosch Gmbh Sensor und Verfahren zur Herstellung eines Sensors
DE19757197A1 (de) * 1997-12-22 1999-06-24 Bosch Gmbh Robert Herstellungsverfahren für mikromechanische Vorrichtung
US6100477A (en) * 1998-07-17 2000-08-08 Texas Instruments Incorporated Recessed etch RF micro-electro-mechanical switch
US6242989B1 (en) 1998-09-12 2001-06-05 Agere Systems Guardian Corp. Article comprising a multi-port variable capacitor
US6236139B1 (en) 1999-02-26 2001-05-22 Jds Uniphase Inc. Temperature compensated microelectromechanical structures and related methods

Also Published As

Publication number Publication date
EP1193215A2 (en) 2002-04-03
US6557413B2 (en) 2003-05-06
CN1208235C (zh) 2005-06-29
FI20002173A (fi) 2002-04-03
FI111457B (fi) 2003-07-31
CN1344670A (zh) 2002-04-17
EP1760035A3 (en) 2007-07-18
US20020108442A1 (en) 2002-08-15
EP1864945A3 (en) 2008-05-28
EP1864945A2 (en) 2007-12-12
EP1760035A2 (en) 2007-03-07
EP1193215A3 (en) 2004-07-21

Similar Documents

Publication Publication Date Title
FI20002173A (fi) Mikromekaaninen rakenne
WO2002103365A3 (en) Mems sensor with single central anchor and motion-limiting connection geometry
WO2003052511A3 (de) Abbildungseinrichtung in einer projektionsbelichtungsanlage
WO2003014009A3 (en) A microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in mems
WO2001081976A3 (en) Apparatus, system, and method for active compensation of aberrations in an optical system
DK1158185T3 (da) Hurtigfastgörelseselement
EP1120677A3 (en) MEMS optical cross-connect switch
EP1041707A3 (en) Optical cross-connect switch using electrostatic surface actuators
DE69811563D1 (de) Mikromechanischer optischer Schalter
EP1130446A3 (en) Actuators including serpentine arrangements of alternating actuating and opposing segments and related methods
IL155384A0 (en) Gimbaled micro-mirror positionable by thermal actuators
EP1089109A3 (en) Mems variable optical attenuator
ATE270440T1 (de) Faseroptische schalteranordnung
MY135407A (en) Buckling beam bi-stable microelectromechanical switch using electro-thermal actuation
DE60201630D1 (de) Optischer MEMS Schalter mit Abbildungssystem
WO2003036359A3 (de) Optisches element mit einer optischen achse
DE59502013D1 (de) Mikromechanischer aktor
EP1306350A3 (en) Microelectrical mechanical system with improved beam suspension
DE60132054D1 (de) Schutzbalg für Gleichlaufgelenke
WO2000062353A3 (en) Protection for mems cross-bar switch
ATE201972T1 (de) Bilderaufhängesystem
WO2002065186A3 (fr) Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir.
DE69830025D1 (de) Brücke in stossgedämpfter Bauweise
ITMI20011802A0 (it) Procedimento per la sorveglianza della funzionalita' di un percorso di trasmissione di forza meccanico fra un attuatore di un cambio di velo
EP1518822A3 (en) Complex microdevices and apparatus and methods for fabricating such devices

Legal Events

Date Code Title Description
MA Patent expired