IT1397115B1 - Struttura risonante microelettromeccanica con migliorate caratteristiche elettriche. - Google Patents

Struttura risonante microelettromeccanica con migliorate caratteristiche elettriche.

Info

Publication number
IT1397115B1
IT1397115B1 ITTO2009A000929A ITTO20090929A IT1397115B1 IT 1397115 B1 IT1397115 B1 IT 1397115B1 IT TO2009A000929 A ITTO2009A000929 A IT TO2009A000929A IT TO20090929 A ITTO20090929 A IT TO20090929A IT 1397115 B1 IT1397115 B1 IT 1397115B1
Authority
IT
Italy
Prior art keywords
micro
electrical characteristics
resonant structure
improved electrical
electromechanical resonant
Prior art date
Application number
ITTO2009A000929A
Other languages
English (en)
Inventor
Giuditta Roselli
Anna Pomarico
Pasquale Flora
Annarita Morea
Original Assignee
St Microelectronics Rousset
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by St Microelectronics Rousset filed Critical St Microelectronics Rousset
Priority to ITTO2009A000929A priority Critical patent/IT1397115B1/it
Priority to US12/953,930 priority patent/US8289092B2/en
Publication of ITTO20090929A1 publication Critical patent/ITTO20090929A1/it
Application granted granted Critical
Publication of IT1397115B1 publication Critical patent/IT1397115B1/it

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02393—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor
    • H03H9/02409—Post-fabrication trimming of parameters, e.g. resonance frequency, Q factor by application of a DC-bias voltage
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02433—Means for compensation or elimination of undesired effects
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2436—Disk resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02511—Vertical, i.e. perpendicular to the substrate plane
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H2009/2442—Square resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Micromachines (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
ITTO2009A000929A 2009-11-27 2009-11-27 Struttura risonante microelettromeccanica con migliorate caratteristiche elettriche. IT1397115B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
ITTO2009A000929A IT1397115B1 (it) 2009-11-27 2009-11-27 Struttura risonante microelettromeccanica con migliorate caratteristiche elettriche.
US12/953,930 US8289092B2 (en) 2009-11-27 2010-11-24 Microelectromechanical resonant structure having improved electrical characteristics

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ITTO2009A000929A IT1397115B1 (it) 2009-11-27 2009-11-27 Struttura risonante microelettromeccanica con migliorate caratteristiche elettriche.

Publications (2)

Publication Number Publication Date
ITTO20090929A1 ITTO20090929A1 (it) 2011-05-28
IT1397115B1 true IT1397115B1 (it) 2012-12-28

Family

ID=42312903

Family Applications (1)

Application Number Title Priority Date Filing Date
ITTO2009A000929A IT1397115B1 (it) 2009-11-27 2009-11-27 Struttura risonante microelettromeccanica con migliorate caratteristiche elettriche.

Country Status (2)

Country Link
US (1) US8289092B2 (it)
IT (1) IT1397115B1 (it)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101630759B1 (ko) * 2010-12-14 2016-06-16 삼성전자주식회사 초음파 변환기의 셀, 채널 및 이를 포함하는 초음파 변환기
KR101761819B1 (ko) 2011-08-24 2017-07-26 삼성전자주식회사 초음파 변환기 및 그 제조 방법
JP5953980B2 (ja) * 2012-06-28 2016-07-20 セイコーエプソン株式会社 振動デバイス、電子機器
EP2725595A1 (en) * 2012-10-25 2014-04-30 Delfmems MEMS fixed capacitor comprising a gas-containing gap and process for manufacturing said capacitor
US8902010B2 (en) 2013-01-02 2014-12-02 Motorola Mobility Llc Microelectronic machine-based ariable
JP6339669B2 (ja) 2013-07-08 2018-06-06 モーション・エンジン・インコーポレーテッド Ｍｅｍｓデバイスおよび製造する方法
WO2015042700A1 (en) 2013-09-24 2015-04-02 Motion Engine Inc. Mems components and method of wafer-level manufacturing thereof
WO2015013828A1 (en) 2013-08-02 2015-02-05 Motion Engine Inc. Mems motion sensor and method of manufacturing
WO2015103688A1 (en) 2014-01-09 2015-07-16 Motion Engine Inc. Integrated mems system
US20170030788A1 (en) 2014-04-10 2017-02-02 Motion Engine Inc. Mems pressure sensor
CN103964369B (zh) * 2014-04-15 2016-04-20 杭州电子科技大学 电极横向可动的微机械圆盘谐振器
US11674803B2 (en) 2014-06-02 2023-06-13 Motion Engine, Inc. Multi-mass MEMS motion sensor
US11111135B2 (en) * 2014-07-02 2021-09-07 My01 Ip Holdings Inc. Methods and devices for microelectromechanical pressure sensors
CA3004760A1 (en) 2014-12-09 2016-06-16 Motion Engine Inc. 3d mems magnetometer and associated methods
CA3220839A1 (en) 2015-01-15 2016-07-21 Motion Engine Inc. 3d mems device with hermetic cavity

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6393913B1 (en) * 2000-02-08 2002-05-28 Sandia Corporation Microelectromechanical dual-mass resonator structure
FI111457B (fi) * 2000-10-02 2003-07-31 Nokia Corp Mikromekaaninen rakenne
US6593672B2 (en) * 2000-12-22 2003-07-15 Intel Corporation MEMS-switched stepped variable capacitor and method of making same
US6817244B2 (en) * 2003-01-06 2004-11-16 Honeywell International Inc. Methods and systems for actively controlling movement within MEMS structures
US7030536B2 (en) * 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure
US7444868B2 (en) * 2006-06-29 2008-11-04 Honeywell International Inc. Force rebalancing for MEMS inertial sensors using time-varying voltages
JP4844526B2 (ja) * 2006-10-03 2011-12-28 ソニー株式会社 共振器、発振器及び通信装置
CN101548465B (zh) * 2006-12-05 2012-09-05 明锐有限公司 用于mems振荡器的方法及设备
US7859365B2 (en) * 2006-12-13 2010-12-28 Georgia Tech Research Corporation Low frequency process-variation-insensitive temperature-stable micromechanical resonators

Also Published As

Publication number Publication date
US20110128083A1 (en) 2011-06-02
US8289092B2 (en) 2012-10-16
ITTO20090929A1 (it) 2011-05-28

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