WO2002065186A3 - Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir. - Google Patents

Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir. Download PDF

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Publication number
WO2002065186A3
WO2002065186A3 PCT/FR2002/000545 FR0200545W WO02065186A3 WO 2002065186 A3 WO2002065186 A3 WO 2002065186A3 FR 0200545 W FR0200545 W FR 0200545W WO 02065186 A3 WO02065186 A3 WO 02065186A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromirrors
mobile part
array
micromirror
fixed part
Prior art date
Application number
PCT/FR2002/000545
Other languages
English (en)
Other versions
WO2002065186A2 (fr
Inventor
Serge Valette
Original Assignee
Teem Photonics
Serge Valette
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teem Photonics, Serge Valette filed Critical Teem Photonics
Priority to CA002437816A priority Critical patent/CA2437816A1/fr
Priority to JP2002564645A priority patent/JP2004522996A/ja
Priority to US10/468,060 priority patent/US20040061961A1/en
Priority to EP02704815A priority patent/EP1390793A2/fr
Publication of WO2002065186A2 publication Critical patent/WO2002065186A2/fr
Publication of WO2002065186A3 publication Critical patent/WO2002065186A3/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne micro-miroir comportant une partie fixe (31), une partie mobile (41,48) comprenant des moyens de réflexion (48) et des moyens d'articulation reliant la partie mobile à la partie fixe, ce micro-miroir est caractérisé en ce que les moyens d'articulations sont formés par un pivot (47) situé sous la partie mobile entre cette dernière et la partie fixe et apte à permettre un déplacement de la partie mobile selon des axes de rotation contenus dans la partie mobile et passant par un axe du pivot, et dans lequel la partie fixe comprend au moins une cavité (36) en regard d'au moins une zone d'une extrémité de la partie mobile. L'invention concerne également une matrice de micro-miroirs à pivots ainsi qu'un procédé de fabrication de tels micro-miroirs. Ces micro-miroirs sont utilisables notamment dans des systèmes de routage optique ou de projection d'images.
PCT/FR2002/000545 2001-02-15 2002-02-13 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir. WO2002065186A2 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CA002437816A CA2437816A1 (fr) 2001-02-15 2002-02-13 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir.
JP2002564645A JP2004522996A (ja) 2001-02-15 2002-02-13 旋回する光マイクロミラー、マイクロミラーのマトリックス、およびマイクロミラーの製造方法
US10/468,060 US20040061961A1 (en) 2001-02-15 2002-02-13 Pivoting optical micromirror, array for such micromirrors and method for making same
EP02704815A EP1390793A2 (fr) 2001-02-15 2002-02-13 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR01/02065 2001-02-15
FR0102065A FR2820833B1 (fr) 2001-02-15 2001-02-15 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir

Publications (2)

Publication Number Publication Date
WO2002065186A2 WO2002065186A2 (fr) 2002-08-22
WO2002065186A3 true WO2002065186A3 (fr) 2003-11-27

Family

ID=8860053

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2002/000545 WO2002065186A2 (fr) 2001-02-15 2002-02-13 Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir.

Country Status (6)

Country Link
US (1) US20040061961A1 (fr)
EP (1) EP1390793A2 (fr)
JP (1) JP2004522996A (fr)
CA (1) CA2437816A1 (fr)
FR (1) FR2820833B1 (fr)
WO (1) WO2002065186A2 (fr)

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JP2002258174A (ja) * 2001-03-02 2002-09-11 Seiko Epson Corp 光変調装置及びそれを有する電子機器
US6912336B2 (en) * 2002-03-15 2005-06-28 Nippon Telegraph And Telephone Corporation Optical switch device
US6800212B2 (en) * 2002-05-15 2004-10-05 The Regents Of The University Of California Fabrication of optical components using Si, SiGe, SiGeC, and chemical endpoint detection
US20050094241A1 (en) * 2003-11-01 2005-05-05 Fusao Ishii Electromechanical micromirror devices and methods of manufacturing the same
US7183618B2 (en) * 2004-08-14 2007-02-27 Fusao Ishii Hinge for micro-mirror devices
US7209290B2 (en) * 2004-05-25 2007-04-24 Samsung Electro-Mechanics Co., Ltd. Diffractive thin-film piezoelectric micromirror and method of producing the same
US7372617B2 (en) * 2005-07-06 2008-05-13 Peter Enoksson Hidden hinge MEMS device
KR100709325B1 (ko) 2005-11-16 2007-04-20 삼성전자주식회사 마이크로 미러 액튜에이터
US7598688B2 (en) * 2006-06-22 2009-10-06 Orbotech Ltd Tilting device
JP2009233836A (ja) * 2008-03-28 2009-10-15 Yamaha Corp Ｍｅｍｓおよびｍｅｍｓ製造方法
JP6106970B2 (ja) * 2012-07-02 2017-04-05 株式会社ニコン 空間光変調器および露光装置
JP2014203844A (ja) * 2013-04-01 2014-10-27 株式会社東芝 Ｍｅｍｓ装置及びその製造方法
CN109991730B (zh) * 2019-03-12 2021-06-15 上海集成电路研发中心有限公司 一种微镜结构

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3886310A (en) * 1973-08-22 1975-05-27 Westinghouse Electric Corp Electrostatically deflectable light valve with improved diffraction properties
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method

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US5620931A (en) * 1990-08-17 1997-04-15 Analog Devices, Inc. Methods for fabricating monolithic device containing circuitry and suspended microstructure
DE4229507C2 (de) * 1991-10-30 2002-03-07 Cms Mikrosysteme Gmbh Mikromechanischer 3-D-Aktor
EP0539889A3 (en) * 1991-10-30 1993-07-28 Steinbichler, Hans, Dr. Micromechanical actuator
US5212582A (en) * 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
US5708521A (en) * 1993-05-04 1998-01-13 Daewoo Electronics Co., Ltd. Actuated mirror array for use in optical projection system
US5629790A (en) * 1993-10-18 1997-05-13 Neukermans; Armand P. Micromachined torsional scanner
US5485304A (en) * 1994-07-29 1996-01-16 Texas Instruments, Inc. Support posts for micro-mechanical devices
KR100243190B1 (ko) * 1996-06-10 2000-02-01 윤종용 가동미러장치 및 그 제조방법
US6061323A (en) * 1996-07-30 2000-05-09 Seagate Technology, Inc. Data storage system having an improved surface micro-machined mirror
DE19712201A1 (de) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Mikromechanische Spiegel-Anordnung
DE19800745A1 (de) * 1998-01-12 1999-07-15 Bosch Gmbh Robert Design- und Herstellungsverfahren für eine mikromechanische Vorrichtung
US6020272A (en) * 1998-10-08 2000-02-01 Sandia Corporation Method for forming suspended micromechanical structures

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3886310A (en) * 1973-08-22 1975-05-27 Westinghouse Electric Corp Electrostatically deflectable light valve with improved diffraction properties
US5096279A (en) * 1984-08-31 1992-03-17 Texas Instruments Incorporated Spatial light modulator and method

Also Published As

Publication number Publication date
FR2820833A1 (fr) 2002-08-16
WO2002065186A2 (fr) 2002-08-22
FR2820833B1 (fr) 2004-05-28
CA2437816A1 (fr) 2002-08-22
JP2004522996A (ja) 2004-07-29
US20040061961A1 (en) 2004-04-01
EP1390793A2 (fr) 2004-02-25

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