WO2002065187A3 - Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenus par ce procede - Google Patents

Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenus par ce procede Download PDF

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Publication number
WO2002065187A3
WO2002065187A3 PCT/FR2002/000546 FR0200546W WO02065187A3 WO 2002065187 A3 WO2002065187 A3 WO 2002065187A3 FR 0200546 W FR0200546 W FR 0200546W WO 02065187 A3 WO02065187 A3 WO 02065187A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromirror
layer
optical
making
mobile part
Prior art date
Application number
PCT/FR2002/000546
Other languages
English (en)
Other versions
WO2002065187A2 (fr
Inventor
Serge Valette
Original Assignee
Teem Photonics
Serge Valette
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teem Photonics, Serge Valette filed Critical Teem Photonics
Priority to US10/467,174 priority Critical patent/US7022249B2/en
Priority to CA002437817A priority patent/CA2437817A1/fr
Priority to EP02704816A priority patent/EP1390794A2/fr
Priority to JP2002564646A priority patent/JP2004522997A/ja
Publication of WO2002065187A2 publication Critical patent/WO2002065187A2/fr
Publication of WO2002065187A3 publication Critical patent/WO2002065187A3/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0181—See-saws
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

L'invention concerne un procédé de fabrication d'un micro-miroir optique comportant une partie fixe, une partie mobile, avec des moyens de réflexion, reliée à la partie fixe par des moyens d'articulation. Ce procédé est caractérisé en ce qu'il comporte les étapes suivantes: a) réalisation d'un empilement formé d'un support mécanique (21), d'une première couche (22) de matériau d'oxydation thermique et d'au moins une deuxième couche (26) de matériau destinée à former la partie mobile, b) réalisation des moyens d'articulation (27), c) réalisation des moyens réflecteurs (29) sur la deuxième couche, d) réalisation de la partie mobile par gravure d'au moins la deuxième couche de matériau, e) élimination de la couche d'oxydation thermique pour libérer ladite partie mobile. Applications possibles aux systèmes de routage optique ou de projection d'images.
PCT/FR2002/000546 2001-02-15 2002-02-13 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenus par ce procede WO2002065187A2 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US10/467,174 US7022249B2 (en) 2001-02-15 2002-02-13 Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method
CA002437817A CA2437817A1 (fr) 2001-02-15 2002-02-13 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenus par ce procede
EP02704816A EP1390794A2 (fr) 2001-02-15 2002-02-13 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenus par ce procede
JP2002564646A JP2004522997A (ja) 2001-02-15 2002-02-13 光マイクロミラーならびにマイクロミラーの製造方法、この方法により得られる複数マイクロミラーのアレイ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0102067A FR2820834B1 (fr) 2001-02-15 2001-02-15 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenu par ce procede
FR01/02067 2001-02-15

Publications (2)

Publication Number Publication Date
WO2002065187A2 WO2002065187A2 (fr) 2002-08-22
WO2002065187A3 true WO2002065187A3 (fr) 2003-11-27

Family

ID=8860054

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2002/000546 WO2002065187A2 (fr) 2001-02-15 2002-02-13 Procede de fabrication d'un micro-miroir optique et micro-miroir ou matrice de micro-miroirs obtenus par ce procede

Country Status (6)

Country Link
US (1) US7022249B2 (fr)
EP (1) EP1390794A2 (fr)
JP (1) JP2004522997A (fr)
CA (1) CA2437817A1 (fr)
FR (1) FR2820834B1 (fr)
WO (1) WO2002065187A2 (fr)

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JP2002258174A (ja) * 2001-03-02 2002-09-11 Seiko Epson Corp 光変調装置及びそれを有する電子機器
FR2854993B1 (fr) * 2003-05-15 2005-07-15 Suisse Electronique Microtech Resonateurs integres et base de temps incorporant de tels resonateurs
US6861277B1 (en) * 2003-10-02 2005-03-01 Hewlett-Packard Development Company, L.P. Method of forming MEMS device
US7957050B2 (en) 2003-11-01 2011-06-07 Silicon Quest Kabushiki-Kaisha Mirror device comprising layered electrode
US7973994B2 (en) * 2003-11-01 2011-07-05 Silicon Quest Kabushiki-Kaisha Spatial light modulator
US7835062B2 (en) * 2006-08-30 2010-11-16 Silicon Quest Kabushiki-Kaisha Mircromirror device having a vertical hinge
US8045254B2 (en) * 2003-11-01 2011-10-25 Silicon Quest Kabushiki-Kaisha Structure body electrically connected via semiconductor material layer
US8064123B2 (en) * 2003-11-01 2011-11-22 Silicon Quest Kabushiki-Kaisha Mirror device and MEMS device comprising layered electrode
US8228595B2 (en) 2003-11-01 2012-07-24 Silicon Quest Kabushiki-Kaisha Sequence and timing control of writing and rewriting pixel memories with substantially lower data rate
US20090195858A1 (en) * 2003-11-01 2009-08-06 Naoya Sugimoto Changing an electrode function
US7969395B2 (en) 2003-11-01 2011-06-28 Silicon Quest Kabushiki-Kaisha Spatial light modulator and mirror device
US7755830B2 (en) * 2003-11-01 2010-07-13 Silicon Quest Kabushiki-Kaisha Micro mirror device
US7876488B2 (en) * 2003-11-01 2011-01-25 Silicon Quest Kabushiki-Kaisha Mirror device having vertical hinge
US8179591B2 (en) * 2003-11-01 2012-05-15 Silicon Quest Kabushiki-Kaisha Spatial light modulator and mirror array device
US7733558B2 (en) * 2003-11-01 2010-06-08 Silicon Quest Kabushiki-Kaisha Display device with an addressable movable electrode
US7760415B2 (en) * 2003-11-01 2010-07-20 Silicon Quest Kabushiki-Kaisha Micro mirror device
US8154474B2 (en) * 2003-11-01 2012-04-10 Silicon Quest Kabushiki Kaisha Driving method of memory access
US7643195B2 (en) * 2003-11-01 2010-01-05 Silicon Quest Kabushiki-Kaisha Mirror device
US20090180038A1 (en) * 2003-11-01 2009-07-16 Naoya Sugimoto Mirror control within time slot for SLM
US20090207164A1 (en) * 2003-11-01 2009-08-20 Naoya Sugimoto Mirror control within time slot for SLM
US20090207324A1 (en) * 2003-11-01 2009-08-20 Naoya Sugimoto Circuit for SLM's pixel
US7933060B2 (en) * 2003-11-01 2011-04-26 Silicon Quest Kabushiki-Kaisha Three states of micro mirror device
US20090207325A1 (en) * 2003-11-01 2009-08-20 Naoya Sugimoto Algorithm for SLM of single hinge type
US7042619B1 (en) * 2004-06-18 2006-05-09 Miradia Inc. Mirror structure with single crystal silicon cross-member
US7172921B2 (en) * 2005-01-03 2007-02-06 Miradia Inc. Method and structure for forming an integrated spatial light modulator
US7139111B1 (en) * 2005-04-28 2006-11-21 Taiwan Semiconductor Manufacturing Co., Ltd. Micromirrors for micro-electro-mechanical systems and methods of fabricating the same
JP2007286172A (ja) * 2006-04-13 2007-11-01 Pentax Corp マイクロミラー、及び、電極形成方法
US7652813B2 (en) * 2006-08-30 2010-01-26 Silicon Quest Kabushiki-Kaisha Mirror device
US8023172B2 (en) * 2006-08-30 2011-09-20 Silicon Quest Kabushiki-Kaisha Mirror device
JP2008132583A (ja) * 2006-10-24 2008-06-12 Seiko Epson Corp Ｍｅｍｓデバイス
JP5309441B2 (ja) * 2006-11-16 2013-10-09 株式会社デンソー ２次元光走査装置
US7911672B2 (en) * 2006-12-26 2011-03-22 Zhou Tiansheng Micro-electro-mechanical-system micromirrors for high fill factor arrays and method therefore
US20090128462A1 (en) * 2007-11-16 2009-05-21 Naoya Sugimoto Spatial light modulator and mirror device
US7848005B2 (en) * 2007-11-16 2010-12-07 Silicon Quest Kabushiki-Kaisha Spatial light modulator implemented with a mirror array device
US20090128887A1 (en) * 2007-11-16 2009-05-21 Naoya Sugimoto Spatial light modulator and mirror array device
US20090128888A1 (en) * 2007-11-16 2009-05-21 Hirotoshi Ichikawa Mirror array device
US7876492B2 (en) * 2007-11-16 2011-01-25 Silicon Quest Kabushiki-Kaisha Spatial light modulator and mirror array device
US8238018B2 (en) * 2009-06-01 2012-08-07 Zhou Tiansheng MEMS micromirror and micromirror array
WO2011080883A1 (fr) * 2009-12-28 2011-07-07 株式会社ニコン Convertisseur électromécanique, modulateur optique spatial, dispositif d'exposition, et leurs procédés de fabrication
JP2011138888A (ja) * 2009-12-28 2011-07-14 Nikon Corp 電気機械変換器、空間光変調器、露光装置およびそれらの製造方法
JP2011137961A (ja) * 2009-12-28 2011-07-14 Nikon Corp 空間光変調器、露光装置およびそれらの製造方法
JP5447272B2 (ja) * 2010-08-05 2014-03-19 セイコーエプソン株式会社 光スキャナーおよび画像形成装置
US9036231B2 (en) 2010-10-20 2015-05-19 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US10551613B2 (en) 2010-10-20 2020-02-04 Tiansheng ZHOU Micro-electro-mechanical systems micromirrors and micromirror arrays
US9385634B2 (en) 2012-01-26 2016-07-05 Tiansheng ZHOU Rotational type of MEMS electrostatic actuator
CN104795311B (zh) * 2014-01-21 2018-06-01 中芯国际集成电路制造(上海)有限公司 半导体器件的形成方法
US20220276615A1 (en) * 2021-02-26 2022-09-01 Honeywell International Inc. Thermal metamaterial for low power mems thermal control

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Also Published As

Publication number Publication date
EP1390794A2 (fr) 2004-02-25
JP2004522997A (ja) 2004-07-29
US20040085606A1 (en) 2004-05-06
US7022249B2 (en) 2006-04-04
FR2820834A1 (fr) 2002-08-16
WO2002065187A2 (fr) 2002-08-22
FR2820834B1 (fr) 2004-06-25
CA2437817A1 (fr) 2002-08-22

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