AU2001251535A1 - Optical mirror system with multi-axis rotational control - Google Patents

Optical mirror system with multi-axis rotational control

Info

Publication number
AU2001251535A1
AU2001251535A1 AU2001251535A AU5153501A AU2001251535A1 AU 2001251535 A1 AU2001251535 A1 AU 2001251535A1 AU 2001251535 A AU2001251535 A AU 2001251535A AU 5153501 A AU5153501 A AU 5153501A AU 2001251535 A1 AU2001251535 A1 AU 2001251535A1
Authority
AU
Australia
Prior art keywords
mirror system
optical mirror
rotational control
axis rotational
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001251535A
Inventor
John J. Fling
Paul Merritt Hagelin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CSPEED Corp
Original Assignee
CSPEED CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CSPEED CORP filed Critical CSPEED CORP
Publication of AU2001251535A1 publication Critical patent/AU2001251535A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
AU2001251535A 2000-04-14 2001-04-10 Optical mirror system with multi-axis rotational control Abandoned AU2001251535A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/549,778 US6283601B1 (en) 2000-04-14 2000-04-14 Optical mirror system with multi-axis rotational control
US09549778 2000-04-14
PCT/US2001/011803 WO2001079914A2 (en) 2000-04-14 2001-04-10 Optical mirror system with multi-axis rotational control

Publications (1)

Publication Number Publication Date
AU2001251535A1 true AU2001251535A1 (en) 2001-10-30

Family

ID=24194348

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001251535A Abandoned AU2001251535A1 (en) 2000-04-14 2001-04-10 Optical mirror system with multi-axis rotational control

Country Status (6)

Country Link
US (2) US6283601B1 (en)
EP (1) EP1277072A2 (en)
CN (1) CN1454328A (en)
AU (1) AU2001251535A1 (en)
CA (1) CA2409072A1 (en)
WO (1) WO2001079914A2 (en)

Families Citing this family (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6545385B2 (en) 2000-04-11 2003-04-08 Sandia Corporation Microelectromechanical apparatus for elevating and tilting a platform
US6827866B1 (en) 2000-05-24 2004-12-07 Active Optical Networks, Inc. Deep-well lithography process for forming micro-electro-mechanical structures
US6905614B1 (en) 2000-05-24 2005-06-14 Active Optical Networks, Inc. Pattern-transfer process for forming micro-electro-mechanical structures
US7190854B1 (en) 2000-05-24 2007-03-13 Active Optical Networks, Inc. Methods for forming an array of MEMS optical elements
US6963679B1 (en) 2000-05-24 2005-11-08 Active Optical Networks, Inc. Micro-opto-electro-mechanical switching system
US6483962B1 (en) 2000-05-24 2002-11-19 Vlad J. Novotny Optical cross connect switching array system with optical feedback
US6670208B2 (en) 2000-06-23 2003-12-30 Nec Corporation Optical circuit in which fabrication is easy
US6504643B1 (en) * 2000-09-28 2003-01-07 Xerox Corporation Structure for an optical switch on a substrate
US6632373B1 (en) 2000-09-28 2003-10-14 Xerox Corporation Method for an optical switch on a substrate
US6411427B1 (en) 2000-09-28 2002-06-25 Xerox Corporation Structure for an optical switch on a glass substrate
US6466356B1 (en) * 2000-09-28 2002-10-15 Xerox Corporation Structure for an optical switch on a silicon substrate
US6501588B1 (en) * 2000-09-28 2002-12-31 Xerox Corporation Method for an optical switch on a silicon substrate
US6632374B1 (en) 2000-09-28 2003-10-14 Xerox Corporation Method for an optical switch on a silicon on insulator substrate
CA2365804A1 (en) * 2000-12-22 2002-06-22 Mitsuru Yamamoto Optical path control apparatus with mirror section, and manufacturing method for the same
US6394617B1 (en) * 2000-12-29 2002-05-28 Avanex Corporation Method and apparatus for latched bimorph optical switchs
US6480320B2 (en) * 2001-02-07 2002-11-12 Transparent Optical, Inc. Microelectromechanical mirror and mirror array
KR100374486B1 (en) * 2001-02-22 2003-03-03 주식회사 나노위즈 Thin film micromirror array for free-space optical switching using Micro Electro Mechanical System and method for manufacturing the same, and multidimensional optical switching mode therefrom
US6912078B2 (en) 2001-03-16 2005-06-28 Corning Incorporated Electrostatically actuated micro-electro-mechanical devices and method of manufacture
US6600587B2 (en) 2001-04-23 2003-07-29 Memx, Inc. Surface micromachined optical system with reinforced mirror microstructure
US6713367B2 (en) * 2001-08-28 2004-03-30 The Board Of Trustees Of The Leland Stanford Junior University Self-aligned vertical combdrive actuator and method of fabrication
US6751395B1 (en) 2001-11-09 2004-06-15 Active Optical Networks, Inc. Micro-electro-mechanical variable optical attenuator
US7872394B1 (en) 2001-12-13 2011-01-18 Joseph E Ford MEMS device with two axes comb drive actuators
US6847749B1 (en) 2002-01-18 2005-01-25 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Diffraction-based optical switch
US6665104B2 (en) 2002-03-12 2003-12-16 Memx, Inc. Mirror positioning assembly with vertical force component compensation
US7055975B2 (en) 2002-03-12 2006-06-06 Memx, Inc. Microelectromechanical system with non-collinear force compensation
US6831390B2 (en) 2002-03-14 2004-12-14 Memx, Inc. Microelectromechanical system with stiff coupling
US6637901B2 (en) * 2002-03-14 2003-10-28 Memx, Inc. Mirror assembly with elevator lifter
US6844657B2 (en) * 2002-03-14 2005-01-18 Memx, Inc. Microelectromechanical system and method for producing displacement multiplication
US6650806B2 (en) * 2002-03-14 2003-11-18 Memx, Inc. Compliant push/pull connector microstructure
US6798942B2 (en) * 2002-04-05 2004-09-28 Finisar Corporation Zero static power optical switch
US6843574B2 (en) 2002-08-20 2005-01-18 Intel Corporation Gimbaled micromechanical rotation system
US6778315B2 (en) * 2002-09-25 2004-08-17 Rosemount Aerospace Inc. Micro mirror structure with flat reflective coating
US6733144B2 (en) * 2002-09-27 2004-05-11 Intel Corporation Shock protectors for micro-mechanical systems
US6791234B2 (en) * 2002-10-10 2004-09-14 Intel Corporation Micromechanical rotation system with coupled actuators
US6747785B2 (en) 2002-10-24 2004-06-08 Hewlett-Packard Development Company, L.P. MEMS-actuated color light modulator and methods
US20040160118A1 (en) 2002-11-08 2004-08-19 Knollenberg Clifford F. Actuator apparatus and method for improved deflection characteristics
US7019434B2 (en) * 2002-11-08 2006-03-28 Iris Ao, Inc. Deformable mirror method and apparatus including bimorph flexures and integrated drive
US6960849B1 (en) 2003-03-31 2005-11-01 Sandia Corporation Three-dimensional microelectromechanical tilting platform operated by gear-driven racks
US7845948B2 (en) * 2003-11-10 2010-12-07 Ricky Dion Barnes Training method and device for teaching a trainee to remain within a safety zone
US7091057B2 (en) * 2003-12-19 2006-08-15 Agency For Science, Technology And Research Method of making a single-crystal-silicon 3D micromirror
US20060088242A1 (en) * 2003-12-31 2006-04-27 Vlad Novotny Optical switches with uniaxial mirrors
US6903861B1 (en) 2004-01-22 2005-06-07 Sandia Corporation Erected mirror optical switch
US6995895B2 (en) * 2004-02-05 2006-02-07 Lucent Technologies Inc. MEMS actuator for piston and tilt motion
US7099063B2 (en) * 2004-03-09 2006-08-29 Lucent Technologies Inc. MEMS device for an adaptive optics mirror
US7616987B2 (en) * 2004-10-05 2009-11-10 Agency For Science, Technology And Research Microprobe for 3D bio-imaging, method for fabricating the same and use thereof
JP4791534B2 (en) * 2005-05-18 2011-10-12 コロ テクノロジーズ インコーポレイテッド Manufacturing method of micro electromechanical device
CA2607885A1 (en) 2005-05-18 2006-11-23 Kolo Technologies, Inc. Through-wafer interconnection
JP5128470B2 (en) * 2005-06-17 2013-01-23 コロ テクノロジーズ インコーポレイテッド Microelectromechanical transducer with insulation extension
US7880565B2 (en) * 2005-08-03 2011-02-01 Kolo Technologies, Inc. Micro-electro-mechanical transducer having a surface plate
CN100384587C (en) * 2005-12-13 2008-04-30 中国科学院国家天文台南京天文光学技术研究所 Optical mirror surface passive support mechanism based on four-bar mechanism principle
CN102713759B (en) * 2009-09-01 2015-04-29 麦克罗尼克迈达塔有限责任公司 Pattern generation system
DE102012111716A1 (en) * 2012-12-03 2014-06-05 Trw Automotive Electronics & Components Gmbh Radiation detection device

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5673139A (en) * 1993-07-19 1997-09-30 Medcom, Inc. Microelectromechanical television scanning device and method for making the same
US5862003A (en) * 1995-06-23 1999-01-19 Saif; Muhammad T. A. Micromotion amplifier
KR100243190B1 (en) * 1996-06-10 2000-02-01 윤종용 Movable mirror array and its fabrication method
ES2175454T3 (en) * 1996-09-20 2002-11-16 Ascom Ag OPTICAL FIBER CIRCUIT SWITCH AND PROCEDURE FOR THE MANUFACTURING OF THE SAME.
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
US6049407A (en) * 1997-05-05 2000-04-11 University Of Washington Piezoelectric scanner
US5808780A (en) * 1997-06-09 1998-09-15 Texas Instruments Incorporated Non-contacting micromechanical optical switch
US5960132A (en) * 1997-09-09 1999-09-28 At&T Corp. Fiber-optic free-space micromachined matrix switches
WO1999052006A2 (en) * 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
KR100313851B1 (en) * 1998-04-10 2001-12-12 윤종용 Micromirror device for image display apparatus
US6040935A (en) * 1999-01-25 2000-03-21 The United States Of America As Represented By The Secretary Of The Air Force Flexureless multi-stable micromirrors for optical switching
US6137206A (en) * 1999-03-23 2000-10-24 Cronos Integrated Microsystems, Inc. Microelectromechanical rotary structures

Also Published As

Publication number Publication date
CA2409072A1 (en) 2001-10-25
CN1454328A (en) 2003-11-05
US6283601B1 (en) 2001-09-04
EP1277072A2 (en) 2003-01-22
US20010030817A1 (en) 2001-10-18
WO2001079914A2 (en) 2001-10-25
WO2001079914A3 (en) 2002-03-21
US6386716B2 (en) 2002-05-14

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