FI128629B - Method for making a master plate and a master plate - Google Patents

Method for making a master plate and a master plate Download PDF

Info

Publication number
FI128629B
FI128629B FI20175505A FI20175505A FI128629B FI 128629 B FI128629 B FI 128629B FI 20175505 A FI20175505 A FI 20175505A FI 20175505 A FI20175505 A FI 20175505A FI 128629 B FI128629 B FI 128629B
Authority
FI
Finland
Prior art keywords
substrate
layer
mask
etch
height
Prior art date
Application number
FI20175505A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20175505A1 (en
Inventor
Mikhail Erdmanis
Ismo Vartiainen
Jussi Rahomäki
Original Assignee
Dispelix Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dispelix Oy filed Critical Dispelix Oy
Priority to FI20175505A priority Critical patent/FI128629B/en
Priority to EP18810137.2A priority patent/EP3631538B8/en
Priority to ES18810137T priority patent/ES2938898T3/es
Priority to US16/618,177 priority patent/US20210157042A1/en
Priority to JP2019566815A priority patent/JP7017196B2/ja
Priority to PCT/FI2018/050384 priority patent/WO2018220272A1/en
Priority to CN201880038535.4A priority patent/CN110998375A/zh
Publication of FI20175505A1 publication Critical patent/FI20175505A1/en
Application granted granted Critical
Publication of FI128629B publication Critical patent/FI128629B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D37/00—Tools as parts of machines covered by this subclass
    • B21D37/20—Making tools by operations not covered by a single other subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00769—Producing diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0081—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B27/0172—Head mounted characterised by optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/44—Grating systems; Zone plate systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G02B2027/0123—Head-up displays characterised by optical features comprising devices increasing the field of view
    • G02B2027/0125—Field-of-view increase by wavefront division

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Dry Formation Of Fiberboard And The Like (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
FI20175505A 2017-06-02 2017-06-02 Method for making a master plate and a master plate FI128629B (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI20175505A FI128629B (en) 2017-06-02 2017-06-02 Method for making a master plate and a master plate
EP18810137.2A EP3631538B8 (en) 2017-06-02 2018-05-22 Method of manufacturing a master plate
ES18810137T ES2938898T3 (es) 2017-06-02 2018-05-22 Método de fabricación de una placa maestra
US16/618,177 US20210157042A1 (en) 2017-06-02 2018-05-22 Method of manufacturing a master plate and a master plate
JP2019566815A JP7017196B2 (ja) 2017-06-02 2018-05-22 マスタープレートの製造方法及びマスタープレート
PCT/FI2018/050384 WO2018220272A1 (en) 2017-06-02 2018-05-22 Method of manufacturing a master plate and a master plate
CN201880038535.4A CN110998375A (zh) 2017-06-02 2018-05-22 制造母板的方法和母板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20175505A FI128629B (en) 2017-06-02 2017-06-02 Method for making a master plate and a master plate

Publications (2)

Publication Number Publication Date
FI20175505A1 FI20175505A1 (en) 2018-12-03
FI128629B true FI128629B (en) 2020-09-15

Family

ID=64455230

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20175505A FI128629B (en) 2017-06-02 2017-06-02 Method for making a master plate and a master plate

Country Status (7)

Country Link
US (1) US20210157042A1 (enExample)
EP (1) EP3631538B8 (enExample)
JP (1) JP7017196B2 (enExample)
CN (1) CN110998375A (enExample)
ES (1) ES2938898T3 (enExample)
FI (1) FI128629B (enExample)
WO (1) WO2018220272A1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11554445B2 (en) * 2018-12-17 2023-01-17 Applied Materials, Inc. Methods for controlling etch depth by localized heating
KR102778504B1 (ko) * 2019-05-15 2025-03-06 어플라이드 머티어리얼스, 인코포레이티드 가변 깊이 디바이스 구조들을 형성하는 방법들
US20220082739A1 (en) * 2020-09-17 2022-03-17 Facebook Technologies, Llc Techniques for manufacturing variable etch depth gratings using gray-tone lithography
JP7584635B2 (ja) * 2020-09-23 2024-11-15 アプライド マテリアルズ インコーポレイテッド インクジェットプリンティング堆積による可変屈折率プロファイルを有する回折光学素子の作製
US12259552B2 (en) * 2020-12-17 2025-03-25 Google Llc Spatial variance along waveguide incoupler
US20230025444A1 (en) * 2021-07-22 2023-01-26 Lawrence Livermore National Security, Llc Systems and methods for silicon microstructures fabricated via greyscale drie with soi release
EP4190541B1 (en) * 2021-12-02 2024-07-24 Unilin, BV Press element and method for manufacturing press elements
BE1030607B1 (nl) * 2022-06-10 2024-01-16 Flooring Ind Ltd Sarl Perselement en werkwijze voor het vervaardigen van perselementen
DE102022116428A1 (de) * 2022-06-30 2024-01-04 Hueck Rheinische Gmbh Verfahren zur Bearbeitung einer Oberfläche eines Presswerkzeugs, sowie Vorrichtung zur Bearbeitung einer Oberfläche eines Presswerkzeugs

Family Cites Families (17)

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Publication number Priority date Publication date Assignee Title
JPS60103310A (ja) * 1983-11-11 1985-06-07 Pioneer Electronic Corp マイクロフレネルレンズの製造方法
JPS6415705A (en) * 1987-07-09 1989-01-19 Matsushita Electric Industrial Co Ltd Production of fine element
JPH06258510A (ja) * 1993-03-09 1994-09-16 Canon Inc 回折格子製作用成形型およびその製造方法
JP3576885B2 (ja) * 1998-09-18 2004-10-13 キヤノン株式会社 素子の製造方法
JP2001004821A (ja) * 1999-06-24 2001-01-12 Canon Inc 回折光学素子及びその製造方法
US6905618B2 (en) * 2002-07-30 2005-06-14 Agilent Technologies, Inc. Diffractive optical elements and methods of making the same
JP2005539393A (ja) * 2002-09-18 2005-12-22 学校法人東京理科大学 表面加工方法
JP2006017788A (ja) * 2004-06-30 2006-01-19 Sumitomo Heavy Ind Ltd 階段状表面を有する部材の製造方法及びその部材
WO2006120720A1 (ja) * 2005-05-02 2006-11-16 Oki Electric Industry Co., Ltd. 回折光学素子の製造方法
JP2007057622A (ja) * 2005-08-22 2007-03-08 Ricoh Co Ltd 光学素子及びその製造方法、光学素子用形状転写型の製造方法及び光学素子用転写型
US20090176060A1 (en) * 2005-09-09 2009-07-09 Tokyo University Of Science Educational Foundation Administrative Org. Process for Producing 3-Dimensional Mold, Process for Producing Microfabrication Product, Process for Producing Micropattern Molding, 3-Dimensional Mold, Microfabrication Product, Micropattern Molding and Optical Device
JP2007328096A (ja) * 2006-06-07 2007-12-20 Ricoh Co Ltd 回折光学素子とその作製方法および光学モジュール
JP2008089923A (ja) * 2006-09-29 2008-04-17 Oki Electric Ind Co Ltd 光学素子の製造方法
TWI438500B (zh) * 2008-10-20 2014-05-21 United Microelectronics Corp 一種形成相位光柵的方法
EP3494418A4 (en) * 2016-08-02 2020-03-11 The Government of the United States of America, as represented by the Secretary of the Navy MANUFACTURING METHOD FOR DIGITAL ETCHING OF NANOSCALE STRUCTURES
US10649141B1 (en) * 2018-04-23 2020-05-12 Facebook Technologies, Llc Gratings with variable etch heights for waveguide displays
US10845609B2 (en) * 2018-06-28 2020-11-24 Intel Corporation Diffractive optical elements for wide field-of-view virtual reality devices and methods of manufacturing the same

Also Published As

Publication number Publication date
WO2018220272A1 (en) 2018-12-06
US20210157042A1 (en) 2021-05-27
EP3631538A1 (en) 2020-04-08
JP2020522025A (ja) 2020-07-27
CN110998375A (zh) 2020-04-10
EP3631538B1 (en) 2023-01-18
FI20175505A1 (en) 2018-12-03
EP3631538A4 (en) 2021-03-03
JP7017196B2 (ja) 2022-02-08
EP3631538B8 (en) 2023-03-22
ES2938898T3 (es) 2023-04-17

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