CN110998375A - 制造母板的方法和母板 - Google Patents

制造母板的方法和母板 Download PDF

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Publication number
CN110998375A
CN110998375A CN201880038535.4A CN201880038535A CN110998375A CN 110998375 A CN110998375 A CN 110998375A CN 201880038535 A CN201880038535 A CN 201880038535A CN 110998375 A CN110998375 A CN 110998375A
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CN
China
Prior art keywords
substrate
layer
mask
etch
height
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201880038535.4A
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English (en)
Chinese (zh)
Inventor
J·拉霍迈基
M·埃尔德马尼斯
I·瓦蒂亚宁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dispelix Oy
Original Assignee
Dispelix Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dispelix Oy filed Critical Dispelix Oy
Publication of CN110998375A publication Critical patent/CN110998375A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
    • B21D37/00—Tools as parts of machines covered by this subclass
    • B21D37/20—Making tools by operations not covered by a single other subclass
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0074—Production of other optical elements not provided for in B29D11/00009- B29D11/0073
    • B29D11/00769—Producing diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0081—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for altering, e.g. enlarging, the entrance or exit pupil
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/017—Head mounted
    • G02B27/0172—Head mounted characterised by optical features
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/44—Grating systems; Zone plate systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1828—Diffraction gratings having means for producing variable diffraction
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/001—Phase modulating patterns, e.g. refractive index patterns
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01—Head-up displays
    • G02B27/0101—Head-up displays characterised by optical features
    • G02B2027/0123—Head-up displays characterised by optical features comprising devices increasing the field of view
    • G02B2027/0125—Field-of-view increase by wavefront division

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Dry Formation Of Fiberboard And The Like (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
CN201880038535.4A 2017-06-02 2018-05-22 制造母板的方法和母板 Pending CN110998375A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FI20175505 2017-06-02
FI20175505A FI128629B (en) 2017-06-02 2017-06-02 Method for making a master plate and a master plate
PCT/FI2018/050384 WO2018220272A1 (en) 2017-06-02 2018-05-22 Method of manufacturing a master plate and a master plate

Publications (1)

Publication Number Publication Date
CN110998375A true CN110998375A (zh) 2020-04-10

Family

ID=64455230

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880038535.4A Pending CN110998375A (zh) 2017-06-02 2018-05-22 制造母板的方法和母板

Country Status (7)

Country Link
US (1) US20210157042A1 (enExample)
EP (1) EP3631538B8 (enExample)
JP (1) JP7017196B2 (enExample)
CN (1) CN110998375A (enExample)
ES (1) ES2938898T3 (enExample)
FI (1) FI128629B (enExample)
WO (1) WO2018220272A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116324533A (zh) * 2020-09-17 2023-06-23 元平台技术有限公司 使用灰色调光刻制造可变蚀刻深度光栅的技术

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11554445B2 (en) * 2018-12-17 2023-01-17 Applied Materials, Inc. Methods for controlling etch depth by localized heating
KR102778504B1 (ko) * 2019-05-15 2025-03-06 어플라이드 머티어리얼스, 인코포레이티드 가변 깊이 디바이스 구조들을 형성하는 방법들
JP7584635B2 (ja) * 2020-09-23 2024-11-15 アプライド マテリアルズ インコーポレイテッド インクジェットプリンティング堆積による可変屈折率プロファイルを有する回折光学素子の作製
US12259552B2 (en) * 2020-12-17 2025-03-25 Google Llc Spatial variance along waveguide incoupler
US20230025444A1 (en) * 2021-07-22 2023-01-26 Lawrence Livermore National Security, Llc Systems and methods for silicon microstructures fabricated via greyscale drie with soi release
EP4190541B1 (en) * 2021-12-02 2024-07-24 Unilin, BV Press element and method for manufacturing press elements
BE1030607B1 (nl) * 2022-06-10 2024-01-16 Flooring Ind Ltd Sarl Perselement en werkwijze voor het vervaardigen van perselementen
DE102022116428A1 (de) * 2022-06-30 2024-01-04 Hueck Rheinische Gmbh Verfahren zur Bearbeitung einer Oberfläche eines Presswerkzeugs, sowie Vorrichtung zur Bearbeitung einer Oberfläche eines Presswerkzeugs

Citations (11)

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JPH06258510A (ja) * 1993-03-09 1994-09-16 Canon Inc 回折格子製作用成形型およびその製造方法
JP2000155207A (ja) * 1998-09-18 2000-06-06 Canon Inc 素子の製造方法
US20040020892A1 (en) * 2002-07-30 2004-02-05 Matthews James Albert Diffractive optical elements and methods of making the same
JP2006017788A (ja) * 2004-06-30 2006-01-19 Sumitomo Heavy Ind Ltd 階段状表面を有する部材の製造方法及びその部材
US20060151435A1 (en) * 2002-09-18 2006-07-13 Jun Taniguchi Surface processing method
JP2007057622A (ja) * 2005-08-22 2007-03-08 Ricoh Co Ltd 光学素子及びその製造方法、光学素子用形状転写型の製造方法及び光学素子用転写型
JP2007328096A (ja) * 2006-06-07 2007-12-20 Ricoh Co Ltd 回折光学素子とその作製方法および光学モジュール
CN101153927A (zh) * 2006-09-29 2008-04-02 冲电气工业株式会社 光学元件的制造方法
CN101171534A (zh) * 2005-05-02 2008-04-30 冲电气工业株式会社 衍射光学元件的制造方法
EP1930776A1 (en) * 2005-09-09 2008-06-11 Tokyo University of Science Educational Foundation Administrative Organization Process for producing 3-dimensional mold, process for producing microfabrication product, process for producing micropattern molding, 3-dimensional mold, microfabrication product, micropattern molding and optical device
TW201017232A (en) * 2008-10-20 2010-05-01 United Microelectronics Corp Method for forming phase grating

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JPS60103310A (ja) * 1983-11-11 1985-06-07 Pioneer Electronic Corp マイクロフレネルレンズの製造方法
JPS6415705A (en) * 1987-07-09 1989-01-19 Matsushita Electric Industrial Co Ltd Production of fine element
JP2001004821A (ja) * 1999-06-24 2001-01-12 Canon Inc 回折光学素子及びその製造方法
EP3494418A4 (en) * 2016-08-02 2020-03-11 The Government of the United States of America, as represented by the Secretary of the Navy MANUFACTURING METHOD FOR DIGITAL ETCHING OF NANOSCALE STRUCTURES
US10649141B1 (en) * 2018-04-23 2020-05-12 Facebook Technologies, Llc Gratings with variable etch heights for waveguide displays
US10845609B2 (en) * 2018-06-28 2020-11-24 Intel Corporation Diffractive optical elements for wide field-of-view virtual reality devices and methods of manufacturing the same

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06258510A (ja) * 1993-03-09 1994-09-16 Canon Inc 回折格子製作用成形型およびその製造方法
JP2000155207A (ja) * 1998-09-18 2000-06-06 Canon Inc 素子の製造方法
US20040020892A1 (en) * 2002-07-30 2004-02-05 Matthews James Albert Diffractive optical elements and methods of making the same
US20060151435A1 (en) * 2002-09-18 2006-07-13 Jun Taniguchi Surface processing method
JP2006017788A (ja) * 2004-06-30 2006-01-19 Sumitomo Heavy Ind Ltd 階段状表面を有する部材の製造方法及びその部材
CN101171534A (zh) * 2005-05-02 2008-04-30 冲电气工业株式会社 衍射光学元件的制造方法
JP2007057622A (ja) * 2005-08-22 2007-03-08 Ricoh Co Ltd 光学素子及びその製造方法、光学素子用形状転写型の製造方法及び光学素子用転写型
EP1930776A1 (en) * 2005-09-09 2008-06-11 Tokyo University of Science Educational Foundation Administrative Organization Process for producing 3-dimensional mold, process for producing microfabrication product, process for producing micropattern molding, 3-dimensional mold, microfabrication product, micropattern molding and optical device
JP2007328096A (ja) * 2006-06-07 2007-12-20 Ricoh Co Ltd 回折光学素子とその作製方法および光学モジュール
CN101153927A (zh) * 2006-09-29 2008-04-02 冲电气工业株式会社 光学元件的制造方法
TW201017232A (en) * 2008-10-20 2010-05-01 United Microelectronics Corp Method for forming phase grating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116324533A (zh) * 2020-09-17 2023-06-23 元平台技术有限公司 使用灰色调光刻制造可变蚀刻深度光栅的技术

Also Published As

Publication number Publication date
WO2018220272A1 (en) 2018-12-06
US20210157042A1 (en) 2021-05-27
EP3631538A1 (en) 2020-04-08
JP2020522025A (ja) 2020-07-27
EP3631538B1 (en) 2023-01-18
FI20175505A1 (en) 2018-12-03
EP3631538A4 (en) 2021-03-03
JP7017196B2 (ja) 2022-02-08
FI128629B (en) 2020-09-15
EP3631538B8 (en) 2023-03-22
ES2938898T3 (es) 2023-04-17

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Application publication date: 20200410

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