USRE33387E
(en)
*
|
1985-11-26 |
1990-10-16 |
International Business Machines Corporation |
Atomic force microscope and method for imaging surfaces with atomic resolution
|
EP0252745A3
(en)
*
|
1986-07-11 |
1990-01-24 |
AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY MINISTRY OF INTERNATIONAL TRADE & INDUSTRY |
Relative displacement control apparatus
|
EP0262253A1
(en)
*
|
1986-10-03 |
1988-04-06 |
International Business Machines Corporation |
Micromechanical atomic force sensor head
|
EP0272935B1
(en)
*
|
1986-12-24 |
1994-03-16 |
Canon Kabushiki Kaisha |
Recording device and reproducing device
|
US4800274A
(en)
*
|
1987-02-02 |
1989-01-24 |
The Regents Of The University Of California |
High resolution atomic force microscope
|
JPS63238503A
(ja)
*
|
1987-03-27 |
1988-10-04 |
Jeol Ltd |
走査トンネル顕微鏡におけるチツプ走査装置
|
JPS63304103A
(ja)
*
|
1987-06-05 |
1988-12-12 |
Hitachi Ltd |
走査表面顕微鏡
|
DE3850544T2
(de)
*
|
1987-09-24 |
1994-11-24 |
Canon K.K., Tokio/Tokyo |
Mikrosonde, deren Herstellung und elektronisches Gerät, das diese Mikrosonde gebraucht.
|
JP2553661B2
(ja)
*
|
1987-09-24 |
1996-11-13 |
キヤノン株式会社 |
微小プローグ及びその製造方法
|
EP0566214B1
(en)
*
|
1987-09-24 |
1999-05-26 |
Canon Kabushiki Kaisha |
Microprobe
|
US5255258A
(en)
*
|
1987-09-24 |
1993-10-19 |
Canon Kabushiki Kaisha |
Microprobe, preparation thereof and electronic device by use of said microprobe
|
US4868396A
(en)
*
|
1987-10-13 |
1989-09-19 |
Arizona Board Of Regents, Arizona State University |
Cell and substrate for electrochemical STM studies
|
JPH06105262B2
(ja)
*
|
1987-11-27 |
1994-12-21 |
セイコー電子工業株式会社 |
電気化学測定およびトンネル電流同時測定方法および装置
|
US4906840A
(en)
*
|
1988-01-27 |
1990-03-06 |
The Board Of Trustees Of Leland Stanford Jr., University |
Integrated scanning tunneling microscope
|
JP2577423B2
(ja)
*
|
1988-02-29 |
1997-01-29 |
工業技術院長 |
大ストローク走査型トンネル顕微鏡
|
JP2594452B2
(ja)
*
|
1988-03-04 |
1997-03-26 |
日本電信電話株式会社 |
表面形状測定装置
|
US4841148A
(en)
*
|
1988-03-21 |
1989-06-20 |
The Board Of Trustees Of The University Of Illinois |
Variable temperature scanning tunneling microscope
|
GB8818445D0
(en)
*
|
1988-08-03 |
1988-09-07 |
Jones B L |
Stm probe
|
JPH0275902A
(ja)
*
|
1988-09-13 |
1990-03-15 |
Seiko Instr Inc |
ダイヤモンド探針及びその成形方法
|
US5220555A
(en)
*
|
1988-09-30 |
1993-06-15 |
Canon Kabushiki Kaisha |
Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof
|
JP2896794B2
(ja)
*
|
1988-09-30 |
1999-05-31 |
キヤノン株式会社 |
走査型トンネル電流検出装置,走査型トンネル顕微鏡,及び記録再生装置
|
DE3850968T2
(de)
*
|
1988-10-14 |
1995-03-16 |
Ibm |
Abstandsgesteuerter Tunneleffektwandler und den Wandler verwendende Speichereinheit mit direktem Zugriff.
|
US5210714A
(en)
*
|
1988-10-14 |
1993-05-11 |
International Business Machines Corporation |
Distance-controlled tunneling transducer and direct access storage unit employing the transducer
|
JP2547869B2
(ja)
*
|
1988-11-09 |
1996-10-23 |
キヤノン株式会社 |
プローブユニット,該プローブの駆動方法及び該プローブユニットを備えた走査型トンネル電流検知装置
|
JPH02134503A
(ja)
*
|
1988-11-15 |
1990-05-23 |
Mitsubishi Electric Corp |
走査型トンネル顕微鏡
|
US4943719A
(en)
*
|
1989-01-17 |
1990-07-24 |
The Board Of Trustees Of The Leland Stanford University |
Microminiature cantilever stylus
|
JP2834173B2
(ja)
*
|
1989-02-17 |
1998-12-09 |
株式会社日立製作所 |
走査型トンネル音響顕微鏡
|
US4942299A
(en)
*
|
1989-03-01 |
1990-07-17 |
Midwest Research Institute |
Method and apparatus for differential spectroscopic atomic-imaging using scanning tunneling microscopy
|
US4941753A
(en)
*
|
1989-04-07 |
1990-07-17 |
International Business Machines Corp. |
Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control
|
US4925139A
(en)
*
|
1989-04-28 |
1990-05-15 |
International Business Machines Corporation |
Mechanical stage support for a scanning tunneling microscope
|
JPH02295050A
(ja)
*
|
1989-05-09 |
1990-12-05 |
Olympus Optical Co Ltd |
μ―STMを用いた回路パターン作製装置および回路パターン作製方法
|
JPH02311702A
(ja)
*
|
1989-05-29 |
1990-12-27 |
Olympus Optical Co Ltd |
走査型トンネル顕微鏡装置
|
US5015850A
(en)
*
|
1989-06-20 |
1991-05-14 |
The Board Of Trustees Of The Leland Stanford Junior University |
Microfabricated microscope assembly
|
US5075548A
(en)
*
|
1989-07-17 |
1991-12-24 |
Olympus Optical Co., Ltd. |
Tunnel current probe moving mechanism having parallel cantilevers
|
US4992659A
(en)
*
|
1989-07-27 |
1991-02-12 |
International Business Machines Corporation |
Near-field lorentz force microscopy
|
EP0413042B1
(en)
*
|
1989-08-16 |
1992-12-16 |
International Business Machines Corporation |
Method of producing micromechanical sensors for the afm/stm profilometry and micromechanical afm/stm sensor head
|
US5206702A
(en)
*
|
1989-10-09 |
1993-04-27 |
Olympus Optical Co., Ltd. |
Technique for canceling the effect of external vibration on an atomic force microscope
|
US5126574A
(en)
*
|
1989-10-10 |
1992-06-30 |
The United States Of America As Represented By The Secretary Of Commerce |
Microtip-controlled nanostructure fabrication and multi-tipped field-emission tool for parallel-process nanostructure fabrication
|
US5021364A
(en)
*
|
1989-10-31 |
1991-06-04 |
The Board Of Trustees Of The Leland Stanford Junior University |
Microcantilever with integral self-aligned sharp tetrahedral tip
|
USRE36603E
(en)
*
|
1989-10-13 |
2000-03-07 |
International Business Machines Corp. |
Distance-controlled tunneling transducer and direct access storage unit employing the transducer
|
US5021672A
(en)
*
|
1989-12-22 |
1991-06-04 |
E. I. Du Pont De Nemours And Company |
Etching of nanoscale structures
|
US5253515A
(en)
*
|
1990-03-01 |
1993-10-19 |
Olympus Optical Co., Ltd. |
Atomic probe microscope and cantilever unit for use in the microscope
|
US5055680A
(en)
*
|
1990-04-03 |
1991-10-08 |
Lk Technologies, Inc. |
Scanning tunneling microscope
|
JP2624873B2
(ja)
*
|
1990-05-16 |
1997-06-25 |
松下電器産業株式会社 |
原子間力顕微鏡用探針およびその製造方法
|
EP0468071B1
(en)
*
|
1990-07-25 |
1994-09-14 |
International Business Machines Corporation |
Method of producing micromechanical sensors for the AFM/STM/MFM profilometry and micromechanical AFM/STM/MFM sensor head
|
US5163328A
(en)
*
|
1990-08-06 |
1992-11-17 |
Colin Electronics Co., Ltd. |
Miniature pressure sensor and pressure sensor arrays
|
JP3030574B2
(ja)
*
|
1990-08-16 |
2000-04-10 |
キヤノン株式会社 |
微小変位型情報検知探針素子及びこれを用いた走査型トンネル顕微鏡、原子間力顕微鏡、情報処理装置
|
US5047649A
(en)
*
|
1990-10-09 |
1991-09-10 |
International Business Machines Corporation |
Method and apparatus for writing or etching narrow linewidth patterns on insulating materials
|
DE69023347T2
(de)
*
|
1990-12-21 |
1996-05-30 |
International Business Machines Corp., Armonk, N.Y. |
Integriertes Rastertunnelmikroskop mit pneumatischer und elektrostatischer Steuerung und Verfahren zum Herstellen desselben.
|
US5283437A
(en)
*
|
1990-12-21 |
1994-02-01 |
International Business Machines Corporation |
Pneumatically and electrostatically driven scanning tunneling microscope
|
JP3010318B2
(ja)
*
|
1991-02-26 |
2000-02-21 |
キヤノン株式会社 |
微小プローブ、その製造方法、該プローブを用いた表面観察装置及び情報処理装置
|
US5235187A
(en)
*
|
1991-05-14 |
1993-08-10 |
Cornell Research Foundation |
Methods of fabricating integrated, aligned tunneling tip pairs
|
JP3198355B2
(ja)
*
|
1991-05-28 |
2001-08-13 |
キヤノン株式会社 |
微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置
|
JP3148946B2
(ja)
*
|
1991-05-30 |
2001-03-26 |
キヤノン株式会社 |
探針駆動機構並びに該機構を用いたトンネル電流検出装置、情報処理装置、圧電式アクチュエータ
|
US5606162A
(en)
*
|
1991-06-13 |
1997-02-25 |
British Technology Group Limited |
Microprobe for surface-scanning microscopes
|
US5155361A
(en)
*
|
1991-07-26 |
1992-10-13 |
The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State University |
Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
|
US5319961A
(en)
*
|
1991-09-17 |
1994-06-14 |
Olympus Optical Co., Ltd. |
Cantilever chip for use in scanning probe microscope
|
JP3184619B2
(ja)
*
|
1991-09-24 |
2001-07-09 |
キヤノン株式会社 |
平行平面保持機構及びそれを用いたメモリ装置及びstm装置
|
US5298975A
(en)
*
|
1991-09-27 |
1994-03-29 |
International Business Machines Corporation |
Combined scanning force microscope and optical metrology tool
|
US5763782A
(en)
*
|
1992-03-16 |
1998-06-09 |
British Technology Group Limited |
Micromechanical sensor
|
US5179499A
(en)
*
|
1992-04-14 |
1993-01-12 |
Cornell Research Foundation, Inc. |
Multi-dimensional precision micro-actuator
|
US5267471A
(en)
*
|
1992-04-30 |
1993-12-07 |
Ibm Corporation |
Double cantilever sensor for atomic force microscope
|
JP3029499B2
(ja)
*
|
1992-05-07 |
2000-04-04 |
キヤノン株式会社 |
記録再生装置
|
US5287082A
(en)
*
|
1992-07-02 |
1994-02-15 |
Cornell Research Foundation, Inc. |
Submicron isolated, released resistor structure
|
JP3402661B2
(ja)
*
|
1992-07-06 |
2003-05-06 |
キヤノン株式会社 |
カンチレバー型プローブ、及びこれを用いた情報処理装置
|
US5399415A
(en)
*
|
1993-02-05 |
1995-03-21 |
Cornell Research Foundation, Inc. |
Isolated tungsten microelectromechanical structures
|
JP3054900B2
(ja)
*
|
1993-03-10 |
2000-06-19 |
セイコーインスツルメンツ株式会社 |
微細加工装置
|
DE4309206C1
(de)
*
|
1993-03-22 |
1994-09-15 |
Texas Instruments Deutschland |
Halbleitervorrichtung mit einem Kraft- und/oder Beschleunigungssensor
|
US5536988A
(en)
*
|
1993-06-01 |
1996-07-16 |
Cornell Research Foundation, Inc. |
Compound stage MEM actuator suspended for multidimensional motion
|
US5440920A
(en)
*
|
1994-02-03 |
1995-08-15 |
Molecular Imaging Systems |
Scanning force microscope with beam tracking lens
|
US5753814A
(en)
*
|
1994-05-19 |
1998-05-19 |
Molecular Imaging Corporation |
Magnetically-oscillated probe microscope for operation in liquids
|
US5866805A
(en)
*
|
1994-05-19 |
1999-02-02 |
Molecular Imaging Corporation Arizona Board Of Regents |
Cantilevers for a magnetically driven atomic force microscope
|
US5513518A
(en)
*
|
1994-05-19 |
1996-05-07 |
Molecular Imaging Corporation |
Magnetic modulation of force sensor for AC detection in an atomic force microscope
|
US5515719A
(en)
*
|
1994-05-19 |
1996-05-14 |
Molecular Imaging Corporation |
Controlled force microscope for operation in liquids
|
JP3192887B2
(ja)
*
|
1994-09-21 |
2001-07-30 |
キヤノン株式会社 |
プローブ、該プローブを用いた走査型プローブ顕微鏡、および前記プローブを用いた記録再生装置
|
EP0772876A1
(de)
*
|
1995-04-29 |
1997-05-14 |
International Business Machines Corporation |
Mikromechanisch gefertigter schreib-/lesekopf für ladungsspeicherelemente
|
US5717631A
(en)
*
|
1995-07-21 |
1998-02-10 |
Carnegie Mellon University |
Microelectromechanical structure and process of making same
|
US5834864A
(en)
*
|
1995-09-13 |
1998-11-10 |
Hewlett Packard Company |
Magnetic micro-mover
|
JP3576677B2
(ja)
*
|
1996-01-19 |
2004-10-13 |
キヤノン株式会社 |
静電アクチュエータ及び、該アクチュエータを用いたプローブ、走査型プローブ顕微鏡、加工装置、記録再生装置
|
JP2925114B2
(ja)
*
|
1996-07-22 |
1999-07-28 |
株式会社日立製作所 |
測定装置
|
FR2755224B1
(fr)
*
|
1996-10-24 |
1998-12-04 |
Suisse Electronique Microtech |
Capteur a effet tunnel, notamment pour relever la topographie d'une surface
|
US6088320A
(en)
*
|
1997-02-19 |
2000-07-11 |
International Business Machines Corporation |
Micro-mechanically fabricated read/write head with a strengthening shell on the tip shaft
|
US7156965B1
(en)
|
2001-11-09 |
2007-01-02 |
Veeco Instruments Inc. |
Scanning electrochemical potential microscope
|
DE10155930B4
(de)
|
2001-11-14 |
2020-09-24 |
Nano Analytik Gmbh |
Feldeffekttransistor-Sensor
|
JP3755460B2
(ja)
*
|
2001-12-26 |
2006-03-15 |
ソニー株式会社 |
静電駆動型mems素子とその製造方法、光学mems素子、光変調素子、glvデバイス、レーザディスプレイ、及びmems装置
|
SG101537A1
(en)
*
|
2002-06-03 |
2004-01-30 |
Sensfab Pte Ltd |
Method of forming atomic force microscope tips
|
US20050128927A1
(en)
*
|
2003-12-15 |
2005-06-16 |
Hewlett-Packard Development Co., L.P. |
Electrostatic actuator for contact probe storage device
|
KR100790893B1
(ko)
*
|
2006-10-20 |
2008-01-03 |
삼성전자주식회사 |
볼록한 저항성 팁을 구비한 반도체 탐침 및 그 제조방법
|
WO2019038917A1
(ja)
*
|
2017-08-25 |
2019-02-28 |
株式会社日立ハイテクノロジーズ |
較正用試料、それを用いた電子ビーム調整方法及び電子ビーム装置
|