ES8707021A1 - Un microscopio de exploracion por efecto tunel. - Google Patents

Un microscopio de exploracion por efecto tunel.

Info

Publication number
ES8707021A1
ES8707021A1 ES552715A ES552715A ES8707021A1 ES 8707021 A1 ES8707021 A1 ES 8707021A1 ES 552715 A ES552715 A ES 552715A ES 552715 A ES552715 A ES 552715A ES 8707021 A1 ES8707021 A1 ES 8707021A1
Authority
ES
Spain
Prior art keywords
stripes
tongue
scanning tunneling
tunneling microscope
linked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES552715A
Other languages
English (en)
Other versions
ES552715A0 (es
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of ES552715A0 publication Critical patent/ES552715A0/es
Publication of ES8707021A1 publication Critical patent/ES8707021A1/es
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/861—Scanning tunneling probe
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00—Nanotechnology
    • Y10S977/84—Manufacture, treatment, or detection of nanostructure
    • Y10S977/849—Manufacture, treatment, or detection of nanostructure with scanning probe
    • Y10S977/86—Scanning probe structure
    • Y10S977/872—Positioner

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

MICROSCOPIO DE EXPLORACION POR EFECTO TUNEL. COMPRENDE: UNA SECCION (1) CUADRADA, QUE ESTA ENLAZADA POR UN PRIMER PAR DE BANDAS (2, 3) A UNA SECCION (4) EN FORMA DE L, Y ESTA ULTIMA, A SU VEZ, ESTA ENLAZADA POR UN SEGUNDO PAR DE BANDAS (5, 6) AL CUERPO DE UNA PASTILLA (7); UNA PRIMERA RANURA (8) EN FORMA DE HERRADURA Y UNA SEGUNDA RANURA RECTANGULAR (10); UNA TERCERA RANURA (11), QUE SE EXTIENDE POR DENTRO DE LA RANURA (10); Y UNA PUNTA TUNEL (18) QUE SE ASIENTA EN EL EXTREMO LIBRE DE LA LENGUETA (17), DEBAJO DE LA CUAL SE HA PREVISTO UN CANAL (16). TIENE UTILIDAD EN LABORATORIOS DE INVESTIGACION.
ES552715A 1985-03-07 1986-03-06 Un microscopio de exploracion por efecto tunel. Expired ES8707021A1 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP85102554A EP0194323B1 (en) 1985-03-07 1985-03-07 Scanning tunneling microscope

Publications (2)

Publication Number Publication Date
ES552715A0 ES552715A0 (es) 1987-07-01
ES8707021A1 true ES8707021A1 (es) 1987-07-01

Family

ID=8193351

Family Applications (2)

Application Number Title Priority Date Filing Date
ES552715A Expired ES8707021A1 (es) 1985-03-07 1986-03-06 Un microscopio de exploracion por efecto tunel.
ES557154A Expired ES8802105A1 (es) 1985-03-07 1986-10-30 Metodo de fabricacion de una punta emisora de electrones para un microscopio de exploracion por efecto tunel.

Family Applications After (1)

Application Number Title Priority Date Filing Date
ES557154A Expired ES8802105A1 (es) 1985-03-07 1986-10-30 Metodo de fabricacion de una punta emisora de electrones para un microscopio de exploracion por efecto tunel.

Country Status (6)

Country Link
US (1) US4668865A (es)
EP (1) EP0194323B1 (es)
JP (1) JPH0690005B2 (es)
CA (1) CA1252918A (es)
DE (1) DE3572030D1 (es)
ES (2) ES8707021A1 (es)

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Also Published As

Publication number Publication date
ES552715A0 (es) 1987-07-01
ES557154A0 (es) 1988-03-16
EP0194323B1 (en) 1989-08-02
US4668865A (en) 1987-05-26
JPS61206148A (ja) 1986-09-12
ES8802105A1 (es) 1988-03-16
DE3572030D1 (en) 1989-09-07
EP0194323A1 (en) 1986-09-17
JPH0690005B2 (ja) 1994-11-14
CA1252918A (en) 1989-04-18

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FD1A Patent lapsed

Effective date: 19971201