ES2985958T3 - Métodos y aparatos para microscopía de dispersión interferométrica optimizada - Google Patents

Métodos y aparatos para microscopía de dispersión interferométrica optimizada Download PDF

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Publication number
ES2985958T3
ES2985958T3 ES20792704T ES20792704T ES2985958T3 ES 2985958 T3 ES2985958 T3 ES 2985958T3 ES 20792704 T ES20792704 T ES 20792704T ES 20792704 T ES20792704 T ES 20792704T ES 2985958 T3 ES2985958 T3 ES 2985958T3
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ES
Spain
Prior art keywords
signal
sample
light
spatial filter
signals
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES20792704T
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English (en)
Spanish (es)
Inventor
Matthias Karl Franz Langhorst
Daniel Richard Cole
David John Lehar Graham
Philipp Kukura
Lee Priest
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford University Innovation Ltd
Refeyn Ltd
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Oxford University Innovation Ltd
Refeyn Ltd
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Publication of ES2985958T3 publication Critical patent/ES2985958T3/es
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
    • G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/361—Optical details, e.g. image relay to the camera or image sensor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
    • G02B21/365—Control or image processing arrangements for digital or video microscopes
    • G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/70—Circuitry for compensating brightness variation in the scene
    • H04N23/72—Combination of two or more compensation controls
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/0092—Polarisation microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/14—Condensers affording illumination for phase-contrast observation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Multimedia (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
ES20792704T 2019-10-10 2020-10-09 Métodos y aparatos para microscopía de dispersión interferométrica optimizada Active ES2985958T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB1914669.5A GB2588378A (en) 2019-10-10 2019-10-10 Methods and apparatus for optimised interferometric scattering microscopy
PCT/GB2020/052522 WO2021069921A1 (en) 2019-10-10 2020-10-09 Methods and apparatus for optimised interferometric scattering microscopy

Publications (1)

Publication Number Publication Date
ES2985958T3 true ES2985958T3 (es) 2024-11-07

Family

ID=68619476

Family Applications (1)

Application Number Title Priority Date Filing Date
ES20792704T Active ES2985958T3 (es) 2019-10-10 2020-10-09 Métodos y aparatos para microscopía de dispersión interferométrica optimizada

Country Status (7)

Country Link
US (1) US12111456B2 (OSRAM)
EP (1) EP4042223B1 (OSRAM)
JP (1) JP7624440B2 (OSRAM)
CN (1) CN114787609B (OSRAM)
ES (1) ES2985958T3 (OSRAM)
GB (1) GB2588378A (OSRAM)
WO (1) WO2021069921A1 (OSRAM)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2593194B (en) * 2020-03-18 2022-09-07 Refeyn Ltd Methods and apparatus for optimised interferometric scattering microscopy
CN115793222A (zh) * 2022-11-18 2023-03-14 上海交通大学 一种基于多方位角照明的成像方法及成像系统
CN116297334B (zh) * 2023-01-22 2025-10-03 清华大学 一种高灵敏度的单分子显微成像方法及系统
EP4677330A1 (en) * 2023-03-06 2026-01-14 Holtra Ab Interferometric microscopy
EP4528352A1 (en) 2023-09-20 2025-03-26 Ludwig-Maximilians-Universität München Interferometric scattering microscope with a drift stabilization system

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3117450B2 (ja) 1990-05-10 2000-12-11 日本分光工業株式会社 半透鏡
JP2000249816A (ja) 1998-12-28 2000-09-14 Hitachi Zosen Corp 光学ミラーおよびこの光学ミラーを使用したレーザー投受光装置ならびにレーザー測距装置
KR20020057797A (ko) 1999-04-28 2002-07-12 더 거버닝 카운실 오브 더 유니버시티 오브 토론토 특이적으로 표적화된 촉매적 안타고니스트 및 그 용도
US20060127010A1 (en) 1999-11-03 2006-06-15 Arkansas State University Optical fibers or other waveguide having one or more modeled tap structures for forming desired illumination patterns and method of making the same
US6775009B2 (en) 2000-07-27 2004-08-10 Zetetic Institute Differential interferometric scanning near-field confocal microscopy
JP2003098439A (ja) 2001-09-25 2003-04-03 Olympus Optical Co Ltd 観察切り替え可能な顕微鏡
US7557929B2 (en) 2001-12-18 2009-07-07 Massachusetts Institute Of Technology Systems and methods for phase measurements
US7223986B2 (en) * 2002-08-29 2007-05-29 Olympus Optical Co., Ltd. Laser scanning microscope
KR20050101335A (ko) 2003-02-13 2005-10-21 제테틱 인스티튜트 가로 미분 간섭계 공초점 현미경
US8705040B2 (en) 2004-03-06 2014-04-22 Michael Trainer Methods and apparatus for determining particle characteristics by measuring scattered light
US20060024722A1 (en) 2004-07-30 2006-02-02 Mark Fischer-Colbrie Samples for detection of oncofetal fibronectin and uses thereof
JP2007225392A (ja) 2006-02-22 2007-09-06 Spectratech Inc 光干渉装置
US8115919B2 (en) 2007-05-04 2012-02-14 The General Hospital Corporation Methods, arrangements and systems for obtaining information associated with a sample using optical microscopy
JP5259154B2 (ja) 2007-10-24 2013-08-07 オリンパス株式会社 走査型レーザ顕微鏡
US8570649B2 (en) 2009-10-29 2013-10-29 California Institute Of Technology Dual-mode raster point scanning/light sheet illumination microscope
WO2011132586A1 (ja) 2010-04-23 2011-10-27 浜松ホトニクス株式会社 細胞観察装置および細胞観察方法
FR2960291B1 (fr) * 2010-05-18 2015-04-03 Lltech Man Methode et dispositif de microscopie interferentielle plein champ a haute resolution
JP5492796B2 (ja) 2011-01-20 2014-05-14 株式会社日立製作所 光学装置
JP5611149B2 (ja) 2011-08-23 2014-10-22 株式会社日立ハイテクノロジーズ 光学顕微鏡装置及びこれを備えた検査装置
US9316536B2 (en) 2013-06-24 2016-04-19 ASTRODESIGN, Inc. Spatial frequency reproducing apparatus and optical distance measuring apparatus
JP6230358B2 (ja) 2013-10-07 2017-11-15 アストロデザイン株式会社 光学的距離計測装置
US9170411B2 (en) 2013-10-11 2015-10-27 Panasonic Intellectual Property Management Co., Ltd. Scanning optical microscope
GB201318919D0 (en) 2013-10-25 2013-12-11 Isis Innovation Compact microscope
GB2552195A (en) * 2016-07-13 2018-01-17 Univ Oxford Innovation Ltd Interferometric scattering microscopy
EP3276389A1 (en) 2016-07-27 2018-01-31 Fundació Institut de Ciències Fotòniques A common-path interferometric scattering imaging system and a method of using common-path interferometric scattering imaging to detect an object
US10422984B2 (en) * 2017-05-12 2019-09-24 Applied Materials, Inc. Flexible mode scanning optical microscopy and inspection system

Also Published As

Publication number Publication date
GB2588378A (en) 2021-04-28
US12111456B2 (en) 2024-10-08
EP4042223B1 (en) 2024-05-29
JP7624440B2 (ja) 2025-01-30
JP2022552253A (ja) 2022-12-15
EP4042223C0 (en) 2024-05-29
US20220365329A1 (en) 2022-11-17
CN114787609A (zh) 2022-07-22
CN114787609B (zh) 2025-09-09
GB201914669D0 (en) 2019-11-27
WO2021069921A1 (en) 2021-04-15
EP4042223A1 (en) 2022-08-17

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