ES2524046T3 - Estructura de cierre hermético para dispositivos de visualización - Google Patents

Estructura de cierre hermético para dispositivos de visualización Download PDF

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Publication number
ES2524046T3
ES2524046T3 ES02785827.3T ES02785827T ES2524046T3 ES 2524046 T3 ES2524046 T3 ES 2524046T3 ES 02785827 T ES02785827 T ES 02785827T ES 2524046 T3 ES2524046 T3 ES 2524046T3
Authority
ES
Spain
Prior art keywords
layer
oxide
dielectric material
nitride
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES02785827.3T
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English (en)
Inventor
Herbert Lifka
Eliav I. Haskal
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Koninklijke Philips NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninklijke Philips NV filed Critical Koninklijke Philips NV
Application granted granted Critical
Publication of ES2524046T3 publication Critical patent/ES2524046T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/805—Electrodes
    • H10K50/81—Anodes
    • H10K50/816—Multilayers, e.g. transparent multilayers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/842—Containers
    • H10K50/8426—Peripheral sealing arrangements, e.g. adhesives, sealants
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/844—Encapsulations
    • H10K50/8445—Encapsulations multilayered coatings having a repetitive structure, e.g. having multiple organic-inorganic bilayers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/84—Passivation; Containers; Encapsulations
    • H10K50/846—Passivation; Containers; Encapsulations comprising getter material or desiccants

Abstract

Una estructura de cierre hermético (6) para un dispositivo de visualización (1), caracterizada por que la estructura de cierre hermético (6) comprende una primera capa (7) de un primer material dieléctrico formada sobre dicho dispositivo (1) y una segunda capa (8) de un segundo material dieléctrico formada sobre la primera capa (7), en la que al menos una tercera capa (9) de un tercer material dieléctrico se forma en la parte superior de la segunda capa (8), y que comprende opcionalmente una capa extractora formada entre la segunda capa y la tercera capa, en la que el primer y tercer materiales dieléctricos son nitruro de silicio, y en la que el segundo material dieléctrico se selecciona a partir de óxido de silicio, oxinitruro de silicio, oxifloruro de silicio, óxido de titanio, óxido de tántalo, óxido de zirconio, óxido de hafnio, óxido de aluminio, o cualquier mezcla de los mismos; proporcionando esto una estructura de cierre hermético que comprende una estructura de capa de nitruro - capa de óxido - capa de nitruro o una estructura de capa de nitruro - capa de óxido - capa extractora - capa de nitruro.

Description

imagen1
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imagen3
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Claims (1)

  1. imagen1
ES02785827.3T 2001-12-13 2002-12-03 Estructura de cierre hermético para dispositivos de visualización Expired - Lifetime ES2524046T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP01204874 2001-12-13
EP01204874 2001-12-13
PCT/IB2002/005132 WO2003050894A2 (en) 2001-12-13 2002-12-03 Sealing structure for display devices

Publications (1)

Publication Number Publication Date
ES2524046T3 true ES2524046T3 (es) 2014-12-03

Family

ID=8181426

Family Applications (1)

Application Number Title Priority Date Filing Date
ES02785827.3T Expired - Lifetime ES2524046T3 (es) 2001-12-13 2002-12-03 Estructura de cierre hermético para dispositivos de visualización

Country Status (9)

Country Link
US (1) US7265807B2 (es)
EP (1) EP1459394B1 (es)
JP (1) JP4464682B2 (es)
KR (1) KR20040066898A (es)
CN (1) CN100483782C (es)
AU (1) AU2002351114A1 (es)
ES (1) ES2524046T3 (es)
TW (1) TWI265747B (es)
WO (1) WO2003050894A2 (es)

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Also Published As

Publication number Publication date
CN1636282A (zh) 2005-07-06
JP2005512299A (ja) 2005-04-28
AU2002351114A1 (en) 2003-06-23
EP1459394B1 (en) 2014-10-29
EP1459394A2 (en) 2004-09-22
JP4464682B2 (ja) 2010-05-19
TWI265747B (en) 2006-11-01
US7265807B2 (en) 2007-09-04
KR20040066898A (ko) 2004-07-27
CN100483782C (zh) 2009-04-29
TW200410582A (en) 2004-06-16
WO2003050894A2 (en) 2003-06-19
US20050041193A1 (en) 2005-02-24
WO2003050894A3 (en) 2003-11-06

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