ES2279639T3 - Sensor con estructura de resonancia, en especial sensor de aceleracion o de velocidad de giro, asi como dispositivo y procedimiento de autoverificacion. - Google Patents
Sensor con estructura de resonancia, en especial sensor de aceleracion o de velocidad de giro, asi como dispositivo y procedimiento de autoverificacion. Download PDFInfo
- Publication number
- ES2279639T3 ES2279639T3 ES99955832T ES99955832T ES2279639T3 ES 2279639 T3 ES2279639 T3 ES 2279639T3 ES 99955832 T ES99955832 T ES 99955832T ES 99955832 T ES99955832 T ES 99955832T ES 2279639 T3 ES2279639 T3 ES 2279639T3
- Authority
- ES
- Spain
- Prior art keywords
- sensor
- vibration
- signal
- test signal
- output signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000001133 acceleration Effects 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title claims description 21
- 238000012795 verification Methods 0.000 title claims description 21
- 238000012360 testing method Methods 0.000 claims abstract description 126
- 230000000737 periodic effect Effects 0.000 claims abstract description 39
- 238000005259 measurement Methods 0.000 claims description 65
- 230000004913 activation Effects 0.000 claims description 40
- 238000001514 detection method Methods 0.000 claims description 11
- 230000004048 modification Effects 0.000 claims description 6
- 238000012986 modification Methods 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- 230000001419 dependent effect Effects 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 description 8
- 239000000725 suspension Substances 0.000 description 5
- 230000003213 activating effect Effects 0.000 description 4
- 239000003607 modifier Substances 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
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- 230000008901 benefit Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 102000018779 Replication Protein C Human genes 0.000 description 1
- 108010027647 Replication Protein C Proteins 0.000 description 1
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- 238000005452 bending Methods 0.000 description 1
- 210000001520 comb Anatomy 0.000 description 1
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- 230000001939 inductive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5614—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Pressure Welding/Diffusion-Bonding (AREA)
- Measurement Of Radiation (AREA)
- Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19845185 | 1998-10-01 | ||
| DE19845185A DE19845185B4 (de) | 1998-10-01 | 1998-10-01 | Sensor mit Resonanzstruktur sowie Vorrichtung und Verfahren zum Selbsttest eines derartigen Sensors |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES2279639T3 true ES2279639T3 (es) | 2007-08-16 |
Family
ID=7883028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES99955832T Expired - Lifetime ES2279639T3 (es) | 1998-10-01 | 1999-10-01 | Sensor con estructura de resonancia, en especial sensor de aceleracion o de velocidad de giro, asi como dispositivo y procedimiento de autoverificacion. |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6564637B1 (enExample) |
| EP (1) | EP1123485B1 (enExample) |
| JP (1) | JP4691255B2 (enExample) |
| KR (1) | KR20010106498A (enExample) |
| CN (1) | CN1320207A (enExample) |
| AT (1) | ATE349678T1 (enExample) |
| DE (2) | DE19845185B4 (enExample) |
| ES (1) | ES2279639T3 (enExample) |
| WO (1) | WO2000020826A1 (enExample) |
Families Citing this family (86)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6845667B1 (en) * | 1999-09-16 | 2005-01-25 | Watson Industries, Inc. | High Q angular rate sensing gyroscope |
| US6272925B1 (en) * | 1999-09-16 | 2001-08-14 | William S. Watson | High Q angular rate sensing gyroscope |
| EP1164378B1 (en) * | 2000-06-16 | 2012-03-14 | Infineon Technologies AG | Acceleration Sensor |
| US6792792B2 (en) * | 2001-06-04 | 2004-09-21 | Kelsey-Hayes Company | Diagnostic test for a resonant micro electro mechanical system |
| US6531884B1 (en) | 2001-08-27 | 2003-03-11 | Rosemount Inc. | Diagnostics for piezoelectric sensor |
| DE10235370A1 (de) * | 2002-08-02 | 2004-02-12 | Robert Bosch Gmbh | Mikromechanisches Bauelement |
| DE10248736B4 (de) * | 2002-10-18 | 2005-02-03 | Litef Gmbh | Verfahren zur Ermittlung eines Nullpunktfehlers eines Corioliskreisels |
| DE10317159B4 (de) * | 2003-04-14 | 2007-10-11 | Litef Gmbh | Verfahren zur Kompensation eines Nullpunktfehlers in einem Corioliskreisel |
| DE10317158B4 (de) * | 2003-04-14 | 2007-05-10 | Litef Gmbh | Verfahren zur Ermittlung eines Nullpunktfehlers in einem Corioliskreisel |
| DE10321962B4 (de) * | 2003-05-15 | 2005-08-18 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Verfahren und Vorrichtung zum Simulieren einer Drehrate und Verwendung von simulierten Drehraten zur initialen Kalibrierung von Drehratensensoren oder zur In-Betrieb-Nachkalibrierung von Drehratensensoren |
| EP1639315B1 (de) | 2003-06-30 | 2009-11-25 | Continental Automotive GmbH | Verfahren zur überwachung eines drehratensensors |
| JP4210684B2 (ja) | 2003-06-30 | 2009-01-21 | シーメンス アクチエンゲゼルシヤフト | 回転速度センサの監視方法 |
| JP4645013B2 (ja) * | 2003-10-03 | 2011-03-09 | パナソニック株式会社 | 加速度センサ及びそれを用いた複合センサ |
| JP4529444B2 (ja) * | 2004-01-13 | 2010-08-25 | パナソニック株式会社 | 角速度センサ |
| JP4608435B2 (ja) * | 2004-01-20 | 2011-01-12 | セイコーエプソン株式会社 | 物理量測定装置 |
| US7086270B2 (en) * | 2004-02-24 | 2006-08-08 | Analog Devices, Inc. | Method for continuous sensor self-test |
| US20050268716A1 (en) * | 2004-06-08 | 2005-12-08 | Honeywell International Inc. | Built in test for mems vibratory type inertial sensors |
| DE102004030038A1 (de) | 2004-06-22 | 2006-01-12 | Hahn-Schickard-Gesellschaft für angewandte Forschung e.V. | Beschleunigungssensor und Verfahren zum Erfassen einer Beschleunigung |
| DE102004030380B4 (de) * | 2004-06-23 | 2010-07-29 | Eads Deutschland Gmbh | Mikromechanischer Drucksensor und Verfahren zum Selbsttest eines solchen |
| JP2006153715A (ja) * | 2004-11-30 | 2006-06-15 | Japan Aviation Electronics Industry Ltd | 振動ジャイロ |
| DE102005004775A1 (de) * | 2005-02-01 | 2006-08-10 | Robert Bosch Gmbh | Sensor mit Selbsttest |
| DE102005043559A1 (de) * | 2005-09-12 | 2007-03-15 | Siemens Ag | Verfahren und Anordnung zur Überwachung einer Sensoranordnung |
| DE102005043592A1 (de) * | 2005-09-12 | 2007-03-15 | Siemens Ag | Verfahren zum Betrieb eines Vibrationskreisels und Sensoranordnung |
| DE102005043560A1 (de) * | 2005-09-12 | 2007-03-15 | Siemens Ag | Verfahren zum Betrieb eines Vibrationskreisels und Sensoranordnung |
| DE102006019521B4 (de) * | 2006-04-27 | 2017-03-09 | Robert Bosch Gmbh | Schaltung und Verfahren zur Überwachung wenigstens eines ersten Luftdrucksensors |
| KR100812571B1 (ko) * | 2006-11-27 | 2008-03-13 | 한국표준과학연구원 | 빔의 횡방향 진동을 이용한 가속도계 교정방법 및 장치 |
| US8443672B2 (en) * | 2007-01-12 | 2013-05-21 | Lockheed Martin Corporation | Low-power shock and vibration sensors and methods of making sensors |
| FR2917731B1 (fr) * | 2007-06-25 | 2009-10-23 | Commissariat Energie Atomique | Dispositif resonant a detection piezoresistive realise en technologies de surface |
| FR2919067B1 (fr) * | 2007-07-19 | 2009-08-28 | Sagem Defense Securite | Procede de mesure d'une acceleration au moyen d'un accelerometre vibrant piezo-electrique et dispositif de mesure correspondant |
| DE102007051885A1 (de) * | 2007-10-30 | 2009-05-07 | Lucas Automotive Gmbh | Technik zum Überprüfen eines Kraftfahrzeug-Sensors |
| JP5391579B2 (ja) * | 2008-05-15 | 2014-01-15 | 船井電機株式会社 | 振動素子 |
| IL191755A0 (en) * | 2008-05-27 | 2009-05-04 | Sabra De Fence Technologies Lt | Intrusion detection system and its sensors |
| DE102008025866B4 (de) * | 2008-05-29 | 2011-04-14 | Spektra Schwingungstechnik Und Akustik Gmbh Dresden | Verfahren und Vorrichtung zur Kalibrierung von Beschleunigungs- und Kraftsensoren |
| DE102008033336B4 (de) * | 2008-07-16 | 2017-05-04 | Endress + Hauser Gmbh + Co. Kg | Verfahren zur Überprüfung eines Messgerätes |
| DE102009000743B4 (de) * | 2009-02-10 | 2024-01-18 | Robert Bosch Gmbh | Vibrationskompensation für Drehratensensoren |
| US8151641B2 (en) * | 2009-05-21 | 2012-04-10 | Analog Devices, Inc. | Mode-matching apparatus and method for micromachined inertial sensors |
| DE102009031182A1 (de) * | 2009-06-29 | 2010-12-30 | Brüel & Kjaer Vibro GmbH | Verfahren und Vorrichtung zur Überwachung eines piezoelektrischen Sensorsystems |
| DE102009028173A1 (de) * | 2009-07-31 | 2011-02-10 | Robert Bosch Gmbh | Sensorvorrichtung und Herstellungsverfahren für eine Sensorvorrichtung |
| US8266961B2 (en) | 2009-08-04 | 2012-09-18 | Analog Devices, Inc. | Inertial sensors with reduced sensitivity to quadrature errors and micromachining inaccuracies |
| US8783103B2 (en) * | 2009-08-21 | 2014-07-22 | Analog Devices, Inc. | Offset detection and compensation for micromachined inertial sensors |
| DE102009029073B4 (de) * | 2009-09-01 | 2020-02-13 | Robert Bosch Gmbh | Verfahren zur Durchführung eines Selbsttests für eine mikromechanische Sensorvorrichtung und entsprechende mikromechanische Sensorvorrichtung |
| US8701459B2 (en) * | 2009-10-20 | 2014-04-22 | Analog Devices, Inc. | Apparatus and method for calibrating MEMS inertial sensors |
| FR2953295B1 (fr) * | 2009-12-02 | 2012-05-18 | Sagem Defense Securite | Procede de detection de panne d'un capteur frequentiel et circuit pour la mise en oeuvre de ce procede |
| IT1397594B1 (it) | 2009-12-21 | 2013-01-16 | St Microelectronics Rousset | Giroscopio microelettromeccanico con funzione di auto-test continua e metodo di controllo di un giroscopio microelettromeccanico. |
| DE102010010931A1 (de) * | 2010-03-10 | 2011-09-15 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Piezoresistiver Wandler |
| CN101886924B (zh) * | 2010-06-09 | 2012-02-22 | 中国科学院电工研究所 | 一种八电极静电陀螺仪位移信号提取电路 |
| DE102010029903A1 (de) * | 2010-06-10 | 2011-12-15 | Robert Bosch Gmbh | Sensoranordnung und Verfahren zur Online-Überwachung einer Sensoranordnung |
| US9874609B2 (en) | 2010-09-24 | 2018-01-23 | Infineon Technologies Ag | Sensor self-diagnostics using multiple signal paths |
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| US9346441B2 (en) | 2010-09-24 | 2016-05-24 | Infineon Technologies Ag | Sensor self-diagnostics using multiple signal paths |
| DE102011006427A1 (de) * | 2011-03-30 | 2012-10-04 | Robert Bosch Gmbh | Drehratensensor und Verfahren zur Kalibrierung eines Drehratensensors |
| CN103582607B (zh) * | 2011-06-30 | 2017-05-17 | 惠普发展公司，有限责任合伙企业 | Mems传感器的校准 |
| CN102299858B (zh) * | 2011-09-17 | 2012-09-12 | 许明华 | 一种使网络交换设备具有远端感知功能的方法、系统及设备 |
| DE102011119949A1 (de) | 2011-12-01 | 2013-06-06 | Northrop Grumman Litef Gmbh | Regelungsvorrichtung, Drehratensensor und Verfahren zum Betrieb einer Regelungsvorrichtung mit harmonischem Sollwertsignal |
| KR101319712B1 (ko) * | 2011-12-26 | 2013-10-17 | 삼성전기주식회사 | 자이로센서 구동회로, 자이로센서 시스템 및 자이로센서 구동 방법 |
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| US9246467B2 (en) * | 2012-05-31 | 2016-01-26 | Texas Instruments Incorporated | Integrated resonator with a mass bias |
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| JP5880499B2 (ja) * | 2013-08-19 | 2016-03-09 | 横河電機株式会社 | 振動式圧力センサ及びその製造方法 |
| EP2887014B1 (fr) | 2013-12-19 | 2020-02-05 | EM Microelectronic-Marin SA | Circuit électronique de mesure de la vitesse de rotation dans un gyroscope du type MEMS et procédé pour sa mise en action |
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| US10119834B2 (en) * | 2015-12-10 | 2018-11-06 | Panasonic Corporation | MEMS sensor with voltage sensing of movable mass |
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| DE102017219467A1 (de) * | 2017-11-01 | 2019-05-02 | Volkswagen Aktiengesellschaft | Verfahren und Vorrichtung zum Betreiben einer Kraftfahrzeugfunktion |
| CN110221098A (zh) * | 2018-03-01 | 2019-09-10 | 中国科学院微电子研究所 | 硅微谐振式加速度计及其自测试方法 |
| IT201900000989A1 (it) | 2019-01-23 | 2020-07-23 | St Microelectronics Srl | Circuito per rilevare un segnale analogico generato da un sensore, sistema elettronico e procedimento corrispondenti |
| DE102019105233A1 (de) * | 2019-03-01 | 2020-09-03 | Rolls-Royce Deutschland Ltd & Co Kg | Verfahren und Vorrichtung zur Kalibrierung von Dehnungsmessstreifen |
| US11320452B2 (en) | 2019-06-26 | 2022-05-03 | Stmicroelectronics, Inc. | MEMS accelerometer self-test using an active mobile mass deflection technique |
| US11175138B2 (en) | 2019-06-26 | 2021-11-16 | Stmicroelectronics, Inc. | MEMS gyroscope control circuit |
| US11255670B2 (en) | 2019-06-26 | 2022-02-22 | Stmicroelectronics, Inc. | MEMS gyroscope self-test using a technique for deflection of the sensing mobile mass |
| US11162790B2 (en) * | 2019-06-26 | 2021-11-02 | Stmicroelectronics, Inc. | MEMS gyroscope start-up process and circuit |
| CN110568220B (zh) * | 2019-08-27 | 2021-04-30 | 华东光电集成器件研究所 | 一种抗干扰耐过载mems加速度计 |
| DE102019220544A1 (de) * | 2019-12-23 | 2021-06-24 | Robert Bosch Gmbh | Sensoranordnung sowie Verfahren zum Betreiben einer Sensoranordnung |
| US11307218B2 (en) * | 2020-05-22 | 2022-04-19 | Invensense, Inc. | Real-time isolation of self-test and linear acceleration signals |
| CN114264329A (zh) * | 2021-12-25 | 2022-04-01 | 西安交通大学 | 一种基于模糊控制的光电编码器振动可靠性测试系统及方法 |
| DE102022129037A1 (de) * | 2022-11-03 | 2024-05-08 | Krohne Messtechnik Gmbh | Verfahren zum Testen eines Coriolis-Massedurchflussmessgeräts |
| DE102023212476A1 (de) * | 2023-12-11 | 2025-06-12 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zur Erfassung, Verfahren zur Kompensation, Verfahren zum Betrieb und Drucksensor |
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| DE3809299A1 (de) * | 1988-03-19 | 1989-09-28 | Bosch Gmbh Robert | Elektronische einrichtung |
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| JP2500565B2 (ja) * | 1992-05-18 | 1996-05-29 | 株式会社明電舎 | 角加速度測定装置 |
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| US5834646A (en) | 1995-04-12 | 1998-11-10 | Sensonor Asa | Force sensor device |
| DE19528961C2 (de) * | 1995-08-08 | 1998-10-29 | Daimler Benz Ag | Mikromechanischer Drehratensensor (DRS) und Sensoranordnung |
| JP3102320B2 (ja) * | 1995-09-29 | 2000-10-23 | オムロン株式会社 | センサ装置 |
| DE19853063B4 (de) * | 1997-11-18 | 2011-07-28 | DENSO CORPORATION, Aichi-pref. | Winkelgeschwindigkeitssensor und Diagnosesystem dafür |
| DE19812773C2 (de) | 1998-03-24 | 2002-11-14 | Conti Temic Microelectronic | Mikrosensor mit einer Resonatorstruktur |
-
1998
- 1998-10-01 DE DE19845185A patent/DE19845185B4/de not_active Expired - Lifetime
-
1999
- 1999-10-01 JP JP2000574895A patent/JP4691255B2/ja not_active Expired - Fee Related
- 1999-10-01 KR KR1020017004178A patent/KR20010106498A/ko not_active Withdrawn
- 1999-10-01 DE DE59914103T patent/DE59914103D1/de not_active Expired - Lifetime
- 1999-10-01 EP EP99955832A patent/EP1123485B1/de not_active Expired - Lifetime
- 1999-10-01 WO PCT/DE1999/003163 patent/WO2000020826A1/de not_active Ceased
- 1999-10-01 CN CN99811470A patent/CN1320207A/zh active Pending
- 1999-10-01 ES ES99955832T patent/ES2279639T3/es not_active Expired - Lifetime
- 1999-10-01 US US09/806,404 patent/US6564637B1/en not_active Expired - Lifetime
- 1999-10-01 AT AT99955832T patent/ATE349678T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR20010106498A (ko) | 2001-11-29 |
| US6564637B1 (en) | 2003-05-20 |
| DE19845185B4 (de) | 2005-05-04 |
| EP1123485B1 (de) | 2006-12-27 |
| WO2000020826A1 (de) | 2000-04-13 |
| JP4691255B2 (ja) | 2011-06-01 |
| EP1123485A1 (de) | 2001-08-16 |
| JP2002526761A (ja) | 2002-08-20 |
| CN1320207A (zh) | 2001-10-31 |
| DE19845185A1 (de) | 2000-04-20 |
| DE59914103D1 (de) | 2007-02-08 |
| ATE349678T1 (de) | 2007-01-15 |
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