ES2191479T3 - Produccion de monocristales a granel de nitruro de aluminio, carburo de silicio y aleacion de nitruro de aluminio:carburo de silicio. - Google Patents

Produccion de monocristales a granel de nitruro de aluminio, carburo de silicio y aleacion de nitruro de aluminio:carburo de silicio.

Info

Publication number
ES2191479T3
ES2191479T3 ES99961511T ES99961511T ES2191479T3 ES 2191479 T3 ES2191479 T3 ES 2191479T3 ES 99961511 T ES99961511 T ES 99961511T ES 99961511 T ES99961511 T ES 99961511T ES 2191479 T3 ES2191479 T3 ES 2191479T3
Authority
ES
Spain
Prior art keywords
silicon carbide
aluminum nitride
sic
monocristals
bulk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES99961511T
Other languages
English (en)
Inventor
Charles Eric Hunter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wolfspeed Inc
Original Assignee
Cree Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cree Inc filed Critical Cree Inc
Application granted granted Critical
Publication of ES2191479T3 publication Critical patent/ES2191479T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/36—Carbides
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/10—Inorganic compounds or compositions
    • C30B29/38—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Ceramic Products (AREA)

Abstract

Un método para producir monocristales a granel de (AlN)x:(SiC)y donde x + y = 1, y donde 0 < x < 1, y donde 0 < y <1; comprendiendo el método las etapas de: proporcionar en un recinto (20) de crecimiento de cristales, especies en estado vapor de los elementos seleccionados Al, Si, N, y C necesarios para hacer crecer monocristales a granel; proporcionar múltiples sitios (80) de nucleación en el recinto de crecimiento de cristales; enfriar los sitios de nucleación a una temperatura inferior a la de las superficies circundantes en el recinto de crecimiento de cristales; y depositar las especies en estado de vapor en condiciones que dictan el crecimiento de AlNx:SiCymonocristalino, que se origina en los respectivos sitios de nucleación.
ES99961511T 1998-10-09 1999-10-08 Produccion de monocristales a granel de nitruro de aluminio, carburo de silicio y aleacion de nitruro de aluminio:carburo de silicio. Expired - Lifetime ES2191479T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/169,401 US6063185A (en) 1998-10-09 1998-10-09 Production of bulk single crystals of aluminum nitride, silicon carbide and aluminum nitride: silicon carbide alloy

Publications (1)

Publication Number Publication Date
ES2191479T3 true ES2191479T3 (es) 2003-09-01

Family

ID=22615524

Family Applications (1)

Application Number Title Priority Date Filing Date
ES99961511T Expired - Lifetime ES2191479T3 (es) 1998-10-09 1999-10-08 Produccion de monocristales a granel de nitruro de aluminio, carburo de silicio y aleacion de nitruro de aluminio:carburo de silicio.

Country Status (12)

Country Link
US (1) US6063185A (es)
EP (1) EP1144737B1 (es)
JP (1) JP4530542B2 (es)
KR (1) KR100651149B1 (es)
CN (1) CN1174126C (es)
AT (1) ATE231197T1 (es)
AU (1) AU1807000A (es)
CA (1) CA2344342C (es)
DE (1) DE69904965T2 (es)
ES (1) ES2191479T3 (es)
MY (1) MY121858A (es)
WO (1) WO2000022203A2 (es)

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Also Published As

Publication number Publication date
MY121858A (en) 2006-02-28
DE69904965D1 (de) 2003-02-20
JP2002527342A (ja) 2002-08-27
CA2344342C (en) 2009-05-12
EP1144737A3 (en) 2002-09-11
AU1807000A (en) 2000-05-01
CA2344342A1 (en) 2000-04-20
JP4530542B2 (ja) 2010-08-25
CN1344336A (zh) 2002-04-10
CN1174126C (zh) 2004-11-03
KR100651149B1 (ko) 2006-11-28
KR20010079970A (ko) 2001-08-22
ATE231197T1 (de) 2003-02-15
WO2000022203A3 (en) 2001-09-27
WO2000022203A2 (en) 2000-04-20
DE69904965T2 (de) 2003-11-13
US6063185A (en) 2000-05-16
EP1144737A2 (en) 2001-10-17
EP1144737B1 (en) 2003-01-15

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