ES2180970T3 - Pastilla sustituible de carburo de silicio colada en cinta. - Google Patents

Pastilla sustituible de carburo de silicio colada en cinta.

Info

Publication number
ES2180970T3
ES2180970T3 ES97917718T ES97917718T ES2180970T3 ES 2180970 T3 ES2180970 T3 ES 2180970T3 ES 97917718 T ES97917718 T ES 97917718T ES 97917718 T ES97917718 T ES 97917718T ES 2180970 T3 ES2180970 T3 ES 2180970T3
Authority
ES
Spain
Prior art keywords
tape
colada
silk
carbide
substitute pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES97917718T
Other languages
English (en)
Inventor
Thomas M Holmes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Ceramics and Plastics Inc
Original Assignee
Saint Gobain Ceramics and Plastics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Ceramics and Plastics Inc filed Critical Saint Gobain Ceramics and Plastics Inc
Application granted granted Critical
Publication of ES2180970T3 publication Critical patent/ES2180970T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/0051—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

LA PRESENTE INVENCION SE REFIERE AL COLADO EN BANDA DE UNA PASTA LIQUIDA DE CARBURO DE SILICIO, PARA PRODUCIR EVENTUALMENTE UNA MICROPLAQUETA DE SILICIO CON UN GROSOR COMPRENDIDO ENTRE 0,5 Y 1 MM Y UN DIAMETRO DE AL MENOS 100 MM. DICHA MICROPLAQUETA TIENE UNA RESISTENCIA DE AL MENOS 30 MPA Y UNA POROSIDAD CARACTERIZADA PORQUE AL MENOS EL 85 % DE LOS POROS NO SON SUPERIORES A 12 MICRONES.
ES97917718T 1996-04-01 1997-03-31 Pastilla sustituible de carburo de silicio colada en cinta. Expired - Lifetime ES2180970T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/625,383 US5904892A (en) 1996-04-01 1996-04-01 Tape cast silicon carbide dummy wafer

Publications (1)

Publication Number Publication Date
ES2180970T3 true ES2180970T3 (es) 2003-02-16

Family

ID=24505827

Family Applications (1)

Application Number Title Priority Date Filing Date
ES97917718T Expired - Lifetime ES2180970T3 (es) 1996-04-01 1997-03-31 Pastilla sustituible de carburo de silicio colada en cinta.

Country Status (10)

Country Link
US (1) US5904892A (es)
EP (1) EP0891311B1 (es)
JP (2) JPH11506570A (es)
KR (1) KR100276154B1 (es)
CN (1) CN1214666A (es)
AT (1) ATE220055T1 (es)
DE (1) DE69713758T2 (es)
DK (1) DK0891311T3 (es)
ES (1) ES2180970T3 (es)
WO (1) WO1997036843A1 (es)

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US20040173948A1 (en) * 2002-09-19 2004-09-09 Pandelisev Kiril A. Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication
JP4198349B2 (ja) * 2001-11-08 2008-12-17 株式会社ブリヂストン 炭化ケイ素焼結体の洗浄方法
US20030233977A1 (en) * 2002-06-20 2003-12-25 Yeshwanth Narendar Method for forming semiconductor processing components
US6825123B2 (en) * 2003-04-15 2004-11-30 Saint-Goban Ceramics & Plastics, Inc. Method for treating semiconductor processing components and components formed thereby
DE10328842B4 (de) 2003-06-26 2007-03-01 Siltronic Ag Suszeptor für eine chemische Gasphasenabscheidung, Verfahren zur Bearbeitung einer Halbleiterscheibe durch chemische Gasphasenabscheidung und nach dem Verfahren bearbeitete Halbleiterscheibe
US7132066B2 (en) * 2003-09-30 2006-11-07 Ngk Insulators, Ltd. Method for producing honeycomb structure and honeycomb structure
US7501370B2 (en) * 2004-01-06 2009-03-10 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide wafer boats
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
CN100388412C (zh) * 2004-04-23 2008-05-14 上海华虹Nec电子有限公司 改善炉体两端膜厚面内均一性的方法
EP2011018B1 (en) 2006-04-12 2016-07-13 Soft Machines, Inc. Apparatus and method for processing an instruction matrix specifying parallel and dependent operations
EP2122461A4 (en) 2006-11-14 2010-03-24 Soft Machines Inc DEVICE AND METHOD FOR PROCESSING COMMUNICATIONS IN A MULTITHREAD ARCHITECTURE WITH CONTEXT CHANGES
JP2010535696A (ja) 2007-08-03 2010-11-25 エアシブ・インコーポレーテッド 多孔質体および方法
US7727919B2 (en) 2007-10-29 2010-06-01 Saint-Gobain Ceramics & Plastics, Inc. High resistivity silicon carbide
US8058174B2 (en) * 2007-12-20 2011-11-15 Coorstek, Inc. Method for treating semiconductor processing components and components formed thereby
KR100990513B1 (ko) * 2008-07-10 2010-10-29 주식회사 도시환경이엔지 태양전지 셀의 웨이퍼 제조장치 및 이를 이용한 웨이퍼제조방법
US8894920B2 (en) * 2008-10-31 2014-11-25 Corning Incorporated Methods and apparatus for casting ceramic sheets
US8277743B1 (en) 2009-04-08 2012-10-02 Errcive, Inc. Substrate fabrication
US8359829B1 (en) 2009-06-25 2013-01-29 Ramberg Charles E Powertrain controls
JP5628530B2 (ja) * 2010-02-10 2014-11-19 株式会社ブリヂストン 貼り合わせ基板用支持基板およびその製造方法
US9833932B1 (en) 2010-06-30 2017-12-05 Charles E. Ramberg Layered structures
EP2616928B1 (en) 2010-09-17 2016-11-02 Soft Machines, Inc. Single cycle multi-branch prediction including shadow cache for early far branch prediction
US8865607B2 (en) 2010-11-22 2014-10-21 Saint-Gobain Ceramics & Plastics, Inc. Infiltrated silicon carbide bodies and methods of making
JP2012201543A (ja) * 2011-03-25 2012-10-22 Sumitomo Electric Ind Ltd 炭化珪素基板
EP2689326B1 (en) 2011-03-25 2022-11-16 Intel Corporation Memory fragments for supporting code block execution by using virtual cores instantiated by partitionable engines
CN103562866B (zh) 2011-03-25 2018-03-30 英特尔公司 用于通过使用由可分割引擎实例化的虚拟核来支持代码块执行的寄存器文件段
KR101638225B1 (ko) 2011-03-25 2016-07-08 소프트 머신즈, 인크. 분할가능한 엔진에 의해 인스턴스화된 가상 코어를 이용한 명령어 시퀀스 코드 블록의 실행
WO2012162189A1 (en) 2011-05-20 2012-11-29 Soft Machines, Inc. An interconnect structure to support the execution of instruction sequences by a plurality of engines
TWI666551B (zh) 2011-05-20 2019-07-21 美商英特爾股份有限公司 以複數個引擎作資源與互連結構的分散式分配以支援指令序列的執行
KR101703401B1 (ko) 2011-11-22 2017-02-06 소프트 머신즈, 인크. 다중 엔진 마이크로프로세서용 가속 코드 최적화기
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JP6088255B2 (ja) * 2013-01-17 2017-03-01 株式会社ブリヂストン 炭化ケイ素焼結体及びその製造方法
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CN105247484B (zh) 2013-03-15 2021-02-23 英特尔公司 利用本地分布式标志体系架构来仿真访客集中式标志体系架构的方法
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CN105210040B (zh) 2013-03-15 2019-04-02 英特尔公司 用于执行分组成块的多线程指令的方法
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Also Published As

Publication number Publication date
US5904892A (en) 1999-05-18
DE69713758D1 (de) 2002-08-08
ATE220055T1 (de) 2002-07-15
EP0891311A1 (en) 1999-01-20
KR20000005172A (ko) 2000-01-25
DE69713758T2 (de) 2003-07-17
KR100276154B1 (ko) 2000-12-15
EP0891311B1 (en) 2002-07-03
CN1214666A (zh) 1999-04-21
WO1997036843A1 (en) 1997-10-09
JPH11506570A (ja) 1999-06-08
JP2001039774A (ja) 2001-02-13
DK0891311T3 (da) 2002-10-28

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