DK0891311T3 - Erstatningswafer af båndstøbt siliciumcarbid - Google Patents

Erstatningswafer af båndstøbt siliciumcarbid

Info

Publication number
DK0891311T3
DK0891311T3 DK97917718T DK97917718T DK0891311T3 DK 0891311 T3 DK0891311 T3 DK 0891311T3 DK 97917718 T DK97917718 T DK 97917718T DK 97917718 T DK97917718 T DK 97917718T DK 0891311 T3 DK0891311 T3 DK 0891311T3
Authority
DK
Denmark
Prior art keywords
silicon carbide
strip cast
cast silicon
wafer
replacement wafer
Prior art date
Application number
DK97917718T
Other languages
English (en)
Inventor
Thomas M Holmes
Original Assignee
Saint Gobain Norton Ind Cerami
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Norton Ind Cerami filed Critical Saint Gobain Norton Ind Cerami
Application granted granted Critical
Publication of DK0891311T3 publication Critical patent/DK0891311T3/da

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/0051—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Silicon Compounds (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Drying Of Semiconductors (AREA)
DK97917718T 1996-04-01 1997-03-31 Erstatningswafer af båndstøbt siliciumcarbid DK0891311T3 (da)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/625,383 US5904892A (en) 1996-04-01 1996-04-01 Tape cast silicon carbide dummy wafer
PCT/US1997/005188 WO1997036843A1 (en) 1996-04-01 1997-03-31 Tape cast silicon carbide dummy wafer

Publications (1)

Publication Number Publication Date
DK0891311T3 true DK0891311T3 (da) 2002-10-28

Family

ID=24505827

Family Applications (1)

Application Number Title Priority Date Filing Date
DK97917718T DK0891311T3 (da) 1996-04-01 1997-03-31 Erstatningswafer af båndstøbt siliciumcarbid

Country Status (10)

Country Link
US (1) US5904892A (da)
EP (1) EP0891311B1 (da)
JP (2) JPH11506570A (da)
KR (1) KR100276154B1 (da)
CN (1) CN1214666A (da)
AT (1) ATE220055T1 (da)
DE (1) DE69713758T2 (da)
DK (1) DK0891311T3 (da)
ES (1) ES2180970T3 (da)
WO (1) WO1997036843A1 (da)

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Also Published As

Publication number Publication date
ATE220055T1 (de) 2002-07-15
DE69713758D1 (de) 2002-08-08
DE69713758T2 (de) 2003-07-17
WO1997036843A1 (en) 1997-10-09
JPH11506570A (ja) 1999-06-08
EP0891311B1 (en) 2002-07-03
KR100276154B1 (ko) 2000-12-15
EP0891311A1 (en) 1999-01-20
CN1214666A (zh) 1999-04-21
KR20000005172A (ko) 2000-01-25
ES2180970T3 (es) 2003-02-16
US5904892A (en) 1999-05-18
JP2001039774A (ja) 2001-02-13

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