ATE220055T1 - Bandgegossener siliciumcarbid-ersatzwafer - Google Patents

Bandgegossener siliciumcarbid-ersatzwafer

Info

Publication number
ATE220055T1
ATE220055T1 AT97917718T AT97917718T ATE220055T1 AT E220055 T1 ATE220055 T1 AT E220055T1 AT 97917718 T AT97917718 T AT 97917718T AT 97917718 T AT97917718 T AT 97917718T AT E220055 T1 ATE220055 T1 AT E220055T1
Authority
AT
Austria
Prior art keywords
silicon carbide
band
cast silicon
wafer
replacement wafer
Prior art date
Application number
AT97917718T
Other languages
English (en)
Inventor
Thomas M Holmes
Original Assignee
Saint Gobain Norton Ind Cerami
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Norton Ind Cerami filed Critical Saint Gobain Norton Ind Cerami
Application granted granted Critical
Publication of ATE220055T1 publication Critical patent/ATE220055T1/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
    • C04B38/0051—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof characterised by the pore size, pore shape or kind of porosity
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
    • C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
    • C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
    • C04B41/81—Coating or impregnation
    • C04B41/85—Coating or impregnation with inorganic materials
    • C04B41/87—Ceramics

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Drying Of Semiconductors (AREA)
AT97917718T 1996-04-01 1997-03-31 Bandgegossener siliciumcarbid-ersatzwafer ATE220055T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/625,383 US5904892A (en) 1996-04-01 1996-04-01 Tape cast silicon carbide dummy wafer
PCT/US1997/005188 WO1997036843A1 (en) 1996-04-01 1997-03-31 Tape cast silicon carbide dummy wafer

Publications (1)

Publication Number Publication Date
ATE220055T1 true ATE220055T1 (de) 2002-07-15

Family

ID=24505827

Family Applications (1)

Application Number Title Priority Date Filing Date
AT97917718T ATE220055T1 (de) 1996-04-01 1997-03-31 Bandgegossener siliciumcarbid-ersatzwafer

Country Status (10)

Country Link
US (1) US5904892A (de)
EP (1) EP0891311B1 (de)
JP (2) JPH11506570A (de)
KR (1) KR100276154B1 (de)
CN (1) CN1214666A (de)
AT (1) ATE220055T1 (de)
DE (1) DE69713758T2 (de)
DK (1) DK0891311T3 (de)
ES (1) ES2180970T3 (de)
WO (1) WO1997036843A1 (de)

Families Citing this family (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6161270A (en) * 1999-01-29 2000-12-19 Eastman Kodak Company Making printheads using tapecasting
JP4589491B2 (ja) * 1999-08-24 2010-12-01 株式会社ブリヂストン 炭化ケイ素粉末、グリーン体の製造方法、及び炭化ケイ素焼結体の製造方法
US6517908B1 (en) 2000-01-10 2003-02-11 Nec Electronics, Inc. Method for making a test wafer from a substrate
US20020130061A1 (en) * 2000-11-02 2002-09-19 Hengst Richard R. Apparatus and method of making a slip free wafer boat
US20040173948A1 (en) * 2002-09-19 2004-09-09 Pandelisev Kiril A. Process and apparatus for silicon boat, silicon tubing and other silicon based member fabrication
JP4198349B2 (ja) * 2001-11-08 2008-12-17 株式会社ブリヂストン 炭化ケイ素焼結体の洗浄方法
US20030233977A1 (en) * 2002-06-20 2003-12-25 Yeshwanth Narendar Method for forming semiconductor processing components
US6825123B2 (en) * 2003-04-15 2004-11-30 Saint-Goban Ceramics & Plastics, Inc. Method for treating semiconductor processing components and components formed thereby
DE10328842B4 (de) 2003-06-26 2007-03-01 Siltronic Ag Suszeptor für eine chemische Gasphasenabscheidung, Verfahren zur Bearbeitung einer Halbleiterscheibe durch chemische Gasphasenabscheidung und nach dem Verfahren bearbeitete Halbleiterscheibe
US7132066B2 (en) * 2003-09-30 2006-11-07 Ngk Insulators, Ltd. Method for producing honeycomb structure and honeycomb structure
US7501370B2 (en) * 2004-01-06 2009-03-10 Saint-Gobain Ceramics & Plastics, Inc. High purity silicon carbide wafer boats
US20050145584A1 (en) * 2004-01-06 2005-07-07 Buckley Richard F. Wafer boat with interference fit wafer supports
CN100388412C (zh) * 2004-04-23 2008-05-14 上海华虹Nec电子有限公司 改善炉体两端膜厚面内均一性的方法
US8327115B2 (en) 2006-04-12 2012-12-04 Soft Machines, Inc. Plural matrices of execution units for processing matrices of row dependent instructions in single clock cycle in super or separate mode
EP2527972A3 (de) 2006-11-14 2014-08-06 Soft Machines, Inc. Vorrichtung und Verfahren zum Verarbeiten von komplexen Anweisungsformaten in einer Multi-Thread-Architektur, die verschiedene Kontextschaltungsmodi und Visualisierungsschemen unterstützt
CN101827638B (zh) * 2007-08-03 2016-07-13 埃尔西韦公司 多孔体和方法
US7727919B2 (en) 2007-10-29 2010-06-01 Saint-Gobain Ceramics & Plastics, Inc. High resistivity silicon carbide
CN101884099B (zh) * 2007-12-20 2012-07-25 圣戈本陶瓷及塑料股份有限公司 用于处理半导体加工部件的方法以及由此形成的部件
KR100990513B1 (ko) 2008-07-10 2010-10-29 주식회사 도시환경이엔지 태양전지 셀의 웨이퍼 제조장치 및 이를 이용한 웨이퍼제조방법
US8894920B2 (en) * 2008-10-31 2014-11-25 Corning Incorporated Methods and apparatus for casting ceramic sheets
US8277743B1 (en) 2009-04-08 2012-10-02 Errcive, Inc. Substrate fabrication
US8359829B1 (en) 2009-06-25 2013-01-29 Ramberg Charles E Powertrain controls
JP5628530B2 (ja) * 2010-02-10 2014-11-19 株式会社ブリヂストン 貼り合わせ基板用支持基板およびその製造方法
US9833932B1 (en) 2010-06-30 2017-12-05 Charles E. Ramberg Layered structures
KR101685247B1 (ko) 2010-09-17 2016-12-09 소프트 머신즈, 인크. 조기 원거리 분기 예측을 위한 섀도우 캐시를 포함하는 단일 사이클 다중 분기 예측
WO2012071353A1 (en) 2010-11-22 2012-05-31 Saint-Gobain Ceramics & Plastics, Inc. Infiltrated silicon carbide bodies and methods of making
JP2012201543A (ja) * 2011-03-25 2012-10-22 Sumitomo Electric Ind Ltd 炭化珪素基板
EP2689326B1 (de) 2011-03-25 2022-11-16 Intel Corporation Speicherfragmente zur unterstützung einer codeblockausführung mittels durch partitionierbare engines realisierter virtueller kerne
CN103547993B (zh) 2011-03-25 2018-06-26 英特尔公司 通过使用由可分割引擎实例化的虚拟核来执行指令序列代码块
CN108376097B (zh) 2011-03-25 2022-04-15 英特尔公司 用于通过使用由可分割引擎实例化的虚拟核来支持代码块执行的寄存器文件段
TWI603198B (zh) 2011-05-20 2017-10-21 英特爾股份有限公司 以複數個引擎作資源與互連結構的分散式分配以支援指令序列的執行
WO2012162189A1 (en) 2011-05-20 2012-11-29 Soft Machines, Inc. An interconnect structure to support the execution of instruction sequences by a plurality of engines
EP2783280B1 (de) 2011-11-22 2019-09-11 Intel Corporation Beschleunigter codeoptimierer für einen mehrmotor-mikroprozessor
WO2013077876A1 (en) 2011-11-22 2013-05-30 Soft Machines, Inc. A microprocessor accelerated code optimizer
JP6088255B2 (ja) * 2013-01-17 2017-03-01 株式会社ブリヂストン 炭化ケイ素焼結体及びその製造方法
US9569216B2 (en) 2013-03-15 2017-02-14 Soft Machines, Inc. Method for populating a source view data structure by using register template snapshots
CN105247484B (zh) 2013-03-15 2021-02-23 英特尔公司 利用本地分布式标志体系架构来仿真访客集中式标志体系架构的方法
US9886279B2 (en) 2013-03-15 2018-02-06 Intel Corporation Method for populating and instruction view data structure by using register template snapshots
US10140138B2 (en) 2013-03-15 2018-11-27 Intel Corporation Methods, systems and apparatus for supporting wide and efficient front-end operation with guest-architecture emulation
US10275255B2 (en) 2013-03-15 2019-04-30 Intel Corporation Method for dependency broadcasting through a source organized source view data structure
US9891924B2 (en) 2013-03-15 2018-02-13 Intel Corporation Method for implementing a reduced size register view data structure in a microprocessor
WO2014150991A1 (en) 2013-03-15 2014-09-25 Soft Machines, Inc. A method for implementing a reduced size register view data structure in a microprocessor
US9811342B2 (en) 2013-03-15 2017-11-07 Intel Corporation Method for performing dual dispatch of blocks and half blocks
WO2014150971A1 (en) 2013-03-15 2014-09-25 Soft Machines, Inc. A method for dependency broadcasting through a block organized source view data structure
EP2972845B1 (de) 2013-03-15 2021-07-07 Intel Corporation Verfahren zur ausführung von in blöcken gruppierten befehlen aus mehreren threads
US9904625B2 (en) 2013-03-15 2018-02-27 Intel Corporation Methods, systems and apparatus for predicting the way of a set associative cache
WO2014150806A1 (en) 2013-03-15 2014-09-25 Soft Machines, Inc. A method for populating register view data structure by using register template snapshots
CN107602129B (zh) * 2017-10-12 2020-09-01 华中科技大学 一种SiC的水基流延制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2486410A (en) * 1944-09-15 1949-11-01 Glenn N Howatt Continuous process for forming high dielectric ceramic plates
US3726737A (en) * 1970-10-22 1973-04-10 Nippon Oil Seal Ind Co Ltd Method of producing silicon carbide articles having thin layer construction
US3879509A (en) * 1971-09-07 1975-04-22 Gilbert James Elderbaum Method of producing thin ceramic sheets with minimal distortion
US3998646A (en) * 1974-11-11 1976-12-21 Norton Company Process for forming high density silicon carbide
JPS57156376A (en) * 1981-03-24 1982-09-27 Tokai Konetsu Kogyo Kk Manufacture of silicon carbide structure
EP0126790B1 (de) * 1983-05-27 1986-09-03 Ibm Deutschland Gmbh Zusammengesetzte Magnetplatte
US4525429A (en) * 1983-06-08 1985-06-25 Kennecott Corporation Porous semiconductor dopant carriers
GB8607596D0 (en) * 1986-03-26 1986-04-30 Ici Plc Dispersible composition of ceramic
EP0486938B1 (de) * 1990-11-20 1999-05-19 Asahi Glass Company Ltd. Wärmebehandlungsapparate für Halbleiter und hochreine Siliciumcarbidteile für die Apparate und Verfahren zu ihrer Herstellung
US5279994A (en) * 1993-02-11 1994-01-18 W. R. Grace & Co.-Conn. Aqueous processing of green ceramic tapes
US5480695A (en) * 1994-08-10 1996-01-02 Tenhover; Michael A. Ceramic substrates and magnetic data storage components prepared therefrom
EP0758310A1 (de) * 1995-03-01 1997-02-19 Saint-Gobain/Norton Industrial Ceramics Corporation Neuer siliciumcarbid ersatzwafer

Also Published As

Publication number Publication date
JPH11506570A (ja) 1999-06-08
DK0891311T3 (da) 2002-10-28
ES2180970T3 (es) 2003-02-16
CN1214666A (zh) 1999-04-21
KR100276154B1 (ko) 2000-12-15
EP0891311A1 (de) 1999-01-20
EP0891311B1 (de) 2002-07-03
US5904892A (en) 1999-05-18
KR20000005172A (ko) 2000-01-25
WO1997036843A1 (en) 1997-10-09
DE69713758T2 (de) 2003-07-17
JP2001039774A (ja) 2001-02-13
DE69713758D1 (de) 2002-08-08

Similar Documents

Publication Publication Date Title
ATE220055T1 (de) Bandgegossener siliciumcarbid-ersatzwafer
DE69518746D1 (de) Siliciumnitrid/siliciumcarbid kompositpulver, ihre herstellung und unter verwendung der kompositpulver hergestellte verdichtete werkstoffe
EP1338322A4 (de) Mit katalysator ausgerüstetes filter
DE59800697D1 (de) Feuerfester werkstoff auf basis chromkorund, chromkorund-stein sowie verwendung des steins
DK0775018T4 (da) Fremgangsmåde til fremstilling af katalysatorer af cobalt på aluminiumoxid
SE9604793D0 (sv) New polymorphs
TW342427B (en) Friction engaging device
ITTO940751A0 (it) Procedimento per la produzione di carburo di ferro.
DE69506389D1 (de) In situ herstellung von siliciumcarbid enthaltenden keramischen kompositpulvern
WO2000037856A3 (en) Novel ceramic igniter having improved oxidation resistance, and method of using same
EP0662462A3 (de) Verfahren zum Herstellen von keramischen Bauteilen aus Siliziumcarbid.
EP0195353A3 (de) Keramische Hohlfasern
CA2311181A1 (en) Aging resistant, porous silicon carbide ceramic igniter
BG105539A (en) Eletriptan hydrobromide monohydrate
EP1479660A3 (de) Beschichtung für siliziumhaltiges Substrat
GB9823432D0 (en) The finishing of tungsten carbide surfaces
BG107046A (en) Stepwise alkylation of 5-substituted 1-(4-fluorophenyl)-1,3-dihydroisobenzofurans
PT1401758E (pt) Freio para o cabo do limitador de velocidade de um ascensor
ZA92832B (en) Roll,comprising cemented carbide and cast iron,and method for manufacture of the same
BG101787A (en) Aprotinine options having improved properties
ATE227252T1 (de) Oxidations- und korrosionsbeständiger, flexibler graphitkompositfilm und verfahren
DE69512349D1 (de) Verfahren zur Herstellung von Kompositsinterkörpern aus Siliciumkarbid und Siliciumnitrid
DE69725459D1 (de) Substituierte 1,2,3,4-tetrahydro-2-dibenzofuranamine und 2-aminocyclohepta(b)benzofurane
MX9605290A (es) Novedosa rodaja falsa de carburo de silicio.
TR200002727T2 (tr) Kopça

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties