ES2132199T3 - Litografia por electrones con utilizacion de un fotocatodo. - Google Patents
Litografia por electrones con utilizacion de un fotocatodo.Info
- Publication number
- ES2132199T3 ES2132199T3 ES93309854T ES93309854T ES2132199T3 ES 2132199 T3 ES2132199 T3 ES 2132199T3 ES 93309854 T ES93309854 T ES 93309854T ES 93309854 T ES93309854 T ES 93309854T ES 2132199 T3 ES2132199 T3 ES 2132199T3
- Authority
- ES
- Spain
- Prior art keywords
- photocatode
- photocathode
- electronic lithography
- photocate
- micrometric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
- H01J37/3174—Particle-beam lithography, e.g. electron beam lithography
- H01J37/3175—Projection methods, i.e. transfer substantially complete pattern to substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/04—Means for controlling the discharge
- H01J2237/049—Focusing means
- H01J2237/0492—Lens systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/063—Electron sources
- H01J2237/06325—Cold-cathode sources
- H01J2237/06333—Photo emission
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/10—Lenses
- H01J2237/14—Lenses magnetic
- H01J2237/142—Lenses magnetic with superconducting coils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/30—Electron or ion beam tubes for processing objects
- H01J2237/317—Processing objects on a microscale
- H01J2237/3175—Lithography
- H01J2237/31777—Lithography by projection
- H01J2237/31779—Lithography by projection from patterned photocathode
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S430/00—Radiation imagery chemistry: process, composition, or product thereof
- Y10S430/143—Electron beam
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electron Beam Exposure (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
LA DELINEACION DE DISEÑOS SUB-MICROMETRICOS, IMPORTANTES EN LA FABRICACION A GRAN ESCALA DE DISPOSITIVOS INTEGRADOS, ESTA BASADA EN UN FOTOCATODO ESTAMPADO (3, 4, 6, 7). FUNCIONALMENTE, EN LOS SISTEMAS QUE NOS COMPETEN, EL FOTOCATODO JUEGA EL PAPEL DE MASCARA, BIEN EN IMPRESION POR PROXIMIDAD O EN PROYECCION. EN OPERACION, EL FOTOCATODO SE ILUMINA CON RADIACION ULTRAVIOLETA (5) PARA LIBERAR ELECTRONES (9) QUE SE LLEVAN AL FOCO SOBRE UN DISCO REVESTIDO DE RESISTENCIA (12, 13) CON LA ASISTENCIA DE UN CAMPO MAGNETICO UNIFORME (B) JUNTO CON UN VOLTAJE DE ACELERACION (E) APLICADO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/997,817 US5395738A (en) | 1992-12-29 | 1992-12-29 | Electron lithography using a photocathode |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2132199T3 true ES2132199T3 (es) | 1999-08-16 |
Family
ID=25544430
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES93309854T Expired - Lifetime ES2132199T3 (es) | 1992-12-29 | 1993-12-08 | Litografia por electrones con utilizacion de un fotocatodo. |
Country Status (8)
Country | Link |
---|---|
US (1) | US5395738A (es) |
EP (1) | EP0605964B1 (es) |
JP (1) | JPH06283466A (es) |
KR (1) | KR100328799B1 (es) |
CA (1) | CA2107451C (es) |
DE (1) | DE69324560T2 (es) |
ES (1) | ES2132199T3 (es) |
TW (1) | TW249865B (es) |
Families Citing this family (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998048443A1 (en) * | 1997-04-18 | 1998-10-29 | Etec Systems, Inc. | Multi-beam array electron optics |
KR100438806B1 (ko) * | 1997-09-12 | 2004-07-16 | 삼성전자주식회사 | 광향상전자방출을이용한전자빔리소그래피방법 |
GB2333642A (en) * | 1998-01-21 | 1999-07-28 | Ibm | Photo-cathode electron source having an extractor grid |
US6014203A (en) * | 1998-01-27 | 2000-01-11 | Toyo Technologies, Inc. | Digital electron lithography with field emission array (FEA) |
US6376985B2 (en) | 1998-03-31 | 2002-04-23 | Applied Materials, Inc. | Gated photocathode for controlled single and multiple electron beam emission |
US6515292B1 (en) * | 1998-05-19 | 2003-02-04 | California Institute Of Technology | High resolution electron projection |
DE69904881T2 (de) * | 1998-07-01 | 2003-10-30 | Asml Netherlands Bv | Projektionsbelichtungsgerät |
USRE41220E1 (en) | 1999-07-22 | 2010-04-13 | Corning Incorporated | Extreme ultraviolet soft x-ray projection lithographic method system and lithographic elements |
KR100647968B1 (ko) | 1999-07-22 | 2006-11-17 | 코닝 인코포레이티드 | 극 자외선 소프트 x-선 투사 리소그라피 방법 및 마스크디바이스 |
US6376984B1 (en) * | 1999-07-29 | 2002-04-23 | Applied Materials, Inc. | Patterned heat conducting photocathode for electron beam source |
US6476401B1 (en) | 1999-09-16 | 2002-11-05 | Applied Materials, Inc. | Moving photocathode with continuous regeneration for image conversion in electron beam lithography |
US6476402B1 (en) * | 2000-07-19 | 2002-11-05 | Samsung Electronics Co., Ltd. | Apparatus for pyroelectric emission lithography using patterned emitter |
US6828574B1 (en) * | 2000-08-08 | 2004-12-07 | Applied Materials, Inc. | Modulator driven photocathode electron beam generator |
US6776006B2 (en) | 2000-10-13 | 2004-08-17 | Corning Incorporated | Method to avoid striae in EUV lithography mirrors |
US6844560B2 (en) | 2001-08-13 | 2005-01-18 | Mapper Lithography Ip B.V. | Lithography system comprising a converter plate and means for protecting the converter plate |
KR100429843B1 (ko) * | 2001-09-22 | 2004-05-03 | 삼성전자주식회사 | 전자 방출 및 상변화물질을 이용한 고밀도정보기록/재생방법 및 이를 응용한 정보저장장치 및 이에사용되는 미디어 |
US6919952B2 (en) | 2002-03-19 | 2005-07-19 | Mapper Lithography Ip B.V. | Direct write lithography system |
US7019312B2 (en) | 2002-06-20 | 2006-03-28 | Mapper Lithography Ip B.V. | Adjustment in a MAPPER system |
US7015467B2 (en) | 2002-10-10 | 2006-03-21 | Applied Materials, Inc. | Generating electrons with an activated photocathode |
US7161162B2 (en) * | 2002-10-10 | 2007-01-09 | Applied Materials, Inc. | Electron beam pattern generator with photocathode comprising low work function cesium halide |
US7576341B2 (en) * | 2004-12-08 | 2009-08-18 | Samsung Electronics Co., Ltd. | Lithography systems and methods for operating the same |
KR100590574B1 (ko) * | 2004-12-21 | 2006-06-19 | 삼성전자주식회사 | 전자기장 포커싱 장치 및 이를 채용한 전자빔 리소그라피시스템 |
JP4894223B2 (ja) * | 2005-10-26 | 2012-03-14 | ソニー株式会社 | 平面型表示装置 |
KR20060088865A (ko) | 2006-07-13 | 2006-08-07 | 정효수 | 광방출 소자, 그 제조방법 및 광방출 소자를 이용한 노광장치 |
US8692204B2 (en) * | 2011-04-26 | 2014-04-08 | Kla-Tencor Corporation | Apparatus and methods for electron beam detection |
US9291578B2 (en) * | 2012-08-03 | 2016-03-22 | David L. Adler | X-ray photoemission microscope for integrated devices |
US9666419B2 (en) * | 2012-08-28 | 2017-05-30 | Kla-Tencor Corporation | Image intensifier tube design for aberration correction and ion damage reduction |
JP2014138163A (ja) * | 2013-01-18 | 2014-07-28 | Ebara Corp | 電子露光装置 |
JP2015041648A (ja) * | 2013-08-20 | 2015-03-02 | 株式会社東芝 | パターン形成方法、パターン形成用マスク及びパターン形成装置 |
US10224175B2 (en) | 2015-03-18 | 2019-03-05 | Battelle Memorial Institute | Compressive transmission microscopy |
US10170274B2 (en) | 2015-03-18 | 2019-01-01 | Battelle Memorial Institute | TEM phase contrast imaging with image plane phase grating |
US10580614B2 (en) | 2016-04-29 | 2020-03-03 | Battelle Memorial Institute | Compressive scanning spectroscopy |
US10295677B2 (en) | 2017-05-08 | 2019-05-21 | Battelle Memorial Institute | Systems and methods for data storage and retrieval |
US10937630B1 (en) * | 2020-04-27 | 2021-03-02 | John Bennett | Modular parallel electron lithography |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3806756A (en) * | 1972-10-16 | 1974-04-23 | Nasa | Image tube |
US4350919A (en) * | 1977-09-19 | 1982-09-21 | International Telephone And Telegraph Corporation | Magnetically focused streak tube |
GB8422895D0 (en) * | 1984-09-11 | 1984-10-17 | Texas Instruments Ltd | Electron beam apparatus |
GB8514390D0 (en) * | 1985-06-07 | 1985-07-10 | Turner D W | Electron lithography |
GB2180669A (en) * | 1985-09-20 | 1987-04-01 | Phillips Electronic And Associ | An electron emissive mask for an electron beam image projector, its manufacture, and the manufacture of a solid state device using such a mask |
EP0312653A1 (en) * | 1987-10-22 | 1989-04-26 | Koninklijke Philips Electronics N.V. | Electron image projector |
JPH01158731A (ja) * | 1987-12-15 | 1989-06-21 | Fujitsu Ltd | 光電子転写露光方法およびこれに用いられるマスク |
US5156942A (en) * | 1989-07-11 | 1992-10-20 | Texas Instruments Incorporated | Extended source E-beam mask imaging system and method |
-
1992
- 1992-12-29 US US07/997,817 patent/US5395738A/en not_active Expired - Lifetime
-
1993
- 1993-03-10 TW TW082101770A patent/TW249865B/zh not_active IP Right Cessation
- 1993-09-30 CA CA002107451A patent/CA2107451C/en not_active Expired - Fee Related
- 1993-11-25 KR KR1019930025202A patent/KR100328799B1/ko not_active IP Right Cessation
- 1993-12-08 DE DE69324560T patent/DE69324560T2/de not_active Expired - Fee Related
- 1993-12-08 EP EP93309854A patent/EP0605964B1/en not_active Expired - Lifetime
- 1993-12-08 ES ES93309854T patent/ES2132199T3/es not_active Expired - Lifetime
- 1993-12-24 JP JP5325582A patent/JPH06283466A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CA2107451A1 (en) | 1994-06-30 |
KR940016473A (ko) | 1994-07-23 |
EP0605964B1 (en) | 1999-04-21 |
US5395738A (en) | 1995-03-07 |
DE69324560T2 (de) | 1999-09-23 |
DE69324560D1 (de) | 1999-05-27 |
TW249865B (es) | 1995-06-21 |
CA2107451C (en) | 1998-08-18 |
EP0605964A3 (en) | 1994-11-17 |
KR100328799B1 (ko) | 2002-08-21 |
EP0605964A2 (en) | 1994-07-13 |
JPH06283466A (ja) | 1994-10-07 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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