GB8422895D0 - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
GB8422895D0
GB8422895D0 GB848422895A GB8422895A GB8422895D0 GB 8422895 D0 GB8422895 D0 GB 8422895D0 GB 848422895 A GB848422895 A GB 848422895A GB 8422895 A GB8422895 A GB 8422895A GB 8422895 D0 GB8422895 D0 GB 8422895D0
Authority
GB
United Kingdom
Prior art keywords
electron beam
beam apparatus
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GB848422895A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Ltd
Original Assignee
Texas Instruments Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Texas Instruments Ltd filed Critical Texas Instruments Ltd
Priority to GB848422895A priority Critical patent/GB8422895D0/en
Publication of GB8422895D0 publication Critical patent/GB8422895D0/en
Priority to GB08522530A priority patent/GB2164787A/en
Pending legal-status Critical Current

Links

GB848422895A 1984-09-11 1984-09-11 Electron beam apparatus Pending GB8422895D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB848422895A GB8422895D0 (en) 1984-09-11 1984-09-11 Electron beam apparatus
GB08522530A GB2164787A (en) 1984-09-11 1985-09-11 Electron beam apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB848422895A GB8422895D0 (en) 1984-09-11 1984-09-11 Electron beam apparatus

Publications (1)

Publication Number Publication Date
GB8422895D0 true GB8422895D0 (en) 1984-10-17

Family

ID=10566539

Family Applications (2)

Application Number Title Priority Date Filing Date
GB848422895A Pending GB8422895D0 (en) 1984-09-11 1984-09-11 Electron beam apparatus
GB08522530A Withdrawn GB2164787A (en) 1984-09-11 1985-09-11 Electron beam apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB08522530A Withdrawn GB2164787A (en) 1984-09-11 1985-09-11 Electron beam apparatus

Country Status (1)

Country Link
GB (2) GB8422895D0 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8514390D0 (en) * 1985-06-07 1985-07-10 Turner D W Electron lithography
GB2282480B (en) * 1990-07-05 1995-07-26 Olivetti Systems & Networks S Integrated circuit structure analysis
US5395738A (en) * 1992-12-29 1995-03-07 Brandes; George R. Electron lithography using a photocathode
EP0881542A1 (en) * 1997-05-26 1998-12-02 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Lithography system
WO1999048129A1 (en) * 1998-03-20 1999-09-23 Etec Systems, Inc. Tandem optical scanner/stepper and photoemission converter for electron beam lithography
US6215128B1 (en) 1999-03-18 2001-04-10 Etec Systems, Inc. Compact photoemission source, field and objective lens arrangement for high throughput electron beam lithography
US6376984B1 (en) 1999-07-29 2002-04-23 Applied Materials, Inc. Patterned heat conducting photocathode for electron beam source
US6448568B1 (en) 1999-07-30 2002-09-10 Applied Materials, Inc. Electron beam column using high numerical aperture photocathode source illumination
US6476401B1 (en) 1999-09-16 2002-11-05 Applied Materials, Inc. Moving photocathode with continuous regeneration for image conversion in electron beam lithography
AU2003224494A1 (en) 2002-03-19 2003-09-29 Mapper Lithography Ip B.V. Direct write lithography system
US7019312B2 (en) 2002-06-20 2006-03-28 Mapper Lithography Ip B.V. Adjustment in a MAPPER system
GB2443016B (en) * 2006-10-16 2009-08-26 Vistec Lithography Ltd Electron beam influencing in an electron beam lithography machine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1055012A (en) * 1965-02-12 1967-01-11 Mullard Ltd Improvements in or relating to methods of manufacturing an article having a surface pattern
GB1199196A (en) * 1967-08-17 1970-07-15 Mini Of Technology London Improvements in or relating to Electron Sources for Cathode-Ray-Tubes and the like
GB2111299B (en) * 1981-11-30 1986-07-09 Thermo Electron Corp High current density photoelectron generators
GB2146168A (en) * 1983-09-05 1985-04-11 Philips Electronic Associated Electron image projector
GB2147141A (en) * 1983-09-26 1985-05-01 Philips Electronic Associated Electron image projector

Also Published As

Publication number Publication date
GB2164787A (en) 1986-03-26
GB8522530D0 (en) 1985-10-16

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